Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2003Wet etching studies of silicon nitride thin films deposited by electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition
Sundaram, K.B.; Sah, R.E.; Baumann, H.; Balachandran, K.; Todi, R.M.
Journal Article
2002High-density plasma deposited silicon nitride films for coating InGaAlAs high-power lasers
Sah, R.E.; Rinner, F.; Kiefer, R.; Mikulla, M.; Weimann, G.
Conference Paper