Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Murakami, Katsuhisa; Rommel, Mathias; Yanev, Vasil; Bauer, Anton J.; Frey, Lothar
Conference Paper
2003Deep UV laser induced fluorescence in fluoride thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2003Some fundamentals of optical thin film growth
Kaiser, N.
Book Article
2002193 nm laser induced fluorescence in fluoride thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2002193 nm laser induced luminescence in oxide thin films
Heber, J.; Mühlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2002Deep UV laser induced luminescence in oxide thin films
Heber, J.; Muhlig, C.; Triebel, W.; Danz, N.; Thielsch, R.; Kaiser, N.
Journal Article
2001New Applications for Optical Coatings
Kaiser, N.
Book Article
2001Optical Coatings for Ultraviolet Radiation
Kaiser, N.
Book Article
1998Low dielectric constant materials for interlayer dielectric
Treichel, H.; Ruhl, G.; Ansmann, P.; Wurl, R.; Müller, C.
Journal Article
1997Embedding technology - a chip-first approach using BCB
Töpper, M.; Buschick, K.; Wolf, J.; Glaw, V.; Hahn, R.; Dabek, A.; Ehrmann, O.; Reichl, H.
Conference Paper
1997Improved current-voltage characteristics of downstream plasma enhanced chemical vapor deposition SiNx deposited at low temperature by using He as a dilution gas
Arps, M.; Marlowitz, A.
Journal Article