Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Fabrication and characterization of bending-independent capacitive CMOS pressure sensor stacks
Fischer, Roland; Ditler, Heinrich; Görtz, Michael; Mokwa, Wilfried
Journal Article, Conference Paper
2003New manufacturing concepts for ultra-thin silicon and gallium arsenide substrates
Bock, K.; Bleier, M.; Köthe, O.; Landesberger, C.
Conference Paper
2001Innovative packaging concepts for ultra thin integrated circuits
Klink, G.; Feil, M.; Ansorge, F.; Aschenbrenner, R.; Reichl, H.
Conference Paper