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| 2011 | Deposition rate characteristics for steady state high power impulse magnetron sputtering (HIPIMS) discharges generated with a modulated pulsed power (MPP) generator
Papa, F.; Gerdes, H.; Bandorf, R.; Ehiasarian, A. P.; Kolev, I.; Bräuer, G.; Tietema, R.; Krug, T. | Journal Article, Conference Paper |
| 2010 | Modelling of sputtering yield amplification effect in reactive deposition of oxides
Kubart, T.; Nyberg, T.; Pflug, A.; Siemers, M.; Austgen, M.; Koehl, D.; Wuttig, M.; Berg, S. | Journal Article |
| 2007 | Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra
Wilbrandt, S.; Stenzel, O.; Kaiser, N. | Journal Article |
| 2003 | Evaluation of deposition conditions to design plasma coatings like SiOx and a-C:H on polymers
Hegemann, D.; Brunner, H.; Oehr, C. | Journal Article, Conference Paper |
| 2002 | C-Axis oriented AlN films prepared on diamond film substrate by electron cyclotron resonance plasma-enhanced chemical vapor deposition
Gong, H.; Jiang, X. | Journal Article |
| 2002 | Ensuring long term stability of process and film parameters during target lifetime in reactive magnetron sputtering
Bartzsch, H.; Frach, P.; Goedicke, K.; Böcher, B.; Gottfried, C. | Conference Paper |
| 2002 | Investigation of long throw PVD of titanium films from polycrystalline targets with texture
Wolf, H.; Streiter, R.; Tirschler, W.; Giegengack, H.; Urbansky, N.; Gessner, T. | Journal Article |
| 2001 | Deposition rate and three-dimensional uniformity of RF plasma deposited SiOx films
Hegemann, D.; Brunner, H.; Oehr, C. | Journal Article |
| 1997 | Deposition of SiOx Thin Films by Corona Discharges at Atmospheric Pressure
Thyen, R.; Weber, A.; Klages, C.-P. | Conference Paper |
| 1992 | Einflußparameter für galvanisch erzeugte Nickeldispersionsschichten -Ni-SiC-
Mertz, K.; Gemmler, A.; Metzger, W. | Journal Article |
| 1991 | Einflußparameter für galvanisch erzeugte Nickeldispersionsschichten -Ni-SiC-
Mertz, K.; Gemmler, A.; Metzger, W. | Conference Paper |