Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018The effect of etching and deposition processes on the width of spacers created during self-aligned double patterning
Baer, Eberhard; Lorenz, Juergen
Conference Paper
2018Solder joint analysis on coated aluminum for silicon solar cell interconnection
De Rose, A.; Kraft, A.; Eitner, U.; Nowottnick, M.
Conference Paper
2017Solder interconnection of aluminum foil rear side metallization for passivated emitter and rear solar cells
De Rose, A.; Kraft, A.; Gledhill, S.; Ali, M.T.; Kroyer, T.; Pscherer, C.; Graf, M.; Nekarda, J.; Eitner, U.
Conference Paper
2015Energy filtering transmission electron microscopy and atomistic simulations of tribo-induced hybridization change of nanocrystalline diamond coating
Barros Bouchet, M.I. de; Matta, C.; Vacher, B.; Le-Mogne, T.; Martin, J.M.; Lautz, J. von; Ma, T.; Pastewka, L.; Otschik, J.; Gumbsch, P.; Moseler, M.
Journal Article
2014Challenges and opportunities for process modeling in the nanotechnology era
Lorenz, J.K.; Baer, E.; Burenkov, A.; Erdmann, A.; Evanschitzky, P.; Pichler, P.
Journal Article
2014Interdigitated back contact silicon solar cells with tunnel oxide passivated contacts formed by ion implantation
Reichel, C.; Feldmann, F.; Müller, R.; Moldovan, A.; Hermle, M.; Glunz, S.W.
Conference Paper
2014Reaction kinetics during the thermal activation of the silicon surface passivation with atomic layer deposited Al2O3
Richter, A.; Benick, J.; Hermle, M.; Glunz, S.W.
Journal Article
2014Studies on thermoplastic 3D printing of steel-zirconia composites
Scheithauer, Uwe; Bergner, Anne; Schwarzer, Eric; Richter, Hans-Jürgen; Moritz, Tassilo
Journal Article
2011Effect of particle concentration and semi-volatile organic compounds on the phenomenon of 'black magic dust' in dwellings
Salthammer, T.; Fauck, C.; Schripp, T.; Meinlschmidt, P.; Willenborg, S.; Moriske, H.-J.
Journal Article
2008Electrically insulating Al2O3 and SiO2 films for sensor and photovoltaic applications deposited by reactive pulse magnetron sputtering, hollow cathode arc activated deposition and magnetron-PECVD
Frach, P.; Bartzsch, H.; Glöß, D.; Fahland, M.; Händel, F.
Journal Article, Conference Paper
2008The structure of Mo/Si multilayers prepared in the conditions of ionic assistance
Zubarev, E.N.; Kondratenko, V.V.; Sevryukova, V.A.; Yulin, S.A.; Feigl, T.; Kaiser, N.
Journal Article
2007Determination of plasma parameters during deposition of ZnO films by ceramic and metallic targets and correlation with film properties
Wiese, R.; Kersten, H.; Hannemann, M.; Sittinger, V.; Ruske, F.; Menner, R.
Conference Paper, Journal Article
2005Microstructure Characterization and Modifying of Materials by Focused Ion Beam Techniques
Bernland, K.
Term paper
2003Symmetrical periods for antireflection coating of plastic optics
Schulz, U.; Schallenberg, U.B.; Kaiser, N.
Journal Article
2003Transparent thermoplastic polymers in plasma-assisted coating processes
Munzert, P.; Schulz, U.; Kaiser, N.
Conference Paper, Journal Article
2002The CAP-reactor, a novel microwave CVD system for diamond deposition
Pleuler, E.; Wild, C.; Füner, M.; Koidl, P.
Journal Article
2002Schwermetalleinträge in die Oberflächengewässer Deutschlands
Fuchs, S.; Scherer, U.; Hillenbrand, T.; Marscheider-Weidemann, F.; Behrendt, H.; Opitz, D.
Book
2001Bilanzierung des Eintrags prioritärer Schwermetalle in Gewässer
Böhm, E.; Hillenbrand, T.; Marscheider-Weidemann, F.; Schempp, C.
: Fuchs, S.; Scherer, U.
Report
2001High-reflectivity dense UV mirrors
Torchio, P.; Gatto, A.; Alvisi, M.; Albrand, G.; Kaiser, N.; Amra, C.
Conference Paper
1999Temporal and spatial variation of sulfur-gas-transfer between coastal marine sediments and the atmosphere
Bodenbender, J.; Wassmann, R.; Papen, H.; Rennenberg, H.
Journal Article
1999Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering
Szyszka, B.
Journal Article
1998Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy
Petrik, P.; Biro, L.P.; Fried, M.; Lohner, T.; Berger, R.; Schneider, C.; Gyulai, J.; Ryssel, H.
Journal Article
1998Deposition of c-BN films by DC magnetron sputtering
Kouptsidis, S.; Lüthje, H.; Bewilogua, K.; Schütze, A.; Zhang, P.
Journal Article
1997Integrated three-dimensional topography simulation of contact hole processing
Bär, E.; Benvenuti, A.; Henke, W.; Jünemann, B.; Kalus, C.; Niedermaier, P.; Lorenz, J.
Conference Paper
1995Analysis of contamination - a must for ultraclean technology
Ryssel, H.; Streckfuß, N.; Aderhold, W.; Berger, R.; Falter, T.; Frey, L.
Conference Paper
1994Description of transfer and deposition during PLD of thin ceramic films
Alunovic, M.; Kreutz, E.W.; Voss, A.; Aden, M.; Sung, H.
Journal Article
1994E-Modul von mit gepulstem Vakuumbogen hergestellten diamantähnlichen Kohlenstoffschichten
Schultrich, B.; Grandremy, G.; Schneider, D.; Siemroth, P.; Scheibe, H.J.
Journal Article
1994Der Hochstrombogen - eine neue Quelle der Hochratebeschichtung
Siemroth, P.; Schülke, T.; Schultrich, B.
Conference Paper
1994Der Hochstrombogen - eine neue Quelle der Hochratebeschichtung
Siemroth, P.; Schülke, T.; Witke, T.
Journal Article
1994Kurzzeituntersuchung von laser- und bogengestützten Beschichtungsprozessen
Siemroth, P.; Schülke, T.; Witke, T.; Schultrich, B.
Conference Paper
1994Kurzzeituntersuchungen von laser- und bogengestützten Beschichtungsprozessen
Siemroth, P.; Witke, T.; Schülke, T.; Lenk, A.
Journal Article
1994Methods for the production of metallic foams
Weber, M.; Baumeister, J.; Banhart, J.; Kunze, H.-D.
Conference Paper
1991Measurement of the influence of directed particle motion on the turbulent particle deposition velocity by means of laser-doppler anemometry.
Holländer, W.; Pohlmann, G.
Journal Article
1989Ammonia emission and deposition of NHx in the GDR
Moller, D.; Schieferdecker, H.
Journal Article
1989The deposition and study of hard carbon films.
Zou, J.W.; Reichelt, K.; Schmidt, K.; Dischler, B.
Journal Article
1989Fluxes of atmospheric hydrogen sulphide to plant shoots.
Kok, L.J. de; Stahl, K.; Rennenberg, H.
Journal Article
1989A solution of the two-dimensional atmospheric diffusion equation with height dependent diffusion coefficient including ground level absorption
Koch, W.
Journal Article
1989Two-dimensional simulation methods (integrated optics)
Nolting, H.-P.; Weinert, C.M.
Journal Article
1987Pulmonary deposition, retention, and clearance of a pigmented polymer in rats
Kilpper, R.; Bellmann, B.; Creutzenberg, O.; Mermelstein, R.; Muhle, H.
Conference Paper
1984Measurement of the deposition of aerosols in an iron ore mine
Lange, F.; Martens, R.; Behnke, W.; Hollaender, W.; Koch, W.; König, H.P.
Conference Paper