Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013Breve introdução à Tecnologia de Salas Limpas: Enfrentando os desafios futuros
Gommel, Udo; Kreck, Guido
Journal Article
2012Future Demands and Challenges for Cleanroom Technology
Gommel, Udo
Presentation
2012Monitoring method for carbon nanotubes (CNT): Personal sampler and corresponding reading device
Keller, Markus; Kreck, Guido; Holzapfel, Yvonne
Conference Paper
2012A short introduction to cleanliness technology: Meeting the future challenges
Gommel, Udo; Kreck, Guido
Conference Paper
2011Contamination control during substrate handling
Bürger, Frank
Conference Paper
2010Clean technology for the ultra barrier layer production
Bürger, Frank
Presentation
2010Particle detection in the barrier layer production
Bürger, Frank
Presentation
2008Methoden und Geräte zur Kontaminationskontrolle technischer Oberflächen
Grimme, Ralf; Schmauz, Günther; Modrich, Kai-Udo
Journal Article
2007Contamination control techniques on surfaces
Rochowicz, Markus
Conference Paper
2007In-Prozess-Kontaminationskontrolle mittels NIR-Systemen
Eigenbrod, Hartmut; Modrich, Kai-Udo
Book Article
2006Approach for a standardized methodology for mulit-site processing of 300 mm wafers at R&D-sites
Öchsner, R.; Frickinger, J.; Pfeffer, M.; Schellenberger, M.; Roeder, G.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.; Kaushik, V.; Renaud, D.; Danel, A.; Claeys, C.; Bearda, T.; Lering, M.; Graef, M.; Murphy, B.; Walther, H.; Hury, S.
Conference Paper
2006In-Prozess-Kontaminationskontrolle mittels NIR-Systemen
Modrich, K.-U.; Schöbel, J.
Book Article
2006Surface inspection with non-visible technologies: Process integration with low-cost sensors and spectral imaging devices
Eigenbrod, H.
Conference Paper
2004Surface inspection with near infrared spectroscopy - possibilities, applications and visions
Modrich, K.-U.
Conference Paper
2001Contamination control in meat processing
Schließer, J.; Huen, J.
Journal Article
2001Organic Contamination Workshop 2001. Proceedings
Pfitzner, L.; Bügler, J.; Frickinger, J.
Conference Proceedings
2000ESD - the contribution to contamination control
Matuscheck, P.
Journal Article
1999Einfache Meßverfahren auf Oberflächen (Versuch 3)
Werner, D.
Conference Paper
1999Meßtechnik im Reinraum
Ernst, C.
Conference Paper
1999Minienvironments and Thermal Effects
Schließer, J.; Staudt-Fischbach, P.
Conference Paper
1998Automatisierung in der Displayproduktion
Schließer, J.; Kaufmann, T.S.; Dorner, J.
Conference Paper
1998Productronica 97. Proceedings HLF. Semiconductor equipment and materials contamination control and defect reduction
Ryssel, H.; Pfitzner, L.; Trunk, R.
Book
1995Eine angepaßte Strategie verfolgen. Expertenwissen kann teure Flops vermeiden helfen
Schließer, J.; Schraft, R.D.
Journal Article
1992Instrumentation for measuring and monitoring cleanroom suitability of equipment
Kahlden, T. von
Conference Paper
1989Contamination measurement and analysis for ultra clean manufacturing devices
Herz, R.; Kahlden, T. von; Klumpp, B.; Schmutz, W.
Conference Paper