Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Area scanning method for 3D surface profilometry based on an adaptive confocal microscope
Luo, Ding; Taphanel, Miro; Claus, Daniel; Boettcher, Tobias; Osten, Wolfgang; Längle, Thomas; Beyerer, Jürgen
Journal Article
2011Surface metrology system based on bidirectional microdisplays
Großmann, C.; Perske, F.; Zwick, S.; Baumgarten, J.; Richter, B.; Riehemann, S.; Vogel, U.; Notni, G.; Tünnermann, A.
Conference Paper
20003D surface inspection with a DMD based sensor
Bitte, F.; Mischo, H.; Pfeifer, T.; Frankowski, G.
Conference Paper
2000High-resolution defect detection and noise reduction using wavelet methods for surface measurement
Recknagel, R.-J.; Kowarschik, R.; Notni, G.
Journal Article
2000MicroScan: a DMD based optical surface profiler
Bitte, F.; Dussler, G.; Pfeifer, T.; Frankowski, G.
Conference Paper
2000Optical metrology for microsystems inspection
Pfeifer, T.; Bitte, F.; Dussler, G.
Conference Paper
2000Using a digital micromirror device for three dimensional microinspection
Bitte, F.; Dussler, G.; Mischo, H.; Pfeifer, T.; Frankowski, G.
Conference Paper