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| 2001 | Integrated metrology. An enabler for advanced process control (APC)
Schneider, C.; Pfitzner, L.; Ryssel, H. | Conference Paper |
| 2000 | Modular Production System for Microtechnology
Walk, H.; Bader, U. | Conference Paper |
| 1999 | Characterization of oxide etching and wafer cleaning using vapor phase anhydrous hydrofluoric acid and ozone
Bauer, A.J.; Froeschle, B.; Beichele, M.; Ryssel, H. | Conference Paper |
| 1999 | Modulares Fertigungssystem
Bader, U.; Schließer, J.; Weinmann, A.; Schwertschlager, O. | Journal Article |
| 1999 | Novel process control strategies for 300 mm semiconductor production
Pfitzner, L.; Oechsner, R.; Schneider, C.; Ryssel, H.; Riemer, M.; Podewils, M. von | Journal Article |
| 1999 | Prozess 2000 - Modulares Fertigungssystem in der Mikrotechnik
Bader, U.; Schließer, J.; Weinmann, A. | Journal Article |
| 1999 | Standardisierungslösungen für ein modulares Fertigungssystem in der Mikrotechnik
Bader, U.; Schließer, J.; Hägele, K.-D.; Weinmann, A. | Journal Article |
| 1997 | Cluster - Fertigungskonzept
Schäfer, W.; Grimme, R. | Book Article |
| 1997 | Integrated process control for cluster tools using an in-line analytical module
Kasko, I.; Oechsner, R.; Froeschle, B.; Schneider, C.; Pfitzner, L.; Ryssel, H. | Conference Paper |
| 1997 | A novel XPS system for integration into advanced semiconductor equipment for in-line process control
Kasko, I.; Oechsner, R.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Trubitsyn, A.A.; Kratenko, V.I. | Conference Paper |
| 1997 | Tools zur Zellenautomatisierung
Bruckdorfer, T.; Luhn, G.; Bauer, T.; Bader, K.; Suntrup, M.; Friedrich, W.; Podewils, M. von | Conference Paper |
| 1993 | Materialfluß bei Clustertools
Bader, U. | Conference Paper |
| 1990 | New manufacturing concepts for the production of integrated circuits
Warnecke, H.-J.; Frühauf, W.; Schmutz, W. | Conference Paper |