Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2007Chemical mechanical planarization (CMP) metrology for 45/32 nm technology generations
Nutsch, A.; Pfitzner, L.
Conference Paper
2006Surface state and wear of cutting tools
Richter, V.
Conference Paper
2004Modeling of chemical-mechanical polishing on patterned wafers as part of integrated topography process simulation
Nguyen, P.-H.; Bär, E.; Lorenz, J.; Ryssel, H.
Conference Paper, Journal Article