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| 2020 | Thermo-physical properties of coatings in the Ti(B,N) system grown by chemical vapor deposition
Kainz, Christina; Schalk, Nina; Tkadletz, Michael; Saringer, Christian; Winkler, Markus; Stark, Andreas; Schell, Norbert; Julin, Jaakko; Czettl, Christoph | Journal Article |
| 2019 | Evaluation of a method for micro-defect sealing in ZSM-5 zeolite membranes by chemical vapor deposition of carbon
Simon, Adrian; Richter, Hannes; Reif, Benjamin; Schülein, Marion; Sanwald, Dirk; Schwieger, Wilhelm | Journal Article |
| 2019 | Hydrosilane-Free Low-Cost APCVD of SiO2 Films for Crystalline Si Solar Cell Applications
Nagel, H.; Issa, E.; Nagel, T.; Glatthaar, M.; Glunz, S.W. | Conference Paper |
| 2018 | Organic optical coatings
Neubert, T.; Vergöhl, M. | Book Article |
| 2017 | Palladium/ruthenium composite membrane for hydrogen separation from the off-gas of solar cell production via chemical vapor deposition
Sang Moon, L.; Xu, N.; Kim, S.S.; Li, A.; Grace, J.R.; Lim, C.J.; Boyd, T.; Ryi, S.-K.; Susdorf, A.; Schaadt, A. | Journal Article |
| 2016 | Thin-film deposition processes
Pflug, A.; Siemers, M.; Melzig, T.; Keunecke, M.; Schäfer, L.; Bräuer, G. | Book Article |
| 2015 | Area-selective epoxy coatings by DBD-PECVD in 3D cavities for protein coupling
Herrmann, A.; Lachmann, K.; Fischer, L.; Kovac, J.; Thomas, M. | Journal Article |
| 2015 | Confocal microscopy for process monitoring and wide-area height determination of vertically-aligned carbon nanotube forests
Piwko, Markus; Althues, Holger; Schumm, Benjamin; Kaskel, Stefan | Journal Article |
| 2015 | Diamond-coated silicon nanowires for enhanced micro-supercapacitor with ionic liquids
Gund, G.S.; Dubal, D.P.; Aradilla, D.; Müller-Sebert, W.; Bidan, G.; Gaboriau, D.; Gentile, P.; Schubert, T.J.S.; Wimberg, J.; Sadki, S.; Gomez-Romero, P. | Conference Paper |
| 2015 | Electrospray ionization deposition of BSA under vacuum conditions
Hecker, Dominic; Glöß, Daniel; Frach, Peter; Gerlach, Gerald | Conference Paper |
| 2014 | Advanced metallization concepts and impact on reliability
Hauschildt, Meike; Hintze, Bernd; Gall, Martin; Koschinsky, Frank; Preuße, Axel; Bolom, Tibor; Nopper, Markus; Beyer, Armand; Aubel, Oliver; Talut, Georg; Zschech, Ehrenfried | Journal Article |
| 2013 | Organic optical coatings
Neubert, T.; Vergöhl, M. | Book Article |
| 2013 | Process optimization and solar cell results of ConCVD epitaxial layers
Keller, M.; Reber, S.; Schillinger, N.; Arnold, M.; Krogull, D.; Heermann, S. | Conference Paper |
| 2013 | Step-controlled homoepitaxial growth of 4H-SiC on vicinal substrates
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Thomas, Bernd | Journal Article |
| 2012 | Doping induced lattice misfit in 4H-SiC homoepitaxy
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Müller, Georg; Weber, Arnd-Dietrich; Volz, Eduard; Trachta, Gerd; Spiecker, Erdmann; Thomas, Bernd | Journal Article |
| 2012 | Rapid and scalable method for direct and indirect microstructuring of vertical aligned carbon nanotubes
Langheinrich, D.; Dörfler, S.; Althues, H.; Kaskel, S.; Lasagni, A. | Journal Article |
| 2010 | Controlled incorporation of mid-to-high Z transition metals in CVD diamond
Biener, M.M.; Biener, J.; Kucheyev, S.O.; Wang, Y.M.; El-Dasher, B.S.; Teslich, N.E.; Hamza, A.V.; Obloh, H.; Müller-Sebert, W.; Wolfer, M.; Fuchs, F.; Grimm, M.; Kriele, A.; Wild, C. | Conference Paper, Journal Article |
| 2010 | Coupling of Monte Carlo sputter simulation and feature-scale profile simulation and application to the simulation of back etching of an intermetal dielectric
Baer, E.; Kunder, D.; Lorenz, J.; Sekowski, M.; Paschen, Uwe | Conference Paper |
| 2006 | DLC based coatings for tribological applications
Bewilogua, K.; Bialuch, I.; Brand, J.; Keunecke, M.; Ruske, H.; Thomsen, H.; Weber, M.; Wittorf, R. | Conference Paper |
| 2006 | Micro-cavity organic light emitting diodes for biochip applications
Roma, G.; Belardini, A.; Michelotti, F.; Danz, N.; Pace, A.; Sarto, F.; Montereali, R.M. | Journal Article |
| 2006 | The versatility of hot-filament activated chemical vapor deposition
Schäfer, L.; Höfer, M.; Kröger, R. | Journal Article |
| 1999 | The contribution of H+ ion etching during the initial deposition stage to the orientation grade of diamond films
Zhang, W.J.; Jiang, X. | Journal Article |
| 1999 | Equipment and wafer modeling of batch furnaces by neural networks
Benesch, N.; Schneider, C.; Lehnert, W.; Pfitzner, L.; Ryssel, H. | Conference Paper |
| 1999 | Properties of diamond electrodes for wastewater treatment
Fryda, M.; Herrmann, D.; Schäfer, L.; Klages, C.-P.; Perret, A.; Haenni, W.; Comninellis, C.; Gandini, D. | Journal Article |
| 1999 | Simulation of a Coating Protection for an In Situ Ellipsometer in a CVD Furnace
Poscher, S.; Lehnert, W.; Ryssel, H. | Conference Paper |
| 1998 | Narrow-band photoreceiver OEIC on InP operating at 38 GHz
Engel, T.; Strittmatter, A.; Passenberg, W.; Umbach, A.; Schlaak, W.; Droge, E.; Seeger, A.; Steingrüber, R.; Mekonnen, G.C.; Unterborsch, G.; Bach, H.-G.; Bottcher, E.H.; Bimberg, D. | Journal Article |
| 1998 | Three-dimensional simulation of SiO2 profiles from TEOS-sourced remote microwave plasma-enhanced chemical vapor deposition
Bär, E.; Lorenz, J.; Ryssel, H. | Conference Paper |
| 1997 | 3D simulation for sub-micron metallization
Bär, E.; Lorenz, J.; Ryssel, H. | Journal Article, Conference Paper |
| 1997 | The PROMPT project and its application to the three-dimensional simulation of low-pressure chemical vapor deposition processes
Bär, E.; Lorenz, J. | Journal Article |
| 1996 | Infrared Raman scattering as a sensitive probe for the thermal conductivity of chemical vapor deposited diamond films
Wörner, E.; Wagner, J.; Müller-Sebert, W.; Wild, C.; Koidl, P. | Journal Article |
| 1994 | Adhesion aspects of plastic composites metallized by a combined vacuum-electrochemical deposition process
Leyendecker, F.; Mann, D. | Conference Paper |
| 1989 | Gas phase depletion in horizontal MOCVD reactors.
Neumann, G.; Winkler, K.; Bachem, K.H. | Conference Paper |