Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Thermo-physical properties of coatings in the Ti(B,N) system grown by chemical vapor deposition
Kainz, Christina; Schalk, Nina; Tkadletz, Michael; Saringer, Christian; Winkler, Markus; Stark, Andreas; Schell, Norbert; Julin, Jaakko; Czettl, Christoph
Journal Article
2019Evaluation of a method for micro-defect sealing in ZSM-5 zeolite membranes by chemical vapor deposition of carbon
Simon, Adrian; Richter, Hannes; Reif, Benjamin; Schülein, Marion; Sanwald, Dirk; Schwieger, Wilhelm
Journal Article
2019Hydrosilane-Free Low-Cost APCVD of SiO2 Films for Crystalline Si Solar Cell Applications
Nagel, H.; Issa, E.; Nagel, T.; Glatthaar, M.; Glunz, S.W.
Conference Paper
2018Organic optical coatings
Neubert, T.; Vergöhl, M.
Book Article
2017Palladium/ruthenium composite membrane for hydrogen separation from the off-gas of solar cell production via chemical vapor deposition
Sang Moon, L.; Xu, N.; Kim, S.S.; Li, A.; Grace, J.R.; Lim, C.J.; Boyd, T.; Ryi, S.-K.; Susdorf, A.; Schaadt, A.
Journal Article
2016Thin-film deposition processes
Pflug, A.; Siemers, M.; Melzig, T.; Keunecke, M.; Schäfer, L.; Bräuer, G.
Book Article
2015Area-selective epoxy coatings by DBD-PECVD in 3D cavities for protein coupling
Herrmann, A.; Lachmann, K.; Fischer, L.; Kovac, J.; Thomas, M.
Journal Article
2015Confocal microscopy for process monitoring and wide-area height determination of vertically-aligned carbon nanotube forests
Piwko, Markus; Althues, Holger; Schumm, Benjamin; Kaskel, Stefan
Journal Article
2015Diamond-coated silicon nanowires for enhanced micro-supercapacitor with ionic liquids
Gund, G.S.; Dubal, D.P.; Aradilla, D.; Müller-Sebert, W.; Bidan, G.; Gaboriau, D.; Gentile, P.; Schubert, T.J.S.; Wimberg, J.; Sadki, S.; Gomez-Romero, P.
Conference Paper
2015Electrospray ionization deposition of BSA under vacuum conditions
Hecker, Dominic; Glöß, Daniel; Frach, Peter; Gerlach, Gerald
Conference Paper
2014Advanced metallization concepts and impact on reliability
Hauschildt, Meike; Hintze, Bernd; Gall, Martin; Koschinsky, Frank; Preuße, Axel; Bolom, Tibor; Nopper, Markus; Beyer, Armand; Aubel, Oliver; Talut, Georg; Zschech, Ehrenfried
Journal Article
2013Organic optical coatings
Neubert, T.; Vergöhl, M.
Book Article
2013Process optimization and solar cell results of ConCVD epitaxial layers
Keller, M.; Reber, S.; Schillinger, N.; Arnold, M.; Krogull, D.; Heermann, S.
Conference Paper
2013Step-controlled homoepitaxial growth of 4H-SiC on vicinal substrates
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Thomas, Bernd
Journal Article
2012Doping induced lattice misfit in 4H-SiC homoepitaxy
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Müller, Georg; Weber, Arnd-Dietrich; Volz, Eduard; Trachta, Gerd; Spiecker, Erdmann; Thomas, Bernd
Journal Article
2012Rapid and scalable method for direct and indirect microstructuring of vertical aligned carbon nanotubes
Langheinrich, D.; Dörfler, S.; Althues, H.; Kaskel, S.; Lasagni, A.
Journal Article
2010Controlled incorporation of mid-to-high Z transition metals in CVD diamond
Biener, M.M.; Biener, J.; Kucheyev, S.O.; Wang, Y.M.; El-Dasher, B.S.; Teslich, N.E.; Hamza, A.V.; Obloh, H.; Müller-Sebert, W.; Wolfer, M.; Fuchs, F.; Grimm, M.; Kriele, A.; Wild, C.
Conference Paper, Journal Article
2010Coupling of Monte Carlo sputter simulation and feature-scale profile simulation and application to the simulation of back etching of an intermetal dielectric
Baer, E.; Kunder, D.; Lorenz, J.; Sekowski, M.; Paschen, Uwe
Conference Paper
2006DLC based coatings for tribological applications
Bewilogua, K.; Bialuch, I.; Brand, J.; Keunecke, M.; Ruske, H.; Thomsen, H.; Weber, M.; Wittorf, R.
Conference Paper
2006Micro-cavity organic light emitting diodes for biochip applications
Roma, G.; Belardini, A.; Michelotti, F.; Danz, N.; Pace, A.; Sarto, F.; Montereali, R.M.
Journal Article
2006The versatility of hot-filament activated chemical vapor deposition
Schäfer, L.; Höfer, M.; Kröger, R.
Journal Article
1999The contribution of H+ ion etching during the initial deposition stage to the orientation grade of diamond films
Zhang, W.J.; Jiang, X.
Journal Article
1999Equipment and wafer modeling of batch furnaces by neural networks
Benesch, N.; Schneider, C.; Lehnert, W.; Pfitzner, L.; Ryssel, H.
Conference Paper
1999Properties of diamond electrodes for wastewater treatment
Fryda, M.; Herrmann, D.; Schäfer, L.; Klages, C.-P.; Perret, A.; Haenni, W.; Comninellis, C.; Gandini, D.
Journal Article
1999Simulation of a Coating Protection for an In Situ Ellipsometer in a CVD Furnace
Poscher, S.; Lehnert, W.; Ryssel, H.
Conference Paper
1998Narrow-band photoreceiver OEIC on InP operating at 38 GHz
Engel, T.; Strittmatter, A.; Passenberg, W.; Umbach, A.; Schlaak, W.; Droge, E.; Seeger, A.; Steingrüber, R.; Mekonnen, G.C.; Unterborsch, G.; Bach, H.-G.; Bottcher, E.H.; Bimberg, D.
Journal Article
1998Three-dimensional simulation of SiO2 profiles from TEOS-sourced remote microwave plasma-enhanced chemical vapor deposition
Bär, E.; Lorenz, J.; Ryssel, H.
Conference Paper
19973D simulation for sub-micron metallization
Bär, E.; Lorenz, J.; Ryssel, H.
Journal Article, Conference Paper
1997The PROMPT project and its application to the three-dimensional simulation of low-pressure chemical vapor deposition processes
Bär, E.; Lorenz, J.
Journal Article
1996Infrared Raman scattering as a sensitive probe for the thermal conductivity of chemical vapor deposited diamond films
Wörner, E.; Wagner, J.; Müller-Sebert, W.; Wild, C.; Koidl, P.
Journal Article
1994Adhesion aspects of plastic composites metallized by a combined vacuum-electrochemical deposition process
Leyendecker, F.; Mann, D.
Conference Paper
1989Gas phase depletion in horizontal MOCVD reactors.
Neumann, G.; Winkler, K.; Bachem, K.H.
Conference Paper