Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Post-CMOS MEMS capacitive pressure sensor: Porous ALD membrane for sacrificial layer release and diaphragm sealing
Walk, Christian; Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Development of micro electromechanical biosensor for fast detection of respiratory syncytial virus infections in newborns
Livshits, Pavel; Jupe, Andreas; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas
Journal Article, Conference Paper, Poster
2017Sensor components of a miniaturized implant for haemodynamic controlling
Weidenmüller, Jens; Dogan, Özgü; Stanitzki, Alexander; Baum, Mario; Wünsch, Dirk; Wiemer, Maik; Görtz, Michael
Journal Article, Conference Paper
2013Studies on thinned flexible integrated capacitive pressure sensors in tactile sensor arrays for the use in robotics and prosthetics
Müntjes, Jutta A.; Häfner, Joachim; Görtz, Michael; Mokwa, Wilfried
Conference Paper
2000Monolithic integrated surface micromachined pressure sensors with analog on-chip linearization and temperature compensation
Trieu, H.-K.; Knier, M.; Köster, O.; Kappert, H.; Schmidt, M.; Mokwa, W.
Conference Paper
1998On-chip microsystems for medical applications
Mokwa, W.; Schnakenberg, U.
Conference Paper
1998Silicon microsystems: merging sensors, circuits and systems
Manoli, Y.; Mokwa, W.
Conference Paper
1998Simultaneous fabrication of dielectric and electrical joints by wafer bonding
Drost, A.; Klink, G.; Scherbaum, S.; Feil, M.
Conference Paper
1990Capacitive silicon pressure sensor for invasive measurement of blood pressure
Kandler, M.; Mokwa, W.
Conference Paper
1990CMOS compatible capacitive pressure sensor with read-out electronics
Eichholz, J.; Kandler, M.; Manoli, Y.; Mokwa, W.
Conference Paper
1990Smart CMOS pressure sensor
Eichholz, J.; Kandler, M.; Manoli, Y.; Mokwa, W.
Conference Paper