Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Measurement of Young's modulus and residual stress of thin SiC layers for MEMS high temperature applications
Pabst, O.; Schiffer, M.; Obermeier, E.; Tekin, T.; Lang, K.-D.; Ngo, H.-D.
Conference Paper
1995Studies of heteroepitaxial nucleation and growth of diamond on silicon
Jiang, X.; Paul, M.; Klages, C.-P.; Jia, C.L.
Conference Paper
1993The deposition and characterization of β-SiC and diamond/β-SiC composite films
Jiang, X.; Klages, C.-P.
Journal Article, Conference Paper
1992Synthesis of diamond/beta-SiC composite films by microwave plasma assisted chemical vapor deposition
Jiang, X.; Klages, C.-P.
Journal Article, Conference Paper