Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Concept for two-dimensional TMDs as functional layer for gas sensing applications
Neubieser, Rahel-Manuela; Knauß, Anna Miriam; Michel, Marvin D.; Weyers, Sascha; Wree, Jan-Lucas; Devi, Anjana
Conference Paper
2020Development of a 3D-integrated thermocatalytic sensor for combustible gas detection
Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Neubieser, Rahel-Manuela; Vogt, Holger
Conference Paper
2019"Entwicklung und Anpassung der Photokatalysatorabscheidung und Aufbau photokatalytischer In-situ-Analytik". Schlussbericht zum Vorhaben
Graumann, T.; Neumann, F.
Report
201920-nm In₀.₈Ga₀.₂As MOSHEMT MMIC technology on silicon
Tessmann, Axel; Leuther, Arnulf; Heinz, Felix; Bernhardt, Frank; John, Laurenz; Massler, Hermann; Czornomaz, Lukas; Merkle, Thomas
Journal Article
2019Fabrication of partly encapsulated vertical nanoelectrodes for an intracellular microelectrode array
Allani, Sonja; Jupe, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2019Herstellung nano-skalierter Gassensoren unter Verwendung neuer Metalloxid-ALD-Precursormaterialien
Knauß, Anna M.; Dietz, Dorothee; Jupe, Andreas; Kappert, Holger; Vogt, Holger; Mai, Lukas; Devi, Anjana
Conference Paper
2019Optimization of the dielectric layer for electrowetting on dielectric
Türk, Semih; Schug, Alexander; Viga, Reinhard; Jupe, Andreas; Vogt, Holger
Journal Article
2019Post-CMOS 3D-integration of a nanopellistor
Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Conference Paper
2018Analysis and simulation of super-hydrophobic layers for micro-fluidic applications
Türk, Semih; Jupe, Andreas; Viga, Reinhard; Vogt, Holger
Conference Paper
2018Decreasing the actuation voltage in electrowetting on dielectric with thin and micro-structured dielectric
Türk, Semih; Verheyen, Erik; Viga, Reinhard; Allani, Sonja; Jupe, Andreas; Vogt, Holger
Conference Paper
2018Die-level patterning of parylene F by laser-ablation for further processing with ALD functional layers
Dogan, Özgü; Mokwa, Wilfried; Mai, Lukas; Devi, Anjana; Vogt, Holger
Conference Paper
2018High gain 220 - 275 GHz amplifier MMICs based on metamorphic 20 nm InGaAs MOSFET technology
Tessmann, Axel; Leuther, Arnulf; Heinz, Felix; Bernhardt, Frank; Massler, Hermann
Conference Paper
2018Post-CMOS MEMS capacitive pressure sensor: Porous ALD membrane for sacrificial layer release and diaphragm sealing
Walk, Christian; Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2018Thin film ALD materials as functional layer for 3D-integrated metal oxide gas-sensors
Knauß, Anna M.; Münchenberger, Finja M.; Dietz, Dorothee; Jupe, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2017Fabrication and electrochemical characterization of ruthenium nanoelectrodes
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
Journal Article
2017Untersuchung von dreidimensionalen Nanoelektroden für die intrazelluläre Kontaktierung auf integrierten Schaltungen
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2016Nanostructures on CMOS-intelligent sensors and actuators by post processing
Goehlich, Andreas; Vogt, Holger
Conference Paper
2015Threshold voltage engineering in GaN-based HFETs: A systematic study with the threshold voltage reaching more than 2 V
Hahn, H.; Benkhelifa, Fouad; Ambacher, O.; Brunner, F.; Noculak, A.; Kalisch, H.; Vescan, A.
Journal Article
2013Entwicklung eines hochtemperaturfesten Kondensators für die Mikrosystemtechnik
Celik, Yusuf; Goehlich, Andreas; Jupe, Andreas; Vogt, Holger
Conference Paper