| | |
|---|
| 2012 | Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
Rumler, Maximilian; Rommel, Mathias; Erlekampf, Jürgen; Azizi, Maral; Geiger, Tobias; Bauer, Anton J.; Meißner, Elke; Frey, Lothar | Journal Article |
| 2012 | Investigation of the influence of laser radiation on material properties of transparent conductive layers
Schaefer, M.; Esser, A.; Schulz-Ruhtenberg, M.; Holtkamp, J.; Gillner, A. | Conference Paper |
| 2011 | Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Murakami, Katsuhisa; Rommel, Mathias; Yanev, Vasil; Bauer, Anton J.; Frey, Lothar | Conference Paper |
| 2011 | High quality AlGaN epilayers grown on sapphire using SiNx interlayers
Forghani, K.; Klein, M.; Lipski, F.; Schwaiger, S.; Hertkorn, J.; Leute, R.A.R.; Scholz, F.; Feneberg, M.; Neuschl, B.; Thonke, K.; Klein, O.; Kaiser, U.; Gutt, R.; Passow, T. | Conference Paper, Journal Article |
| 2010 | Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L. | Journal Article, Conference Paper |
| 2010 | Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L. | Poster |
| 2010 | Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L. | Poster |
| 2010 | Semiconducting to metallic-like boron doping of nanocrystalline diamond films and its effect on osteoblastic cells
Kromka, A.; Grausova, L.; Bacáková, L.; Vacik, J.; Rezek, B.; Vanecek, M.; Williams, O.A.; Haenen, K. | Journal Article, Conference Paper |
| 2009 | Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSixO2-x thin films using tunneling atomic force microscopy
Weinreich, W.; Wilde, L.; Kücher, P.; Lemberger, M.; Yanev, V.; Rommel, M.; Bauer, A.J.; Erben, E.; Heitmann, J.; Schröder, U.; Oberbeck, L. | Conference Paper, Journal Article |
| 2009 | FEM-simulations of vibrations and resonances of stiff AFM cantilevers
Geng, K.; Rabe, U.; Hirsekorn, S. | Conference Paper |
| 2008 | AFM testing of the nanomechanical behaviour of MEMS micromembranes
Ekwinski, G.; Goehlich, A.; Trieu, H.-K.; Rymuza, Z.; Koszewski, A. | Journal Article |
| 2008 | Combinatorial fabrication of thin film-libraries and evaluation of their piezoelectricity by ultrasonic piezo-mode imaging
Rende, D.; Schwarz, K.; Rabe, U.; Maier, W.F.; Arnold, W. | Journal Article |
| 2008 | Mapping of elastic stiffness in an alpha+beta titanium alloy using atomic force acoustic microscopy
Kumar, A.; Rabe, U.; Arnold, W. | Conference Paper, Journal Article |
| 2007 | Near-field acoustical imaging using lateral bending mode of atomic force microscope cantilevers
Caron, A.; Rabe, U.; Rödel, J.; Arnold, W. | Conference Paper |
| 2007 | Nonlinear contact resonance spectroscopy in atomic force microscopy
Rupp, D.; Rabe, U.; Hirsekorn, S.; Arnold, W. | Journal Article |
| 2007 | Visibility of buried structures in atomic force acoustic microscopy
Striegler, A.; Pathuri, N.; Köhler, B.; Bendjus, B. | Conference Paper |
| 2006 | Investigation of ceramics and ferroelectric materials by atomic force acoustic microscopy
Arnold, W. | Conference Paper |
| 2006 | Structure and thermoelectric properties of boron doped nanocrystalline Si0.8Ge0.2 thin film
Takashiri, M.; Borca-Tasciuc, T.; Jacquot, A.; Miyazaki, K.; Cheng, G. | Journal Article |
| 2006 | Surface characterization with nanometer lateral resolution using the vibration modes of atomic force microscope cantilevers
Rabe, U.; Arnold, W.; Caron, A.; Hirsekorn, S.; Schwarz, K. | Conference Paper |
| 2005 | Atomic force microscopy at ultrasonic frequencies
Arnold, W.; Caron, A.; Hirsekorn, S.; Kopycinska-Müller, M.; Rabe, U.; Reinstädtler, M. | Conference Paper |
| 2005 | Investigating ultra-thin lubricant layers using resonant friction force microscopy
Reinstädtler, M.; Rabe, U.; Goldade, A.; Bhushan, B.; Arnold, W. | Journal Article, Conference Paper |
| 2004 | Atomic force microscopy with lateral modulation
Scherer, V.; Reinstädtler, M.; Arnold, W. | Book Article |
| 2004 | Investigating ultra-thin lubricant layers using lateral atomic force acoustic microscopy
Reinstädtler, M.; Rabe, U.; Hirsekorn, S.; Arnold, W.; Goldade, A.V.; Kasai, T.; Bhushan, B. | Conference Paper |
| 2004 | Materials characterization of micro-devices
Schreiber, J.; Bendjus, B.; Köhler, B.; Melov, V.; Baumbach, T. | Conference Paper |
| 2004 | Phenomena in microwear experiments on metal-free and metal-containing diamond-like carbon coatings: Friction, wear, fatigue and plastic
Schiffmann, K. | Journal Article |
| 2004 | Quantitative measurement of elastic constants of anisotropic materials by atomic force acoustic microscopy
Arnold, W.; Hirsekorn, S.; Kopycinska-Müller, M.; Reinstädtler, M.; Rabe, U. | Conference Paper |
| 2004 | Ultrasonic modes in atomic force microscopy
Kopycinska-Müller, M.; Reinstädtler, M.; Rabe, U.; Caron, A.; Hirsekorn, S.; Arnold, W. | Conference Paper |
| 2003 | Characterizing CaF2 for VUV optical components: Roughness, surface scatter, and bulk scatter
Hultaker, A.; Benkert, N.; Gliech, S.; Duparre, A. | Conference Paper |
| 2003 | Methology to evaluate light scatter mechanisms of VUV substrates and coatings
Duparre, A.; Gliech, S.; Hultaker, A. | Book Article |
| 2002 | Atomic force microscopy at ultrasonic frequencies
Arnold, W.; Hirsekorn, S.; Kopycinska, M.; Rabe, U.; Reinstädtler, M.; Scherer, V. | Conference Paper |
| 2001 | Measurements of elastic properties of ultra-thin diamond-like carbon coatings using atomic force acoustic microscopy
Amelio, S.; Goldade, A.; Rabe, U.; Scherer, V.; Bhushan, B.; Arnold, W. | Journal Article |
| 2001 | Ultrasonic radiation in dynamic force microscopy
Hirsekorn, S.; Rabe, U.; Arnold, W. | Journal Article |
| 2000 | Analysis of peculiar structural defects created in GaAs by diffusion of copper
Frigeri, C.; Weyher, J.; Müller, S.; Hiesinger, P. | Journal Article |
| 2000 | Measurement of Young's Modulus of Nanocrystalline Ferrites with Spinel Structures by Atomic Force Acoustic Microscopy
Kester, E.; Rabe, U.; Presmanes, L.; Tailhades, P.; Arnold, W. | Journal Article |
| 2000 | Quantitative contact spectroscopy by atomic force acoustic microscopy
Amelio, S.; Rabe, U.; Kester, E.; Hirsekorn, S.; Arnold, W. | Conference Paper |
| 2000 | X-ray study of the roughness of surfaces and interfaces
Kozhevnikov, I.V.; Asadchikov, V.E.; Bukreeva, I.N.; Duparre, A. | Conference Paper |
| 1999 | Characterization of oxide etching and wafer cleaning using vapor phase anhydrous hydrofluoric acid and ozone
Bauer, A.J.; Froeschle, B.; Beichele, M.; Ryssel, H. | Conference Paper |
| 1999 | Comparative study of the roughness of optical surfaces and thin films by x-ray scattering and atomic force microscopy
Asadchikov, V.E.; Duparre, A.; Jakobs, S.; Karabekov, Y.; Kozhevnikov, I.V. | Journal Article |
| 1999 | Comparative study of the roughness of optical surfaces and thin films using atomic force microscopy, x-ray scattering, and light scattering methods
Kozhevnikov, I.V.; Asadchikov, V.E.; Duparre, A.; Gilev, O.N.; Havronin, N.A.; Krivonosov, Y.S.; Ostashev, V.I.; Steinert, J. | Conference Paper |
| 1999 | Lateral Force Microscopy using Acoustic Friction Force Microscopy
Scherer, V.; Arnold, W.; Bhushan, B. | Journal Article |
| 1999 | On the Contrast in Eddy Current Microscopy using Atomic Force Microscopes
Hirsekorn, S.; Rabe, U.; Boub, A.; Arnold, W. | Conference Paper |
| 1999 | Probing Linear and Non-linear Tip-Sample Interaction Forces by Atomic Force Acoustic Microscopy
Rabe, U.; Arnold, W.; Kester, E. | Journal Article |
| 1999 | Scanning probe method investigation of carbon nanotubes produced by high energy ion irradiation of graphite
Biro, L.P.; Mark, G.I.; Gyulai, J.; Rozlosnik, N.; Kurti, J.; Szabo, B.; Frey, L.; Ryssel, H. | Journal Article |
| 1999 | Surface roughness characterization of smooth optical films deposited by ion plating
Jakobs, S.; Duparre, A.; Huter, M.; Pulker, H.K. | Journal Article |
| 1999 | Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering
Gliech, S.; Duparre, A.; Recknagel, R.-J.; Notni, G. | Conference Paper |
| 1999 | X-ray and AFM studies of ultrthin films for EUV and soft X-ray applications
Asadchikov, V.E.; Duparre, A.; Kozhevnikov, I.V.; Krivonosov, Y.S.; Sagitov, S.I. | Conference Paper |
| 1998 | Active Friction Control Using Ultrasonic Vibration
Scherer, V.; Arnold, W. | Conference Paper |
| 1998 | AFM helps engineer low-scatter thin films
Duparre, A.; Kaiser, N. | Journal Article |
| 1998 | Analysis of the High-Frequency Response of Atomic Force Microscope Cantilevers
Rabe, U.; Arnold, W.; Turner, J. | Journal Article |
| 1998 | Messung von Mikrostrukturen in einem großen Skalenbereich durch Kombination von Weißlichtinterferometrie und Rasterkraftmikroskopie
Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G. | Conference Paper |
| 1998 | Microscopic characterization of machined high-performance ceramics using acoustical, optical and mechanical NDT
Scherer, V.; Arnold, W.; Fassbender, S.; Weides, G. | Conference Paper |
| 1998 | Microwear experiments on metal containing amorphous hydrocarbon hard coatings by AFM. Wear mechanisms and models for the load and time dependence
Schiffmann, K.I. | Journal Article |
| 1998 | A model for particle growth in arc deposited amorphous carbon films
Drescher, D.; Koskinen, J.; Scheive, H.J.; Mensch, A. | Journal Article |
| 1998 | Selective etching of III-V materials
Weyher, J.L. | Conference Paper |
| 1998 | Transfer of Mechanical Vibration from a Sample to an AFM-Cantilever - A Theoretical Description
Hirsekorn, S. | Journal Article |
| 1997 | Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region
Duparre, A.; Jakobs, S.; Kaiser, N. | Conference Paper |
| 1997 | Interpretation of atomic force microscope (AFM) signals from surface charge on insulators
Wintle, H.J. | Journal Article |
| 1997 | Local Elasticity and Lubrication Measurements Using Atomic Force and Friction Force Microscopy at Ultrasonic Frequencies
Arnold, W.; Bhushan, B.; Rabe, U.; Scherer, V. | Journal Article |
| 1997 | Materials Characterization Using High-Frequency Atomic Force Microscopy and Friction Force Microscopy
Meissner, O.; Arnold, W.; Janser, K.; Rabe, U.; Scherer, V. | Conference Paper |
| 1997 | New method based on atomic force microscopy for in-depth characterization of damage in Si irradiated with 209 MeV Kr
Biro, L.P.; Gyulai, J.; Havancsak, K.; Didyk, A.Y.; Bogen, S.; Frey, L.; Ryssel, H. | Journal Article |
| 1997 | Untersuchung von metallhaltigen amorphen Kohlenwasserstoff-Nanokompositen mittels Rastersondenmikroskopie und Röntgenkleinwinkelstreuung
Fryda, M.; Goerigk, G.; Schiffmann, K.I. | Journal Article, Conference Paper |
| 1996 | Acoustic microscopy with resolution in the NM-range
Rabe, U.; Arnold, W.; Janser, K. | Conference Paper |
| 1996 | Analysis of interface and volume inhomogenities in a multilayer system by light scattering methods
Pichlmaier, S.; Hehl, K.; Schuhmann, U.; Duparre, A.; Gliech, S. | Conference Paper |
| 1996 | Combination of surface characterization techniques for investigating optical thin-film components
Duparre, A.; Jakobs, S. | Journal Article |
| 1996 | Dependence of the surface morphology and scattering of optical coatings on film material, substrate roughness, and deposition process
Jakobs, S.; Feigl, T.; Duparre, A. | Conference Paper |
| 1996 | Optical scattering and surface microstructure of thin films for laser application
Duparre, A.; Kiesel, A.; Gliech, S. | Journal Article |
| 1996 | Roughness analysis of optical films and substrates by atomic force microscopy
Duparre, A.; Ruppe, C. | Journal Article |
| 1996 | Vibrations of free and surface-coupled atomic force microscope cantilevers. Theory and experiment
Rabe, U.; Arnold, W.; Janser, K. | Journal Article |
| 1995 | AFM investigations of the initial stages of prepolymer film growth on aluminium
Gesang, T.; Höper, R.; Dieckhoff, S.; Fanter, D.; Hartwig, A.; Possart, W.; Hennemann, O.-D. | Journal Article |
| 1995 | The atomic force microscope as a near-filed probe for ultrasound
Rabe, U.; Arnold, W.; Dvorak, M. | Journal Article |
| 1995 | Atomic force microscopy on cross-section of optimal coatings: a new method
Duparre, A.; Ruppe, C.; Pischow, K.A.; Adamik, M.; Barna, P.B. | Journal Article |
| 1995 | Comparative film thickness determination by atomic force microscopy and ellipsometry for ultrathin prepolymer films
Gesang, T.; Fanter, D.; Höper, R.; Possart, W.; Hennemann, O.-D. | Journal Article |
| 1995 | Imaging elastic sample properties with an atomic force microscope operating in the Tapping Mode
Höper, R.; Gesang, T.; Possart, W.; Hennemann, O.-D.; Boseck, S. | Journal Article |
| 1995 | Measurement of microtopography and surface properties of micromchined surfaces employing atomic force microscopy and near-field acoustic microscopy
Scherer, V.; Rabe, U.; Arnold, W. | Conference Paper |
| 1995 | Prepolymer film growth by adsorption out of solution on silicon and aluminium. An atomic force microscope study
Gesang, T.; Höper, R.; Dieckhoff, S.; Hartwig, A.; Possart, W.; Hennemann, O.-D. | Journal Article |
| 1994 | Atomic force microscopy at MHz frequencies
Arnold, W.; Rabe, U. | Journal Article |
| 1994 | Charakterisierung ultrapräzisionsbearbeiteter Materialien mittels Rastersonden-Mikroskopie
Rabe, U.; Arnold, W.; Scherer, V.; Riemer, O.; Preuß, W.; Brinksmeier, E. | Conference Paper |
| 1994 | Charakterisierung ultrapräzisionsbearbeiteter Materialien mittels Rastersonden-Mikroskopie (ASPE)
Rabe, U.; Arnold, W.; Scherer, V.; Fechner, R.; Schindler, A.; Riemer, O.; Preuß, W.; Brinksmeier, E. | Conference Paper |
| 1994 | Generic detrending of surface profiles
Duparre, A.; Rothe, H.; Jakobs, S. | Journal Article |
| 1994 | Investigation of heteroepitaxial diamond films by scanning tunneling and atomic force microscopy
Jiang, X.; Schiffmann, K.I. | Journal Article |
| 1994 | Roughness and scattering measurements on thin films for UV/VIS applications
Duparre, A.; Kiesel, A.; Kaiser, N.; Truckenbrodt, H.; Schuhmann, U. | Conference Paper |
| 1994 | Single-shell carbon nanotubes imaged by atomic force microscopy.
Höper, R.; Workman, R.K.; Chen, D.; Sarid, D.; Yadav, T.; Withers, J.C.; Loutfy, R.O. | Journal Article |
| 1993 | Atomic-force-microscopic study of heteroepitaxial diamond nucleation on -100- silicon
Jiang, X.; Westphal, A.; Klages, C.-P.; Schiffmann, K.I. | Journal Article |
| 1993 | Investigation of fabrication parameters for the electron-beam induced deposition of contamination tips used in atomic force microscopy
Schiffmann, K.I. | Journal Article |
| 1992 | Diamond membrane based X-ray masks
Löchel, B.; Huber, H.-L.; Klages, C.-P.; Schäfer, L.; Bluhm, A. | Conference Paper |