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2010 | All-oxide broadband antireflection coatings by plasma ion assisted deposition: Design, simulation, manufacturing and re-optimization Wilbrandt, S.; Stenzel, O.; Kaiser, N. | Journal Article |
2010 | DLC/Si multilayer mirrors for EUV radiation Gawlitza, P.; Braun, S.; Leson, A.; Soer, W.; Jak, M.; Banine, V. | Conference Paper |
2008 | Sputter process with time-variant reactive gas mixture for the deposition of optical multilayer and gradient layer systems Bartzsch, H.; Weber, J.; Lau, K.; Glöß, D.; Frach, P. | Conference Paper |
2007 | Atmospheric-pressure plasmas for wide-area thin-film deposition and etching Hopfe, V.; Sheel, D.W. | Journal Article |
2007 | Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements Janicki, V.; Sancho-Parramon, J.; Stenzel, O.; Lappschies, M.; Görtz, B.; Rickers, C.; Polenzky, C.; Richter, U. | Journal Article |
2002 | Advanced diffusion system for low contamination in-line rapid thermal processing of silicon solar cells Biro, D.; Preu, R.; Schultz, O.; Peters, S.; Huljic, D.M.; Zickermann, D.; Schindler, R.; Ludemann, R.; Willeke, G. | Journal Article |
1996 | Antireflection coatings for ultraviolet radiation obtained by molecular beam deposition Laux, S.; Mann, K.; Granitza, B.; Kaiser, U.; Richter, W. | Journal Article |
1996 | UV damage threshold of molecular beam deposited fluoride coatings Laux, S.; Mann, K.; Kaiser, U.; Granitza, B.; Roth, O.; Richter, W. | Conference Paper |
1993 | Computer generated microlenses with high efficiency Pawlowski, E.; Ferstl, M.; Kuhlow, B. | Conference Paper |
1993 | The influence of oxide thickness on the passivation of high efficiency silicon solar cells Kopp, J.; Knobloch, J.; Wettling, W. | Conference Paper |
1993 | Two-dimensional arrays of diffractive microlenses for optical interconnects Kuhlow, B.; Pawlowski, E.; Ferstl, M. | Conference Paper |
1990 | Thin film deposition by excimer laser evaporation. Pompe, W.; Gorbunov, A.A.; Baranovka, G.K.; Klassen, N.V.; Konov, V.I.; Kulakov, M.P.; Prokhorov, A.M.; Weiß, H.-J.; Scheibe, H.J. | Journal Article |