Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors
Grahmann, J.; Graßhoff, T.; Conrad, H.; Sandner, T.; Schenk, H.
Conference Paper
2009Integrated position sensing for 2D microscanning mirrors using the SOI-device layer as the piezoresistive mechanical-elastic transformer
Grahmann, J.; Conrad, H.; Sandner, T.; Klose, T.; Schenk, H.
Conference Paper