Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2005Lanthanide tri-fluorides: A survey of the optical, mechanical and structural properties of thin films with emphasis of their use in the DUV - VUV - spectral range
Uhlig, H.; Thielsch, R.; Heber, J.; Kaiser, N.
Conference Paper
2005Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components
Schröder, S.; Uhlig, H.; Duparre, A.; Kaiser, N.
Conference Paper
2003Characterizing CaF2 for VUV optical components: Roughness, surface scatter, and bulk scatter
Hultaker, A.; Benkert, N.; Gliech, S.; Duparre, A.
Conference Paper
2003Methology to evaluate light scatter mechanisms of VUV substrates and coatings
Duparre, A.; Gliech, S.; Hultaker, A.
Book Article
2003System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm
Gliech, S.; Geßner, H.; Duparre, A.
Conference Paper
2003VULSTAR: A laser based system for measuring light scattering, transmittance, and reflectance at 157 nm and 193 nm
Duparre, A.; Gliech, S.; Benkert, N.
Book Article
2003VUV light scattering measurements of substrates and thin film coatings
Hultaker, A.; Gliech, S.; Benkert, N.; Duparre, A.
Conference Paper
2001Laser damage studies on MgF2 thin films
Protopapa, M.L.; Thomasi, F. de; Perrone, M.R.; Piegari, A.; Masetti, E.; Ristau, D.; Quesnel, E.; Duparre, A.
Journal Article