Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2008Definierte Oberflächenfeingestalt von Rohren und Profilen für das Innenhochdruck-Umformen (IHU)
Neugebauer, Reimund; Kurka, P.; Groche, P.; Elsen, A.
Research Report
2006Dreidimensionale Topographiesimulation der ionisierten Metallplasma-Abscheidung in der Halbleitertechnologie
Kistler, S.
Dissertation
2003Nondestructive topographic resistivity evaluation of semi-insulating SiC substrates
Stibal, R.; Müller, S.; Jantz, W.; Pozina, G.; Magnusson, B.; Ellison, A.
Journal Article
2002Topographic electrical characterization of semi-insulating GaAs, InP and SiC substates
Stibal, R.; Müller, S.; Jantz, W.
Conference Paper
2001Calibrated reference standards for films in the nanometer range
Hasche, K.; Herrmann, K.; Krumrey, M.; Ulm, G.; Schädlich, S.; Frank, W.; Procop, M.
Conference Paper
1995Investigation of surface topography, morphology and structure of hard amorphous carbon films by AFM and TEM
Drescher, D.; Kolitsch, A.; Mensch, A.; Scheibe, H.J.
Conference Paper
1995Topographie planen
Bolch, T.; Holeczek, H.; Müll, K.
Journal Article
1994Bleachable dyed resist - investigation of its process latitude in comparison with standard resists
Kunze, D.; Pforr, R.
Journal Article
1993Contactless resistivity mapping of semi-insulating substrates.
Jantz, W.; Stibal, R.
Journal Article
1991Ambient and low temperature photoluminescence topography of GaAs substrates, epitaxial and implanted layers.
Wang, Z.M.; As, D.J.; Jantz, W.; Windscheif, J.
Journal Article