Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Characterization of edge effects in precision low-coherence interferometry using broadband light sources
Taudt, Christopher; Baselt, Tobias; Nelsen, Bryan L.; Aßmann, Heiko; Greiner, Andreas; Koch, Edmund; Hartmann, Peter
Conference Paper
2016Measurement of surface topographies in the nm-range for power chip technologies by a modified low-coherence interferometer
Taudt, Christopher; Baselt, Tobias; Nelsen, Bryan L.; Aßmann, Heiko; Greiner, Andreas; Koch, Edmund; Hartmann, Paul
Conference Paper
2016Two-dimensional low-coherence interferometry for the characterization of nanometer-wafer-topographies
Taudt, Christopher; Baselt, Tobias; Nelsen, Bryan; Aßmann, Heiko; Greiner, Andreas; Koch, Edmund; Hartmann, Peter
Conference Paper