Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014Investigations on the passivation mechanism of AlN:H and AlN:H-SiN:H stacks
Krugel, G.; Jenkner, F.; Moldovan, A.; Wolke, W.; Rentsch, J.; Preu, R.
Journal Article, Conference Paper
2013Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration
Rademacher, D.; Zickenrott, T.; Vergöhl, M.
Journal Article, Conference Paper
2012CrC/a-C:H coatings for highly loaded, low friction applications under formulated oil lubrication
Keunecke, M.; Bewilogua, K.; Becker, J.; Gies, A.; Grischke, M.
Journal Article
2012Manufacturing of high-precision optical coatings using cylindrical cathodes in a sputter-up configuration
Rademacher, D.; Kreher, S.; Vergöhl, M.
Conference Paper
1987Redeposition in ion milling
Müller, K.P.; Pelka, J.
Journal Article