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| 2019 | Hermetisches Fügen von MEMS-basierten Bauelementen mithilfe reaktiver Multischichtsysteme (RMS)
Pflug, Erik; Dietrich, Georg; Leson, Andreas; Schumacher, Axel; Knappmann, Stephan; Dehe, Alfons | Journal Article |
| 2017 | Passivating dopant sources for high-efficiency n-type silicon solar cells
Steinhauser, Bernd | Dissertation |
| 2016 | Ion implantation for high-efficiency silicon solar cells
Müller, Ralph
: Reinecke, H.; Glunz, S.W.; Lausen, G. | Dissertation |
| 2016 | Verbundvorhaben: Entwicklung hoch- und kosteneffizienter PV-Si-Wafer (ENOWAII); Teilprojekt: Erarbeitung der Grundlagen für einen schädigungsarmen Säge- und Vereinzelungsprozess für Quasi-Mono-Silizium (II). Schlussbericht
Rist, T.; Bierwisch, C.; Krappitz, M.; Mee, S.; Kübler, R. | Report |
| 2015 | Aluminum oxide for the surface passivation of high efficiency silicon solar cells
Richter, Armin | Dissertation |
| 2015 | Schwarzes Silizium als Anti-Reflex-Schicht für Solarzellen
Holeczek, Harald | Journal Article |
| 2014 | Comparison of direct growth and wafer bonding for the fabrication of GaInP/GaAs dual-junction solar cells on silicon
Dimroth, Frank; Roesener, Tobias; Essig, Stephanie; Weuffen, Christoph; Wekkeli, Alexander; Oliva, Eduard; Siefer, Gerald; Volz, Kerstin; Hannappel, Thomas; Häussler, Dietrich; Jäger, Wolfgang; Bett, Andreas W. | Journal Article |
| 2014 | Plasmachemisches Trockenätzen von Solarwafern mit Atmosphärendruck-Plasmen
López Alonso, Elena
: Beyer, Eckhard (Gutachter); Leyens, Christoph (Gutachter) | Dissertation |
| 2013 | Development and evaluation of a prototypic automated high precision assembly of ultra-thin miniaturized silicon wafers
Mayer, Pablo; Giesen, Tim; Wertz, Roland; Böttinger, Fabian; Verl, Alexander | Conference Paper |
| 2013 | Gripping-in-liquid: Handling challenges for automated ultra-thin wafer production
Giesen, Tim; Mayer, Pablo; Stiels, Daniel; Wertz, Roland; Martini, Roberto; Debucquoy, Maarten; Verl, Alexander | Conference Paper |
| 2013 | Interactions of silica nanoparticles with lung epithelial cells and the association to flotillins
Kasper, Jennifer; Hermanns, Maria I.; Bantz, Christoph; Koshkina, Olga; Lang, Thomas; Maskos, Michael; Pohl, Christine; Unger, Ronald E.; Kirkpatrick, C. James | Journal Article |
| 2013 | Technologische Konzepte für Hochleistungssolarzellen
Holeczek, Harald | Journal Article |
| 2012 | Advanced production challenges for automated ultra-thin wafer handling
Giesen, Tim; Wertz, Roland; Fischmann, Christian; Kreck, Guido; Govaerts, Jonathan; Vaes, Jan; Debucquoy, Maarten; Verl, Alexander | Conference Paper |
| 2012 | Passive alignment of wafers - design and impact
Wertz, Roland; Giesen, Tim; Fischmann, Christian; Konstandin, Marcel; Verl, Alexander | Conference Paper |
| 2012 | A thermodynamic description of the Al-Mo-Si system
Guo, Cuiping; Li, Changrong; Masset, P.J.; Du, Z. | Journal Article |
| 2010 | Flexible Solarzellen aus Siliziumdrähten
Holeczek, Harald | Journal Article |
| 2010 | Flexible Solarzellen aus Siliziumdrähten
Holeczek, Harald | Journal Article |
| 2009 | Characterization of EUV induced carbon films using laser-generated surface acoustic waves
Chen, J.; Lee, C.J.; Louis, E.; Bijkerk, F.; Kunze, R.; Schmidt, H.; Schneider, D.; Moors, R. | Conference Paper, Journal Article |
| 2009 | Magnetronsputtern von hochleitfähigen ZnO:Al-Schichten für die Photovoltaik
Ruske, F. | Dissertation |
| 2008 | Angular distributions of sputtered atoms from semiconductor targets at grazing ion beam incidence angles
Sekowski, M.; Burenkov, A.; Hernández-Mangas, J.; Martinez-Limia, A.; Ryssel, H. | Conference Paper |
| 2008 | Atmospheric pressure plasmas for crystalline silicon photovoltaics
Hopfe, V.; Sheel, D.W.; Möller, R. | Conference Paper |
| 2008 | The basic structure of Ti-Si-N superhard nanocomposite coatings: Ab initio studies
Liu, Xuejie; Gottwald, Bernhard; Wang, Changqing; Jia, Yu; Westkämper, Engelbert | Conference Paper |
| 2008 | Plasma enhanced CVD and plasma chemical etching at atmospheric pressure for continuous processing of crystallien silicon solar wafers
Lopez, E.; Dresler, B.; Mäder, G.; Dani, I.; Hopfe, V.; Kaskel, S.; Heintze, M.; Möller, R.; Wanka, H.; Kirschmann, M.; Frenck, J.; Poruba, A.; Barinka, R.; Dahl, R.; Nussbaumer, H. | Conference Paper |
| 2007 | Analysis of the formation of SiC and Si3N4 precipitates during directional solidification of multicrystalline silicon for solar cells
Reimann, C.; Friedrich, J.; Müller, G.; Würzner, S.; Möller, H.J. | Conference Paper |
| 2007 | Chemical mechanical planarization (CMP) metrology for 45/32 nm technology generations
Nutsch, A.; Pfitzner, L. | Conference Paper |
| 2007 | Flexcellence: Towards roll-to-roll mass-production of low cost thin film silicon solar cells
Ballif, C.; Terrazzoni-Daudrix, V.; Haug, F.-J.; Fischer, D.; Soppe, W.; Loffler, J.; Andreu, J.; Fahland, M.; Schlemm, H.; Topic, M. | Conference Paper |
| 2007 | Mikrosystemtechnisch hergestellte Fabry-Pérot-Interferenzdisplays mit hydrophobisierten Bildpunktmembranen
Knieling, T. | Dissertation |
| 2007 | Nondestructive characterization of sub-surface damage in rotational ground silicon wafers by laser acoustics
Pähler, D.; Schneider, D.; Herben, M. | Journal Article |
| 2007 | Open-circuit voltage optimisation of amorphous silicon thin film solar cells for flexible photovoltaics
Sönderström, T.; Haug, F.-J.; Terrazzoni-Daudrix, V.; Niquille, X.; Perregaux, S.; Fahland, M.; Ballif, C. | Conference Paper |
| 2007 | Photostrom-Spektroskopie von Silicium im Volumen und an der Grenzfläche zu Siliciumdioxid
Rommel, M. | Dissertation |
| 2007 | Sauber und rein in der Fertigung
Rochowicz, Markus; Ernst, Christian | Journal Article |
| 2007 | SEM and TEM investigation of the ablation mechanisms involved in ultrashort pulsed laser drilling of silicon
Kaspar, J.; Luft, A.; Will, M.; Nolte, S. | Conference Paper |
| 2006 | Biologically derived ceramic substrates for crystalline silicon thin-film solar cells
Kunz, T.; Burkert, I.; Grosch, M.; Auer, R.; Siegel, S.; Weiss, R.; Lauer, A.; Scheffler, M. | Conference Paper |
| 2006 | Bruchmechanik und Klebverbindungen
Brede, M.; Hesebeck, O. | Conference Paper |
| 2006 | Laser helical drilling of silicon wafers with ns to fs pulses
Kaspar, J.; Luft, A.; Nolte, S.; Will, M.; Beyer, E. | Journal Article |
| 2006 | Pattern Effects with the Mask Off
Nenyei, Z.; Niess, J.; Lerch, W.; Dietl, W.; Timans, P.J.; Pichler, P. | Conference Paper |
| 2006 | Permanente plasmapolymere Trennschichten
Vissing, K.D.; Klyszcz-Nasko, H. | Journal Article |
| 2006 | Plasma etching at atmospheric pressure for rear emitter removal in crystalline Si solar cells
Lopez, E.; Dani, I.; Hopfe, V.; Heintze, M.; Hauser, A.; Möller, R.; Wanka, H. | Conference Paper |
| 2006 | Quantum mechanical studies of boron clustering in silicon
Deák, P.; Gali, A.; Pichler, P. | Book Article |
| 2006 | ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Rech, B.; Hüpkes, J.; Schöpe, G.; Stiebig, H. | Journal Article |
| 2004 | Boron-interstitial cluster kinetics: Extraction of binding energies from dedicated experiments
Ortiz, C.J.; Pichler, P.; Haublein, V.; Mannino, G.; Scalese, S.; Privitera, V.; Solmi, S.; Lerch, W. | Conference Paper |
| 2004 | Current understanding and modeling of B diffusion and activation anomalies in preamorphized ultra-shallow junctions
Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Pawlak, B.J.; Cristiano, F.; Duffy, R.; Claverie, A.; Ortiz, C.J.; Pichler, P.; Lampin, E.; Zechner, C. | Conference Paper |
| 2004 | A physically based model for the spatial and temporal evolution of self-interstitial agglomerates in ion-implanted silicon
Ortiz, C.J.; Pichler, P.; Fühner, T.; Cristiano, F.; Colombeau, B.; Cowern, N.E.B.; Claverie, A. | Journal Article |
| 2004 | Quantum mechanical studies of boron clustering in silicon
Deák, P.; Gali, A.; Pichler, P.; Ryssel, H. | Conference Paper |
| 2004 | Silicon Front-End Junction Formation - Physics and Technology
: Pichler, P.; Claverie, A.; Lindsay, R.; Orlowski, M.; Windl, W. | Conference Proceedings |
| 2003 | Indium in silicon: A study on diffusion and electrical activation
Scalese, S.; La Magna, A.; Mannino, G.; Privitera, V.; Bersani, M.; Giubertoni, D.; Solmi, S.; Pichler, P. | Conference Paper |
| 2003 | Merging Atomistic and Continuum Simulations of Silicon Technology - The Best from the Two Worlds
Pichler, P. | Conference Paper |
| 2002 | Current status of models for transient phenomena in dopant diffusion and activation
Pichler, P.; Stiebel, D. | Journal Article |
| 2002 | Current understanding and modeling of boron-interstitial clusters
Pichler, P. | Conference Paper |
| 2002 | Determination of aluminum diffusion parameters in silicon
Krause, O.; Pichler, P.; Ryssel, H. | Journal Article |
| 2002 | Modell zum Sortieren und Speichern von Einzelscheiben für die Fertigung integrierter Schaltkreise
Kaufmann, T. | Dissertation |
| 2002 | Properties of vacancies in silicon determined from laser-annealing experiments
Pichler, P. | Conference Paper |
| 2001 | A reduced approach for modeling the influence of nanoclusters and {113}-defects on transient enhanced diffusion
Stiebel, D.; Pichler, P.; Cowern, N.E.B. | Journal Article |
| 2000 | Modeling the Amorphization of Si due to the Implantation of As, Ge, and Si
Stiebel, D.; Burenkov, A.; Pichler, P.; Cristiano, F.; Claverie, A.; Ryssel, H. | Conference Paper |
| 2000 | Modelling of intrinsic aluminum diffusion for future power devices
Krause, O.; Pichler, P.; Ryssel, H. | Conference Paper |
| 2000 | On the Properties of the Intrinsic Point Defects in Silicon: A Perspective from Crystal Growth and Wafer Processing
Falster, R.; Voronkov, V.V.; Quast, F. | Journal Article |
| 2000 | Struktur und Eigenschaften von Schichtsystemen für den EUV-Spektralbereich
Feigl, T. | Dissertation |
| 2000 | Vacancy-Nitrogen Complexes in Float-Zone Silicon
Quast, F.; Pichler, P.; Ryssel, H.; Falster, R. | Conference Paper |
| 1999 | Extraction of vacancy parameters from outdiffusion of zinc from silicon
Pichler, P. | Conference Paper |
| 1999 | Oxygen distribution in silicon melt during standard Czochralski Process studied by sensor measurements and comparison to numerical simulation
Mühe, A.; Backofen, R.; Fainberg, J.; Müller, G.; Tomzig, E.; Ammon, W., von | Journal Article |
| 1999 | Plasmatechnologie für die Photovoltaik
Lüdemann, R. | Dissertation |
| 1999 | Study of oxygen transport in Czochralski Growth of silicon
Müller, G.; Mühe, A.; Backofen, R.; Tomzig, E.; Ammon, W., von | Journal Article |
| 1999 | Wohltemperierte Siliziumscheiben - Simulation und Messung der Temperaturverteilung in einem vertikalen Schichtabscheideofen
Poscher, S.; Wellner, S.; Ryssel, H. | Journal Article |
| 1998 | Atomistic analysis of the vacancy mechanism of impurity diffusion in silicon
List, S.; Ryssel, H. | Journal Article |
| 1998 | Distortion of SIMS Profiles due to Ion Beam Mixing: Shallow Arsenic Implants in Silicon
Montandon, C.; Burenkov, A.; Frey, L.; Pichler, P.; Biersack, J.P. | Journal Article |
| 1998 | Flexible silicon structures for a retina implant
Trieu, H.-K.; Ewe, L.; Mokwa, W.; Schwarz, M.; Hosticka, B.J. | Conference Paper |
| 1998 | Influence of RTP on Vacancy Concentrations
Jacob, M.; Pichler, P.; Wohs, M.; Ryssel, H.; Falster, R. | Book Article |
| 1998 | On the Asymmetrical Behavior of Transient Enhanced Diffusion in Pre-Amorphized Si Wafers
Alquier, D.; Cowern, N.E.B.; Pichler, P.; Armand, C.; Martinez, A.; Mathiot, D.; Omri, M.; Claverie, A. | Conference Paper |
| 1998 | Recombination of point defects via extended defects and its influence
Stiebel, D.; Pichler, P. | Conference Paper |
| 1998 | A reinterpretation of platinum-diffusion experiments
Pichler, P. | Conference Paper |
| 1997 | Determination of vacancy concentrations in the bulk of silicon wafers by platinum diffusion experiments
Jacob, M.; Pichler, P.; Ryssel, H.; Falster, R. | Journal Article |
| 1997 | Distortion of SIMS profiles due to ion beam mixing
Saggio, M.; Montandon, C.; Burenkov, A.; Frey, L.; Pichler, P. | Conference Paper |
| 1997 | Entwicklung und Charakterisierung von CMOS-kompatiblen Mikrolampen mit Hilfe der Verfahren der Oberflächenmikromechanik
Hell, S. | Dissertation |
| 1997 | Low energy implantation and transient enhanced diffusion
Cowern, N.E.B.; Collart, E.J.H.; Politiek, J.; Bancken, P.H.L.; Berkum, J.G.M. van; Kyllesbech Larsen, K.; Stolk, P.A.; Huizing, H.G.A.; Pichler, P.; Burenkov, A.; Gravensteijn, D.J. | Conference Paper |
| 1997 | Observation of vacancy enhancement during rapid thermal annealing in nitrogen
Jacob, M.; Pichler, P.; Ryssel, H.; Falster, R.; Cornara, M.; Gambaro, D.; Olmo, M.; Pagani, M. | Journal Article |
| 1997 | Silicon sensor systems
Hosticka, B.J.; Brockherde, W.; Hammerschmidt, D. | Journal Article |
| 1997 | Untersuchung des Einflusses von Gitterleerstellen auf die Sauerstoffpräzipitation in Silicium mit Hilfe der Platindiffusion
Jacob, M.
: Ryssel, H. (Prüfer) | Dissertation |
| 1997 | Vacancy-assisted oxygen precipitation phenomena in Si
Falster, R.; Pagani, M.; Gambaro, D.; Cornara, M.; Olmo, M.; Ferrero, G.; Pichler, P.; Jacob, M. | Journal Article |
| 1996 | Sensors/Actuators of the functional ceramics based on Sol-Gel technique for microsystems
Grimme, R.; Otschik, P.; Gesemann, H.J. | Conference Paper |
| 1996 | Untersuchungen an integrierten Dünnfilmsensorarrays zur Analyse von Gasgemischen mittels statischer und dynamischer Verfahren
Werno, J. | Dissertation |
| 1995 | Determination of vacancy concentration in float zone and Czochralski silicon
Jacob, M.; Pichler, P.; Ryssel, H.; Gambaro, D.; Falster, R. | Conference Paper |
| 1995 | Licht untersucht dünnste Schichten
Fanter, D.; Possart, W.; Hennemann, O.-D. | Journal Article |
| 1995 | Mikrosystemtechnik. Entwicklungsstand und Marktumsetzung
Mokwa, W. | Conference Paper |
| 1995 | Platinum diffusion at low temperatures
Jacob, M.; Pichler, P.; Ryssel, H.; Falster, R. | Conference Paper |
| 1995 | Point defect-based modeling of diffusion and electrical activation of ion implanted boron in crystalline silicon
Jäger, H.-U. | Journal Article |
| 1995 | Studies of heteroepitaxial nucleation and growth of diamond on silicon
Jiang, X.; Paul, M.; Klages, C.-P.; Jia, C.L. | Conference Paper |
| 1995 | Untersuchung der SIMOX-Technologie zur Erzeugung anwendungsspezifischer SOI-Substrate
Gassel, H. | Dissertation |
| 1995 | Versagensverhalten von einkristallinem Silizium an scharfen Kerben
Heinzelmann, M. | Dissertation |
| 1994 | Adsorption behaviour of a prepolymer on aluminium and silicon.
Hartwig, A.; Zha, Z.; Possart, W.; Hennemann, O.-D. | Conference Paper |
| 1994 | Dynamic behavior of arsenic clusters in silicon
Bauer, H.; Pichler, P.; Ryssel, H. | Conference Paper |
| 1994 | Enhanced diffusion of antimony caused by phosphorus diffusion at high concentrations
Pichler, P.; Ryssel, H.; Wallmann, G.; Ploß, R. | Conference Paper |
| 1994 | Kleinste mechanische Elemente für die monolithische Integration in Mikrosystemen
Mokwa, W. | Journal Article |
| 1994 | Silizium - Werkstoff der Mikrosystemtechnik
Dudaicevs, H.; Mokwa, W. | Conference Paper |
| 1994 | Simulation of buried layer experiments containing all four dopant species
Ghaderi, K.; Hobler, G.; Budil, M.; Pötzl, H.; Pichler, P.; Ryssel, H.; Hansch, W.; Eisele, I.; Tian, C.; Stingeder, G. | Conference Paper |
| 1994 | SOI-Herstellung und Anwendung am Fraunhofer-Institut IMS Duisburg.
Gassel, H. | Conference Paper |
| 1994 | Sonnenenergie: Photovoltaik
Goetzberger, A.; Voß, B.; Knobloch, J. | Book |
| 1993 | Deposition and characterization of diamond epitaxial thin films on silicon substrates
Jiang, X.; Klages, C.-P.; Rösler, M.; Zachai, R.; Hartweg, M.; Füßer, H.-J. | Conference Paper |
| 1993 | Dünnschicht-Solarzellen aus Galliumarsenid
Wettling, W. | Conference Paper |
| 1993 | The effect of substrate bias voltage on nucleation of diamond crystals in a microwave plasma assisted CVD process
Jiang, X.; Six, R.; Zachai, R.; Hartweg, M.; Füßer, H.-J.; Klages, C.-P. | Journal Article, Conference Paper |
| 1993 | An integrated sensor for invasive blood velocity measurement
Eichholz, J.; Langerbein, A.; Manoli, Y.; Mokwa, W.; Kersjes, R.A. | Conference Paper |
| 1993 | A new microstructured silicon substrate for ultrathin gas-sensitive films
Schütze, A.; Weber, U.; Zacheja, J.; Kohl, D.; Mokwa, W.; Rospert, M.; Werno, J. | Conference Paper |
| 1993 | Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A. | Conference Paper |
| 1993 | Silizium-Solarzellen mit höchsten Wirkungsgraden
Wettling, W. | Conference Paper |
| 1993 | Simulation of high-dose ion implantation-induced transient diffusion and of electrical activation of boron in crystalline silicon
Jäger, H.-U. | Conference Paper |
| 1993 | Test monolithischer Sensorsysteme
Dudaicevs, H.; Gottfried-Gottfried, R. | Journal Article |
| 1992 | Gassensoren auf Siliziumbasis
Kohl, D.; Mokwa, W. | Journal Article |
| 1992 | Silicon technologies for sensor fabrication
Mokwa, W. | Book Article |
| 1984 | Bestimmung von mineralischen Bestandteilen in Spanplatten
Schriever, E.; Boehme, C. | Journal Article |