Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Passivating dopant sources for high-efficiency n-type silicon solar cells
Steinhauser, Bernd
Dissertation
2016Ion implantation for high-efficiency silicon solar cells
Müller, Ralph
: Reinecke, H.; Glunz, S.W.; Lausen, G.
Dissertation
2015Aluminum oxide for the surface passivation of high efficiency silicon solar cells
Richter, Armin
Dissertation
2015Schwarzes Silizium als Anti-Reflex-Schicht für Solarzellen
Holeczek, Harald
Journal Article
2014Comparison of direct growth and wafer bonding for the fabrication of GaInP/GaAs dual-junction solar cells on silicon
Dimroth, Frank; Roesener, Tobias; Essig, Stephanie; Weuffen, Christoph; Wekkeli, Alexander; Oliva, Eduard; Siefer, Gerald; Volz, Kerstin; Hannappel, Thomas; Häussler, Dietrich; Jäger, Wolfgang; Bett, Andreas W.
Journal Article
2014Plasmachemisches Trockenätzen von Solarwafern mit Atmosphärendruck-Plasmen
López Alonso, Elena
: Beyer, Eckhard (Gutachter); Leyens, Christoph (Gutachter)
Dissertation
2013Development and evaluation of a prototypic automated high precision assembly of ultra-thin miniaturized silicon wafers
Mayer, Pablo; Giesen, Tim; Wertz, Roland; Böttinger, Fabian; Verl, Alexander
Conference Paper
2013Gripping-in-liquid: Handling challenges for automated ultra-thin wafer production
Giesen, Tim; Mayer, Pablo; Stiels, Daniel; Wertz, Roland; Martini, Roberto; Debucquoy, Maarten; Verl, Alexander
Conference Paper
2013Interactions of silica nanoparticles with lung epithelial cells and the association to flotillins
Kasper, Jennifer; Hermanns, Maria I.; Bantz, Christoph; Koshkina, Olga; Lang, Thomas; Maskos, Michael; Pohl, Christine; Unger, Ronald E.; Kirkpatrick, C. James
Journal Article
2013Technologische Konzepte für Hochleistungssolarzellen
Holeczek, Harald
Journal Article
2012Advanced production challenges for automated ultra-thin wafer handling
Giesen, Tim; Wertz, Roland; Fischmann, Christian; Kreck, Guido; Govaerts, Jonathan; Vaes, Jan; Debucquoy, Maarten; Verl, Alexander
Conference Paper
2012Passive alignment of wafers - design and impact
Wertz, Roland; Giesen, Tim; Fischmann, Christian; Konstandin, Marcel; Verl, Alexander
Conference Paper
2012A thermodynamic description of the Al-Mo-Si system
Guo, Cuiping; Li, Changrong; Masset, P.J.; Du, Z.
Journal Article
2010Flexible Solarzellen aus Siliziumdrähten
Holeczek, Harald
Journal Article
2010Flexible Solarzellen aus Siliziumdrähten
Holeczek, Harald
Journal Article
2009Characterization of EUV induced carbon films using laser-generated surface acoustic waves
Chen, J.; Lee, C.J.; Louis, E.; Bijkerk, F.; Kunze, R.; Schmidt, H.; Schneider, D.; Moors, R.
Conference Paper, Journal Article
2009Magnetronsputtern von hochleitfähigen ZnO:Al-Schichten für die Photovoltaik
Ruske, F.
Dissertation
2008Angular distributions of sputtered atoms from semiconductor targets at grazing ion beam incidence angles
Sekowski, M.; Burenkov, A.; Hernández-Mangas, J.; Martinez-Limia, A.; Ryssel, H.
Conference Paper
2008Atmospheric pressure plasmas for crystalline silicon photovoltaics
Hopfe, V.; Sheel, D.W.; Möller, R.
Conference Paper
2008The basic structure of Ti-Si-N superhard nanocomposite coatings: Ab initio studies
Liu, Xuejie; Gottwald, Bernhard; Wang, Changqing; Jia, Yu; Westkämper, Engelbert
Conference Paper
2008Plasma enhanced CVD and plasma chemical etching at atmospheric pressure for continuous processing of crystallien silicon solar wafers
Lopez, E.; Dresler, B.; Mäder, G.; Dani, I.; Hopfe, V.; Kaskel, S.; Heintze, M.; Möller, R.; Wanka, H.; Kirschmann, M.; Frenck, J.; Poruba, A.; Barinka, R.; Dahl, R.; Nussbaumer, H.
Conference Paper
2007Analysis of the formation of SiC and Si3N4 precipitates during directional solidification of multicrystalline silicon for solar cells
Reimann, C.; Friedrich, J.; Müller, G.; Würzner, S.; Möller, H.J.
Conference Paper
2007Chemical mechanical planarization (CMP) metrology for 45/32 nm technology generations
Nutsch, A.; Pfitzner, L.
Conference Paper
2007Flexcellence: Towards roll-to-roll mass-production of low cost thin film silicon solar cells
Ballif, C.; Terrazzoni-Daudrix, V.; Haug, F.-J.; Fischer, D.; Soppe, W.; Loffler, J.; Andreu, J.; Fahland, M.; Schlemm, H.; Topic, M.
Conference Paper
2007Mikrosystemtechnisch hergestellte Fabry-Pérot-Interferenzdisplays mit hydrophobisierten Bildpunktmembranen
Knieling, T.
Dissertation
2007Nondestructive characterization of sub-surface damage in rotational ground silicon wafers by laser acoustics
Pähler, D.; Schneider, D.; Herben, M.
Journal Article
2007Open-circuit voltage optimisation of amorphous silicon thin film solar cells for flexible photovoltaics
Sönderström, T.; Haug, F.-J.; Terrazoni-Daudrix, V.; Niquille, X.; Perregaux, S.; Fahland, M.; Ballif, C.
Conference Paper
2007Photostrom-Spektroskopie von Silicium im Volumen und an der Grenzfläche zu Siliciumdioxid
Rommel, M.
Dissertation
2007Sauber und rein in der Fertigung
Rochowicz, Markus; Ernst, Christian
Journal Article
2007SEM and TEM investigation of the ablation mechanisms involved in ultrashort pulsed laser drilling of silicon
Kaspar, J.; Luft, A.; Will, M.; Nolte, S.
Conference Paper
2006Biologically derived ceramic substrates for crystalline silicon thin-film solar cells
Kunz, T.; Burkert, I.; Grosch, M.; Auer, R.; Siegel, S.; Weiss, R.; Lauer, A.; Scheffler, M.
Conference Paper
2006Bruchmechanik und Klebverbindungen
Brede, M.; Hesebeck, O.
Conference Paper
2006Laser helical drilling of silicon wafers with ns to fs pulses
Kaspar, J.; Luft, A.; Nolte, S.; Will, M.; Beyer, E.
Journal Article
2006Pattern Effects with the Mask Off
Nenyei, Z.; Niess, J.; Lerch, W.; Dietl, W.; Timans, P.J.; Pichler, P.
Conference Paper
2006Permanente plasmapolymere Trennschichten
Vissing, K.D.; Klyszcz-Nasko, H.
Journal Article
2006Plasma etching at atmospheric pressure for rear emitter removal in crystalline Si solar cells
Lopez, E.; Dani, I.; Hopfe, V.; Heintze, M.; Hauser, A.; Möller, R.; Wanka, H.
Conference Paper
2006Quantum mechanical studies of boron clustering in silicon
Deák, P.; Gali, A.; Pichler, P.
Book Article
2006ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Rech, B.; Hüpkes, J.; Schöpe, G.; Stiebig, H.
Journal Article
2004Boron-interstitial cluster kinetics: Extraction of binding energies from dedicated experiments
Ortiz, C.J.; Pichler, P.; Haublein, V.; Mannino, G.; Scalese, S.; Privitera, V.; Solmi, S.; Lerch, W.
Conference Paper
2004Current understanding and modeling of B diffusion and activation anomalies in preamorphized ultra-shallow junctions
Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Pawlak, B.J.; Cristiano, F.; Duffy, R.; Claverie, A.; Ortiz, C.J.; Pichler, P.; Lampin, E.; Zechner, C.
Conference Paper
2004A physically based model for the spatial and temporal evolution of self-interstitial agglomerates in ion-implanted silicon
Ortiz, C.J.; Pichler, P.; Fühner, T.; Cristiano, F.; Colombeau, B.; Cowern, N.E.B.; Claverie, A.
Journal Article
2004Quantum mechanical studies of boron clustering in silicon
Deák, P.; Gali, A.; Pichler, P.; Ryssel, H.
Conference Paper
2004Silicon Front-End Junction Formation - Physics and Technology
: Pichler, P.; Claverie, A.; Lindsay, R.; Orlowski, M.; Windl, W.
Conference Proceedings
2003Indium in silicon: A study on diffusion and electrical activation
Scalese, S.; La Magna, A.; Mannino, G.; Privitera, V.; Bersani, M.; Giubertoni, D.; Solmi, S.; Pichler, P.
Conference Paper
2003Merging Atomistic and Continuum Simulations of Silicon Technology - The Best from the Two Worlds
Pichler, P.
Conference Paper
2002Current status of models for transient phenomena in dopant diffusion and activation
Pichler, P.; Stiebel, D.
Journal Article
2002Current understanding and modeling of boron-interstitial clusters
Pichler, P.
Conference Paper
2002Determination of aluminum diffusion parameters in silicon
Krause, O.; Pichler, P.; Ryssel, H.
Journal Article
2002Modell zum Sortieren und Speichern von Einzelscheiben für die Fertigung integrierter Schaltkreise
Kaufmann, T.
Dissertation
2002Properties of vacancies in silicon determined from laser-annealing experiments
Pichler, P.
Conference Paper
2001A reduced approach for modeling the influence of nanoclusters and {113}-defects on transient enhanced diffusion
Stiebel, D.; Pichler, P.; Cowern, N.E.B.
Journal Article
2000Modeling the Amorphization of Si due to the Implantation of As, Ge, and Si
Stiebel, D.; Burenkov, A.; Pichler, P.; Cristiano, F.; Claverie, A.; Ryssel, H.
Conference Paper
2000Modelling of intrinsic aluminum diffusion for future power devices
Krause, O.; Pichler, P.; Ryssel, H.
Conference Paper
2000On the Properties of the Intrinsic Point Defects in Silicon: A Perspective from Crystal Growth and Wafer Processing
Falster, R.; Voronkov, V.V.; Quast, F.
Journal Article
2000Struktur und Eigenschaften von Schichtsystemen für den EUV-Spektralbereich
Feigl, T.
Dissertation
2000Vacancy-Nitrogen Complexes in Float-Zone Silicon
Quast, F.; Pichler, P.; Ryssel, H.; Falster, R.
Conference Paper
1999Extraction of vacancy parameters from outdiffusion of zinc from silicon
Pichler, P.
Conference Paper
1999Oxygen distribution in silicon melt during standard Czochralski Process studied by sensor measurements and comparison to numerical simulation
Mühe, A.; Backofen, R.; Fainberg, J.; Müller, G.; Tomzig, E.; Ammon, W., von
Journal Article
1999Plasmatechnologie für die Photovoltaik
Lüdemann, R.
Dissertation
1999Study of oxygen transport in Czochralski Growth of silicon
Müller, G.; Mühe, A.; Backofen, R.; Tomzig, E.; Ammon, W., von
Journal Article
1999Wohltemperierte Siliziumscheiben - Simulation und Messung der Temperaturverteilung in einem vertikalen Schichtabscheideofen
Poscher, S.; Wellner, S.; Ryssel, H.
Journal Article
1998Atomistic analysis of the vacancy mechanism of impurity diffusion in silicon
List, S.; Ryssel, H.
Journal Article
1998Distortion of SIMS Profiles due to Ion Beam Mixing: Shallow Arsenic Implants in Silicon
Montandon, C.; Burenkov, A.; Frey, L.; Pichler, P.; Biersack, J.P.
Journal Article
1998Flexible silicon structures for a retina implant
Trieu, H.-K.; Ewe, L.; Mokwa, W.; Schwarz, M.; Hosticka, B.J.
Conference Paper
1998Influence of RTP on Vacancy Concentrations
Jacob, M.; Pichler, P.; Wohs, M.; Ryssel, H.; Falster, R.
Book Article
1998On the Asymmetrical Behavior of Transient Enhanced Diffusion in Pre-Amorphized Si Wafers
Alquier, D.; Cowern, N.E.B.; Pichler, P.; Armand, C.; Martinez, A.; Mathiot, D.; Omri, M.; Claverie, A.
Conference Paper
1998Recombination of point defects via extended defects and its influence
Stiebel, D.; Pichler, P.
Conference Paper
1998A reinterpretation of platinum-diffusion experiments
Pichler, P.
Conference Paper
1997Determination of vacancy concentrations in the bulk of silicon wafers by platinum diffusion experiments
Jacob, M.; Pichler, P.; Ryssel, H.; Falster, R.
Journal Article
1997Distortion of SIMS profiles due to ion beam mixing
Saggio, M.; Montandon, C.; Burenkov, A.; Frey, L.; Pichler, P.
Conference Paper
1997Entwicklung und Charakterisierung von CMOS-kompatiblen Mikrolampen mit Hilfe der Verfahren der Oberflächenmikromechanik
Hell, S.
Dissertation
1997Low energy implantation and transient enhanced diffusion
Cowern, N.E.B.; Collart, E.J.H.; Politiek, J.; Bancken, P.H.L.; Berkum, J.G.M. van; Kyllesbech Larsen, K.; Stolk, P.A.; Huizing, H.G.A.; Pichler, P.; Burenkov, A.; Gravensteijn, D.J.
Conference Paper
1997Observation of vacancy enhancement during rapid thermal annealing in nitrogen
Jacob, M.; Pichler, P.; Ryssel, H.; Falster, R.; Cornara, M.; Gambaro, D.; Olmo, M.; Pagani, M.
Journal Article
1997Silicon sensor systems
Hosticka, B.J.; Brockherde, W.; Hammerschmidt, D.
Journal Article
1997Untersuchung des Einflusses von Gitterleerstellen auf die Sauerstoffpräzipitation in Silicium mit Hilfe der Platindiffusion
Jacob, M.
: Ryssel, H. (Prüfer)
Dissertation
1997Vacancy-assisted oxygen precipitation phenomena in Si
Falster, R.; Pagani, M.; Gambaro, D.; Cornara, M.; Olmo, M.; Ferrero, G.; Pichler, P.; Jacob, M.
Journal Article
1996Sensors/Actuators of the functional ceramics based on Sol-Gel technique for microsystems
Grimme, R.; Otschik, P.; Gesemann, H.J.
Conference Paper
1996Untersuchungen an integrierten Dünnfilmsensorarrays zur Analyse von Gasgemischen mittels statischer und dynamischer Verfahren
Werno, J.
Dissertation
1995Determination of vacancy concentration in float zone and Czochralski silicon
Jacob, M.; Pichler, P.; Ryssel, H.; Gambaro, D.; Falster, R.
Conference Paper
1995Licht untersucht dünnste Schichten
Fanter, D.; Possart, W.; Hennemann, O.-D.
Journal Article
1995Mikrosystemtechnik. Entwicklungsstand und Marktumsetzung
Mokwa, W.
Conference Paper
1995Platinum diffusion at low temperatures
Jacob, M.; Pichler, P.; Ryssel, H.; Falster, R.
Conference Paper
1995Point defect-based modeling of diffusion and electrical activation of ion implanted boron in crystalline silicon
Jäger, H.-U.
Journal Article
1995Studies of heteroepitaxial nucleation and growth of diamond on silicon
Jiang, X.; Paul, M.; Klages, C.-P.; Jia, C.L.
Conference Paper
1995Untersuchung der SIMOX-Technologie zur Erzeugung anwendungsspezifischer SOI-Substrate
Gassel, H.
Dissertation
1995Versagensverhalten von einkristallinem Silizium an scharfen Kerben
Heinzelmann, M.
Dissertation
1994Adsorption behaviour of a prepolymer on aluminium and silicon.
Hartwig, A.; Zha, Z.; Possart, W.; Hennemann, O.-D.
Conference Paper
1994Dynamic behavior of arsenic clusters in silicon
Bauer, H.; Pichler, P.; Ryssel, H.
Conference Paper
1994Enhanced diffusion of antimony caused by phosphorus diffusion at high concentrations
Pichler, P.; Ryssel, H.; Wallmann, G.; Ploß, R.
Conference Paper
1994Kleinste mechanische Elemente für die monolithische Integration in Mikrosystemen
Mokwa, W.
Journal Article
1994Silizium - Werkstoff der Mikrosystemtechnik
Dudaicevs, H.; Mokwa, W.
Conference Paper
1994Simulation of buried layer experiments containing all four dopant species
Ghaderi, K.; Hobler, G.; Budil, M.; Pötzl, H.; Pichler, P.; Ryssel, H.; Hansch, W.; Eisele, I.; Tian, C.; Stingeder, G.
Conference Paper
1994SOI-Herstellung und Anwendung am Fraunhofer-Institut IMS Duisburg.
Gassel, H.
Conference Paper
1994Sonnenenergie: Photovoltaik
Goetzberger, A.; Voß, B.; Knobloch, J.
Book
1993Deposition and characterization of diamond epitaxial thin films on silicon substrates
Jiang, X.; Klages, C.-P.; Rösler, M.; Zachai, R.; Hartweg, M.; Füßer, H.-J.
Conference Paper
1993Dünnschicht-Solarzellen aus Galliumarsenid
Wettling, W.
Conference Paper
1993The effect of substrate bias voltage on nucleation of diamond crystals in a microwave plasma assisted CVD process
Jiang, X.; Six, R.; Zachai, R.; Hartweg, M.; Füßer, H.-J.; Klages, C.-P.
Journal Article, Conference Paper
1993An integrated sensor for invasive blood velocity measurement
Eichholz, J.; Langerbein, A.; Manoli, Y.; Mokwa, W.; Kersjes, R.A.
Conference Paper
1993A new microstructured silicon substrate for ultrathin gas-sensitive films
Schütze, A.; Weber, U.; Zacheja, J.; Kohl, D.; Mokwa, W.; Rospert, M.; Werno, J.
Conference Paper
1993Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Conference Paper
1993Silizium-Solarzellen mit höchsten Wirkungsgraden
Wettling, W.
Conference Paper
1993Simulation of high-dose ion implantation-induced transient diffusion and of electrical activation of boron in crystalline silicon
Jäger, H.-U.
Conference Paper
1993Test monolithischer Sensorsysteme
Dudaicevs, H.; Gottfried-Gottfried, R.
Journal Article
1992Gassensoren auf Siliziumbasis
Kohl, D.; Mokwa, W.
Journal Article
1992Silicon technologies for sensor fabrication
Mokwa, W.
Book Article
1984Bestimmung von mineralischen Bestandteilen in Spanplatten
Schriever, E.; Boehme, C.
Journal Article