Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1995Structural and electrical properties of thin SiO2 layers grown by RTP in a mixture of N2O and O2
Bauer, A.J.; Burte, E.P.
Journal Article
1990Laser temperature interlevel SiO2 layers by photoinduced processing
Sigmund, H.; Klumpp, A.; Springholz, G.
Conference Paper
1989Deposition of high quality SiO2 layers from TEOS by excimer laser
Klumpp, A.; Sigmund, H.
Journal Article
1989Laser-induced formation of SiO2 layers for microelectronics
Sigmund, H.
Conference Paper
1989Photoinduced transformation of polysiloxane layers by SiO2
Klumpp, A.; Sigmund, H.
Journal Article