Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1995Influence of annealing on elastic properties of LPCVD silicon nitride and LPCVD polysilicon
Maier-Schneider, D.; Ersoy, A.; Maibach, J.; Schneider, D.; Obermeier, E.
Journal Article
1991Suppression of grain boundary formation during laser recrystallization of thin Si-films using micro absorbers
Hu, B.; Wel, W. van der; Buchner, R.; Haberger, K.; Seidl, A.
Conference Paper
1988Effects of different recrystallization processes on the electrical characteristics of underlying MOS devices
Buchner, R.; Panish, P.; Haberger, K.; Seegebrecht, P.
Conference Paper
1988Fast CO2 laser recrystallization for 3D integration
Haberger, K.; Panish, P.; Buchner, R.; Steinberger, H.
Conference Paper
1988Laser recrystallization of polysilicon for improved device quality
Buchner, R.; Haberger, K.; Hu, B.
Conference Paper
1988STACHMOS - a basic 3-dimensional CMOS process
Haberger, K.; Panish, P.; Buchner, R.; Seegebrecht, P.
Conference Paper
1987High troughput CO2 laser recrystallization for 3D integrated devices
Haberger, K.; Panish, P.; Buchner, R.; Steinberger, H.
Conference Paper