Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1991Amorphous, hydrogenated carbon films and related materials - plasma deposition and film properties
Locher, R.; Sah, R.E.; Koidl, P.; Wild, C.
Book Article
1991Ion and electron dynamics in the sheath of radio-frequency glow discharges.
Koidl, P.; Wild, C.
Journal Article
1986Characterization hydrocarbon plasma used for a-C-H deposition
Bubenzer, A.; Koidl, P.; Wagner, J.; Wild, C.
Conference Paper