Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1993ECR plasma deposition of cubic nitride using n-trimethylborazine
Bringmann, U.; Nikulkski, R.; Klages, C.-P.; Weber, A.
Conference Paper
1993Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P.
Journal Article, Conference Paper
1993Growth of cubic Boron Nitride and Boron-Carbon-Nitrogen coatings using N-Trimethylborazine in an ECR plasma process
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P.
Conference Paper
1993Influence of a substrate bias on the formation of cubic boron nitride in an ECR plasma CVD process
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P.
Conference Paper
1992Plasma-deposition of BN, BCN-H and Me-BCN-H films using N-trimethylborazine -MeTi,Nb-
Weber, A.; Bringmann, U.; Klages, C.-P.; Taube, K.; Döllein, G.; Meyer, H.; Weidenbach, G.
Conference Paper