Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2006EUV multilayer optics
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Conference Paper, Journal Article
2005EUV/soft x-ray multilayer optics
Yulin, S.; Feigl, T.; Benoit, N.; Kaiser, N.
Conference Paper
2005High-temperature multilayers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.
Conference Paper
2005Interface-engineered multilayer mirrors
Yulin, S.; Bernoit, N.; Feigl, T.; Kaiser, N.
Conference Paper
2005Multilayer optics for the EUV and soft X-Rays
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Journal Article
2005Radiation stability of EUV Mo/Si multilayer mirrors
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper, Journal Article
2002Effects of high energy milling on densification behaviour of Mo-Si powder mixtures during pressureless sintering
Schubert, T.; Böhm, A.; Kieback, B.; Achtermann, M.; Scholl, R.
Journal Article
2002Modification of boundaries conditions in the FDTD algorithm for EUV masks modeling
Vial, A.; Erdmann, A.; Schmoeller, T.; Kalus, C.
Conference Paper
2001Damage resistant and low stress EUV multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N.
Conference Paper
2001Heat resistance of EUV multilayer mirrors for long-time applications
Feigl, T.; Lauth, H.; Yulin, S.; Kaiser, N.
Journal Article