Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1999Trends and solutions in microarray production
Dobler, H.; Kuhn, C.; Lindner, H.; Weimer, A.
Poster
1998A Micro-fab for the Micro-assembly of Optical Lenses
Schäfer, W.; Grimme, R.; Schlenker, D.; Stock, A.; Schünemann, M.
Conference Paper
1998Produktionstechnik für Mikrosysteme 1998
 
Conference Proceedings
1997Modularized Microelectromechanical Devices as Key Components for Advanced Intelligent Autonomous Sensors and Control Systems
Schünemann, M.; Grosser, V.; Leutenbauer, R.; Matuscheck, P.; Schäfer, W.; Reichl, H.
Conference Paper
1996Development Trends and Cleanroom Concepts in the Industrial Production of Microelectromechanical Systems
Grimme, R.; Schünemann, M.; Schließer, J.; Kaufmann, T.S.; Schäfer, W.
Conference Paper
1996Development Trends and Cleanroom Concepts in the Industrial Production of Microelectromechanical Systems
Grimme, R.; Schünemann, M.; Schließer, J.; Kaufmann, T.S.; Schäfer, W.
Conference Paper
1996Fertigungskonzepte für die industrielle Produktion von Mikrosystemen (MikroFAB)
Grimme, R.
Conference Paper
1996Microfabrication techniques for microsystems - mu m Fab - and first practical experience
Grosser, V.; Hillmann, V.; Reichl, H.; Grimme, R.
Conference Paper
1996Mikrofab - Mikrofabrikationstechniken für Mikrosysteme
Schünemann, M.; Grimme, R.; Schwaab, G.; Schäfer, W.
Conference Paper
1996Modular System for Laser Microfabrication
Grimme, R.; Hillmann, V.; Jürss, M.; Otschik, P.; Poßner, T.
Conference Paper
1996Sensors/Actuators of the functional ceramics based on Sol-Gel technique for microsystems
Grimme, R.; Otschik, P.; Gesemann, H.J.
Conference Paper
1996A Versatile Spray-Spin-Tool for Wet Chemistry Processes in a Microfabrication Line
Kluge, A.; Grimme, R.
Conference Paper