Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1996Development Trends and Cleanroom Concepts in the Industrial Production of Microelectromechanical Systems
Grimme, R.; Schünemann, M.; Schließer, J.; Kaufmann, T.S.; Schäfer, W.
Conference Paper
1996Development Trends and Cleanroom Concepts in the Industrial Production of Microelectromechanical Systems
Grimme, R.; Schünemann, M.; Schließer, J.; Kaufmann, T.S.; Schäfer, W.
Conference Paper
1996Microfabrication techniques for microsystems - mu m Fab - and first practical experience
Grosser, V.; Hillmann, V.; Reichl, H.; Grimme, R.
Conference Paper
1996Modular System for Laser Microfabrication
Grimme, R.; Hillmann, V.; Jürss, M.; Otschik, P.; Poßner, T.
Conference Paper
1996Sensors/Actuators of the functional ceramics based on Sol-Gel technique for microsystems
Grimme, R.; Otschik, P.; Gesemann, H.J.
Conference Paper
1995Development Trends in the Industrial Production of Microsystems
Schäfer, W.; Schuenemann, M.; Grimme, R.; Grosser, V.
Conference Paper