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| 2021 | Investigation of the Mechanical Loading Capacity of a MEMS Actuator
Zhou, Doris
: Wackerle, Martin; Irlinger, Franz; Richter, Martin | Master Thesis |
| 2020 | Ceramic microhotplates for low power metal oxide gas sensors
Samotaev, Nikolay; Oblov, Konstantin; Gorshkova, Anastasiya; Fritsch, Marco; Mosch, Sindy; Vinnichenko, Mykola; Trofimenko, Nikolai; Kusnezoff, Mihails; Fuchs, Franz-Marin; Wissmeier, Lena | Journal Article |
| 2020 | Cross-Linked Gold Nanoparticle Composite Membranes as Highly Sensitive Pressure Sensors
Schlicke, Hendrik; Kunze, Svenja; Rebber, Matthias; Schulz, Norbert; Riekeberg, Svenja; Trieu, Hoc Khiem; Vossmeyer, Tobias | Journal Article |
| 2020 | Development of a Shape Memory Alloy Actuator for a Micromechanical Sterilisation Cycle Counter
Pagel, Kenny; Esch, Jonas; Hoffmann, Daniel; Trautner, Heiko; Herrlich, Simon; Spieth, Sven; Drossel, Welf-Guntram | Presentation |
| 2020 | Herstellung und Charakterisierung eines elektrostatischen Antriebs für MEMS-Mikropumpen
Anheuer, Daniel | Master Thesis |
| 2020 | MEMS based speakers - sounds good?!
Beer, Daniel; Küller, Jan; Zhykhar, Albert; Fritsch, Tobias; Männchen, Andreas; Strehle, Steffen; Knechtel, Roy; Bös, Joachim | Conference Paper |
| 2020 | Micro PA detector: Pushing the limits of mid IR photoacoustic spectroscopy integrated on silicon
Coutard, Jean-Guillaume; Berthelot, Audrey; Glière, Alain; Lhermet, Hélène; Scherer, Benjamin; Strahl, Thomas; Teulle, Alexandre; Verdot, Thierry | Conference Paper |
| 2020 | Smart Technologies for Indoor Environmental Quality Control
Ortiz Pérez, Alvaro
: Wöllenstein, Jürgen (Erstgutachter); Reindl, Leonhard M. (Zweitgutachter) | Dissertation |
| 2019 | CMUT with mechanically coupled plate actuators for low frequencies
Krenkel, Marcel; Stolz, Michael; Koch, Sandro G.; Kupnik, Mario | Journal Article |
| 2019 | Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger | Conference Paper |
| 2019 | Hermetisches Fügen von MEMS-basierten Bauelementen mithilfe reaktiver Multischichtsysteme (RMS)
Pflug, Erik; Dietrich, Georg; Leson, Andreas; Schumacher, Axel; Knappmann, Stephan; Dehe, Alfons | Journal Article |
| 2018 | Entwurf und Aufbau eines robusten Gassensorsystems für Biogasanlagen
Bierer, Benedikt
: Wöllenstein, Jürgen (Erstgutachter); Reindl, Leonhard M. (Zweitgutachter) | Dissertation |
| 2018 | FO-WLP multi-DOF inertial sensor for automotive applications
Kuisma, Heikki; Cardoso, Andre; Mäntyoja, Nikolai; Rosenkrantz, Rüdiger; Nurmi, Sami; Gall, Martin | Conference Paper |
| 2018 | A high-precision and high-bandwidth MEMS-based capacitive accelerometer
Utz, Alexander; Walk, Christian; Stanitzki, Alexander; Mokhtari, Mir; Kraft, Michael; Kokozinski, Rainer | Journal Article |
| 2018 | Implantable multi-sensor system for hemodynamic controlling
Weidenmüller, Jens; Dogan, Özgü; Stanitzki, Alexander; Baum, Mario; Schröder, Tim; Wünsch, Dirk; Görtz, Michael; Grabmaier, Anton | Journal Article |
| 2017 | Development of a patterning process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Vidovic, Nino; Görtz, Michael; Vogt, Holger | Conference Paper |
| 2017 | A high precision MEMS based capacitive accelerometer for seismic measurements
Utz, Alexander; Walk, Christian; Stanitzki, Alexander; Mokhtari, Mir; Kraft, Michael; Kokozinski, Rainer | Conference Paper |
| 2017 | Implantable hemodynamic controlling system with a highly miniaturized two axis acceleration sensor
Baum, Mario; Wünsch, Dirk; Hiller, Karla; Forke, Roman; Schröder, Tim; Weidlich, Sebastian; Hahn, Susann; Reuter, Danny; Wiemer, Maik; Weidenmüller, Jens; Dogan, Özgü; Görtz, Michael; Otto, Thomas | Conference Paper |
| 2017 | Implantable multi sensor system for hemodynamic controlling
Weidenmüller, Jens; Dogan, Özgü; Stanitzki, Alexander; Baum, Mario; Schröder, Tim; Wünsch, Dirk; Görtz, Michael; Grabmaier, Anton | Conference Paper |
| 2017 | Layer by layer deposition of colloidal SnO2 nano particles
Gao, Haitao; Lyu, Xuemeng; Wöllenstein, Jürgen; Palzer, Stefan | Journal Article |
| 2017 | Nanodiamond resonators fabricated on 8'' Si substrates using adhesive wafer bonding
Lebedev, Vadim; Lisec, Thomas; Yoshikawa, Taro; Reusch, Markus; Iankov, Dimitre; Giese, Christian; Zukauskaite, Agne; Cimalla, Volker; Ambacher, Oliver | Journal Article |
| 2017 | A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger | Conference Paper |
| 2017 | An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 µm CMOS
Utz, Alexander; Walk, Christian; Haas, Norbert; Fedtschenko, Tatjana; Stanitzki, Alexander; Mokhtari, Mehran; Görtz, Michael; Kraft, Michael; Kokozinski, Rainer | Journal Article |
| 2016 | Ceramic substrate technology for wafer level packaging of MEMS
Ziesche, Steffen; Ihle, Martin; Gabler, Felix; Roscher, Frank | Conference Paper |
| 2016 | Development of a low temperature SiC protection layer for post-CMOS MEMS fabrication utilizing vapour release technologies
Walk, Christian; Chen, Yizhou; Vidovic, Nino; Kuhl, Andreas; Görtz, Michael; Vogt, H. | Conference Paper |
| 2016 | Entwicklung eines piezoresistiven Drucksensors für Hochtemperaturanwendungen auf Basis eines SOI-Substrats
Goehlich, Andreas; Jupe, Andreas; Stühlmeyer, Martin; Celik, Yusuf; Schmidt, Andrei; Vogt, Holger | Conference Paper |
| 2016 | HOT-300 - a multidisciplinary technology approach targeting microelectronic systems at 300 °C operating temperature
Vogt, Holger; Altmann, Frank; Braun, Sebastian; Celik, Yusuf; Dietrich, Lothar; Dietz, Dorothee; Dijk, Marius van; Dreiner, Stefan; Döring, Ralf; Gabler, Felix; Goehlich, Andreas; Hutter, Matthias; Ihle, Martin; Kappert, Holger; Kordas, Norbert; Kokozinski, Rainer; Naumann, Falk; Nowak, Torsten; Oppermann, Hermann; Partsch, Uwe; Petzold, Matthias; Roscher, Frank; Rzepka, Sven; Schubert, Ralph; Weber, Constanze; Wiemer, Maik; Wittler, Olaf; Ziesche, Steffen | Conference Paper |
| 2016 | Materials and technologies to enable high temperature stable MEMS and electronics for smart systems used in harsh environments
Gabler, Felix; Roscher, Frank; Döring, Ralf; Otto, Alexander; Ziesche, Steffen; Ihle, Martin; Celik, Yusuf; Dietz, Dorothee; Goehlich, Andreas; Kappert, Holger; Vogt, Holger; Naumann, Falk; Geßner, Thomas | Conference Paper |
| 2016 | Systematik eines Beschleunigungssensor-Designkonzepts auf MEMS-Basis
Külls, R.
: Hiermaier, Stefan (Hrsg.); Thoma, K. | Dissertation |
| 2015 | DTIP 2015, 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
: Benoit, Charlot; Mita, Yoshio; Nouet, Pascal; Pressecq, Francis; Schröpfer, Gerold; Rencz, Marta; Schneider, Peter | Conference Proceedings |
| 2014 | CMOS integrated biosensor for the detection of biomarkers
Burmester, Kim; Goehlich, Andreas; Celik, Yusuf; Manova, Radostina K.; Scheres, Luc; Roeven, Esther; Trilling, Anke; Schmidt, Andreas; Hutten, Ulrike; Neureiter, Katrin; Pierrat, Sebastien; Beek, Teris A. van; Vogt, Holger | Journal Article |
| 2014 | Design of a MEMS-based retina scanning system for biometric authentication
Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Schelinski, Uwe; Grüger, Heinrich | Conference Paper |
| 2014 | Development of an implantable integrated MEMS pressure sensor using polyimide epoxy composite and Atomic Layer Deposition for encapsulation
Gembaczka, Pierre; Görtz, Michael; Kraft, Michael | Journal Article |
| 2014 | Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
Gembaczka, Pierre; Görtz, Michael; Celik, Yusuf; Jupe, Andreas; Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger; Mokwa, Wilfried; Kraft, Michael | Journal Article |
| 2014 | Implantable sensor to measure liquor pressure of a ventricular drainage system
Görtz, Michael; Bögel, G. vom; Gembaczka, Pierre; Kraft, Michael | Journal Article |
| 2014 | Large field of view MEMS-based confocal laser scanning microscope for fluorescence imaging
Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert | Journal Article |
| 2014 | MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring
Hintschich, Susanne; Pügner, Tino; Knobbe, Jens; Schröder, Julia; Reinig, Peter; Grüger, Heinrich; Schenk, Harald | Conference Paper |
| 2014 | Nano-diamond based spheres for radio frequency electromechanical resonators
Lebedev, V.; Iankov, D.; Heidrich, N.; Zürbig, V.; Wild, C.; Cimalla, V.; Ambacher, O. | Journal Article |
| 2014 | Eine offene Telemetrieplattform für implantierbare Medizintechnik
Wallrodt, M.; Harnack, M.; Görtz, Michael; Fischer, R.; Mokwa, Wilfried; Biela, S.; Pfennig, M.; Schmitz-Rode, Thomas | Journal Article |
| 2014 | PECVD of poly-SiGe/Ge layers with increased total gas flow
Wang, Qiang; Goehlich, Andreas; Ruß, Marco; Yang, Pin; Vogt, Holger | Journal Article |
| 2014 | Processing of nanoscale gaps for boron-doped nanocrystalline diamond based MEMS
Iankov, D.; Zürbig, V.; Pletschen, W.; Giese, C.; Iannucci, R.; Ambacher, O.; Lebedev, V. | Journal Article |
| 2013 | Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever
Wasisto, H.S.; Merzsch, S.; Waag, A.; Uhde, E.; Salthammer, T.; Peiner, E. | Journal Article |
| 2013 | CMOS integrated free standing circular membrane for the detection of allergens and biomarkers
Burmester, Kim; Goehlich, Andreas; Celik, Yusuf; Schmidt, Alexander; Klieber, Robert; Haas, Norbert; Greifendorf, Dieter; Vogt, Holger | Conference Paper |
| 2013 | Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations
Heidrich, N.; Knöbber, F.; Polyakov, V.M.; Cimalla, V.; Pletschen, W.; Sah, R.E.; Kirste, L.; Leopold, S.; Hampl, S.; Ambacher, O.; Lebedev, V. | Journal Article |
| 2013 | Development of an universial allergen sensor system
Goehlich, Andreas; Burmester, Kim; Celik, Yusuf; Klieber, Robert; Greifendorf, Dieter; Haas, Norbert; Vogt, Holger | Conference Paper |
| 2013 | Innovative approach to high stroke electrostatic actuators
Lange, Nicolas; Wippermann, Frank; Beckert, Erik; Eberhardt, Ramona; Tünnermann, Andreas | Conference Paper |
| 2013 | Nano-diamond vacuum MEMS for RF applications
Heidrich, N.; Hees, J.; Zürbig, V.; Iankov, D.; Pletschen, W.; Sah, R.E.; Raynor, B.; Kirste, L.; Nebel, C.E.; Ambacher, O.; Lebedev, V. | Conference Paper |
| 2013 | Reliable wafer-level-bonding method for MEMS packaging using LTCC interposers
Ihle, Martin; Ziesche, Steffen; Roscher, Frank; Capraro, Beate; Partsch, Uwe | Conference Paper |
| 2012 | Application of an abrasive-free Cu slurry for MEMS devices
Steible, B.; Stoldt, M.; Tack, M.; Zwicker, G. | Conference Paper |
| 2012 | In-plane polarized PZT thick film actuators by screen printing technology
Ernst, D.; Bramlage, B.; Gebhardt, S. | Conference Paper |
| 2012 | Microelectromechanical implants: Encapsulation concepts and test procedures
Betz, Wolfgang; Trieu, Hoc-Khiem; Vogt, Holger | Conference Paper |
| 2012 | Realization of a hybrid-integrated MEMS scanning grating spectrometer
Pügner, Tino; Knobbe, Jens; Grüger, Heinrich; Schenk, Harald | Conference Paper |
| 2011 | Evaluierung elastischer Eigenschaften von Mikro- und Nanostrukturen
Röhlig, C.-C.
: Ambacher, O. (Prüfer) | Dissertation |
| 2011 | Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications
Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Foerster, C.; Cimalla, V.; Stephan, R.; Pezoldt, J.; Stauden, T.; Ambacher, O.; Hein, M.A. | Journal Article |
| 2010 | Development and characterisation of a miniaturized laser projection display based on MEMS-scanning-mirrors
Heger, A.; Schreiber, P.; Höfer, B. | Conference Paper |
| 2010 | Embossing of double-sided micro lens arrays in optical glass
Schubert, A.; Edelmann, J.; Burkhardt, T. | Conference Paper |
| 2010 | Integrated actuators based on PZT thick films for microsystems applications
Gebhardt, S.; Schönecker, A.; Bruchmann, C. | Conference Paper |
| 2010 | Integrated MEMS solutions for biomedical applications
Trieu, H.-K. | Conference Paper |
| 2010 | Integrated micro and nanosystem solutions - potential for micro implants in diagnostics and therapy
Trieu, H.-K. | Conference Paper |
| 2010 | MEMS-based thermal emitters and beyond
Hildenbrand, Jürgen
: Wöllenstein, Jürgen (Erstgutachter); Korvink, Jan Gerrit (Zweitgutachter) | Dissertation |
| 2010 | Micro structuring of inorganic glass by hot embossing of coated glass wafers
Edelmann, J.; Worsch, C.; Schubert, A.; Rüssel, C. | Journal Article |
| 2010 | Micromachined mid-infrared emitter for fast transient temperature operation for optical gas sensing systems
Hildenbrand, J.; Korvink, J.; Wollenstein, J.; Peter, C.; Kurzinger, A.; Naumann, F.; Ebert, M.; Lamprecht, F. | Journal Article |
| 2010 | A new DC-temperature model for a diode bolometer based on SOI-pin-diode test structures
Kropelnicki, P.; Vogt, H. | Conference Paper |
| 2010 | Piezoelectric actuated epitaxially grown AlGaN/GaN-resonators
Niebelschütz, F.; Brueckner, K.; Tonisch, K.; Stephan, R.; Cimalla, V.; Ambacher, O.; Hein, M.A. | Journal Article |
| 2010 | SiCer - ein innovativer Substratwerkstoff für MEMS
Pawlowski, Beate; Schabbel, Dirk; Barth, Stefan; Fischer, Michael; Bartsch, Heike; Hoffmann, Martin; Müller, Jens | Journal Article |
| 2009 | Assembly of pressure sensor chips as an example for integrated MEMS for high temperature applications
Klieber, R.; Goehlich, A.; Trieu, H.-K.; Kappert, H.; Grabmaier, A. | Conference Paper |
| 2009 | Biomonitoring
Kernchen, R. | Journal Article |
| 2009 | CMOS Post-Processing für kompakte, intelligente Mikrosysteme
Vogt, H. | Conference Paper |
| 2009 | Doppelseitiges Heißprägen von Mikrolinsenarrays
Neugebauer, Reimund; Edelmann, J. | Book Article |
| 2009 | Fast transient temperature operating micromachined emitter for mid-infrared for optical gas sensing systems
Hildenbrand, J.; Peter, C.; Lamprecht, F.; Kürzinger, A.; Naumann, F.; Ebert, M.; Wehrspohn, R.; Wöllenstein, J. | Conference Paper |
| 2009 | Heissgeprägte Glaswafer für Mikrosystemtechnikanwendungen
Schubert, A.; Edelmann, J.; Burkhardt, T. | Conference Paper |
| 2009 | High-temperature SOI CMOS compatible MEMS pressure sensors
Lerch, Renee G.; Kordas, Norbert; Klieber, Robert; Kokozinski, Rainer | Conference Paper |
| 2009 | Isothermes Heißprägen von beschichteten Glaswafern
Worsch, C.; Rüssel, C.; Edelmann, J.; Schubert, A. | Journal Article |
| 2009 | LabOnFoil: Laboratory skin patches and SmartCards based on OLED-on-CMOS and MEMS components
Scholles, M.; Doyle, H.; Merveilles, C.; Ruano-Lopez, J.; Vogel, U. | Conference Paper |
| 2009 | Mikrostrukturierung von Glas durch Heißprägen von beschichteten Glaswafern
Edelmann, J.; Worsch, C. | Report |
| 2009 | Mikrostrukturierung von Glas durch Heißprägen von beschichteten Glaswafern
Neugebauer, Reimund; Rüssel, C.; Edelmann, J. | Book Article |
| 2009 | Mikrosystemtechnik
Weimert, B. | Journal Article |
| 2009 | Nanocrystalline diamond microelectromechanical resonators
Sillero, E.; Williams, O.A.; Lebedev, V.; Cimalla, V.; Röhlig, C.-C.; Nebel, C.E.; Calle, F. | Conference Paper |
| 2009 | Resonant piezoelectric ALGAN/GAN mems sensors in longitudinal mode operation
Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Stephan, R.; Cimalla, V.; Ambacher, O.; Hein, M.A. | Conference Paper |
| 2009 | StairMaster: Ein neues Gerät zur online Erkennung von Stürzen
Lüder, Marian; Salomon, Ralf; Bieber, Gerald | Conference Paper |
| 2009 | Sturzerkennung mittels Luftdruck- und Beschleunigungssensorik Air Pressure- and Acceleration-Based Fall Detector
Lüder, Marian; Bieber, Gerald; Salomon, Ralf | Conference Paper |
| 2009 | Tensile testing of individual ultrathin electrospun poly(L-lactic acid) fibers
Jaeger, D.; Schischka, J.; Bagdahn, J.; Jaeger, R. | Journal Article |
| 2009 | Thermal and mechanical design optimisation of a micro machined mid-infrared emitter for optical gas sensing systems
Naumann, F.; Ebert, M.; Hildenbrand, J.; Moretton, E.; Peter, C.; Wöllenstein, J. | Conference Paper |
| 2009 | Werkstofftrends: Werkstoffe der Mikrosystemtechnik
Weimert, B.; Reschke, S.; Kohlhoff, J.; Grüne, M. | Journal Article |
| 2008 | Beschichtungsstrategie für die Heißformgebung von Glas
Edelmann, J.; Schubert, A.; Rüssel, C.; Worsch, C. | Journal Article |
| 2008 | Fluidische Mikroreaktionssysteme - Fertigungstechnik für Prototypen und Serien aus Kunststoffen und Gläsern
Edelmann, J.; Eckert, U.; Burkhardt, T. | Conference Paper |
| 2008 | Method for the compensation of process-immanent form deviation in hot embossing of glass
Schubert, A.; Edelmann, J. | Conference Paper |
| 2008 | Mikrostrukturierung von Glas durch Heißprägen von beschichteten Glaswafern
Neugebauer, Reimund; Edelmann, J.; Rüssel, C. | Book Article |
| 2008 | Schichtstabilität und Duktilität bei der Mikrostrukturierung technischer Gläser im Heißformgebungsprozess
Fritzsch, M. | Dissertation |
| 2008 | Stress-driven oxidation chemistry of wet silicon surfaces
Colombi Ciacchi, L.; Cole, D.J.; Payne, M.C.; Gumbsch, P. | Journal Article |
| 2007 | DAVID - A strategic research project for chip-scale MEMS/ASIC co-integration
Marenco, N.; Reinert, W.; Warnat, S. | Conference Paper |
| 2007 | Development of a piezoelectric lead titanate thin film process on silicon substrates by high rate gas flow sputtering
Jacobsen, H.; Jung, T.; Ortner, K.; Schiffmann, K.I.; Quenzer, H.-J.; Wagner, B. | Journal Article |
| 2007 | Fracture strength of SOI springs in MEMS micromirrors
Hsu, S.-T.; Wolter, A.; Owe, W.-D.; Schenk, H. | Conference Paper |
| 2007 | The geometric design of microbolometer elements for uncooled focal plane arrays
Ruß, M.; Bauer, J.; Vogt, H. | Conference Paper |
| 2007 | Konzeptionelle Untersuchungen eines elektrothermisch auslenkbaren mikromechanischen Membranspiegels zur aktiven Fokusvariation
Conrad, H.
: Wächter, F.; Sandner, T. | Master Thesis |
| 2007 | Measurement of dynamic properties of MEMS and the possibilities of parameter identification by simulation
Ebert, M.; Naumann, F.; Gerbach, R.; Bagdahn, J. | Conference Paper |
| 2007 | Mikrosystemtechnisch hergestellte Fabry-Pérot-Interferenzdisplays mit hydrophobisierten Bildpunktmembranen
Knieling, T. | Dissertation |
| 2007 | A new micro laser camera
Drabe, C.; James, R.; Klose, T.; Wolter, A.; Schenk, H.; Lakner, H. | Conference Paper |
| 2007 | Preiswerter mikromechanischer RF-Schalter im hermetisch dichten Gehäuse
Lisec, T. | Journal Article |
| 2007 | Surface technology with cold microplasmas
Klages, C.-P.; Hinze, A.; Lachmann, K.; Berger, C.; Borris, J.; Eichler, M.; Hausen, M. von; Zänker, A.; Thomas, M. | Conference Paper |
| 2007 | Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors
Scholles, M.; Bräuer, A.; Frommhagen, K.; Gerwig, C.; Lakner, H.; Schenk, H.; Schwarzenberger, M. | Conference Paper |
| 2006 | 3D-PCB-Packages mit Wasserkühlung für High-Power-Anwendungen
Schindler-Saefkow, F.; Schramm, H.; Schacht, R.; Wunderle, B.; Michel, B. | Conference Paper |
| 2006 | Drop simulation and stress analysis of MEMS devices
Hauck, T.; Li, G.; McNeill, A.; Knoll, H.; Ebert, M.; Bagdahn, J. | Conference Paper |
| 2006 | Extended damping model for out-of-plane-comb driven micromirrors
Klose, T.; Sandner, T.; Schenk, H.; Lakner, H. | Conference Paper |
| 2006 | Influence of the frequency on fatigue of directly wafer-bonded silicon
Bagdahn, J.; Bernasch, M.; Petzold, M. | Journal Article |
| 2006 | Numerical identification of geometric parameters from dynamic measurement of grinded membranes on wafer level
Ebert, M.; Gerbach, R.; Bagdahn, J.; Michael, S.; Hering, S. | Conference Paper |
| 2006 | Scanning 2D micromirror with enhanced flatness at high frequency
Wolter, A.; Klose, T.; Hsu, S.; Schenk, H.; Lakner, H. | Conference Paper |
| 2006 | Strength characterization of directly bonded silicon
Wiemer, M.; Fischer, C.; Bernasch, M.; Bagdahn, J. | Conference Paper |
| 2005 | Angle-controlled assembly of inclination sensors
Schubert, A.; Koriath, H.-J.; Böttcher, R. | Conference Paper |
| 2005 | High resolution acoustical methods: Micro- and nano-materials applications
Meyendorf, N. | Conference Paper |
| 2005 | Mechanical reliability of directly bonded silicon MEMS components
Bagdahn, J.; Wiemer, M.; Petzold, M. | Conference Paper |
| 2005 | Miniaturized optical module for projection of arbitrary images based on two-dimensional resonant micro scanning mirrors
Scholles, M.; Bräuer, A.; Frommhagen, K.; Gerwig, C.; Höfer, B.; Jung, E.; Lakner, H.; Schenk, H.; Schneider, B.; Schreiber, P.; Wolter, A. | Conference Paper |
| 2005 | NON-destructive strength testing of anodic bonded glass-silicon wafer compounds
Knechtel, R.; Knaup, M.; Bagdahn, J.; Wiemer, M. | Conference Paper |
| 2005 | Novel 3D-scanner based on electrostatically driven resonant micromirrors
Schelinski, U.; Gerwig, C.; Neumann, H.; Dallmann, H.-G.; Kleinmann, L.; Nauber, P.; Wolter, A.; Bergmann, A.; Scholles, M. | Conference Paper |
| 2005 | Stress optimization of a micromechanical torsional spring
Klose, T.; Kunze, D.; Sandner, T.; Schenk, H.; Lakner, H.; Schneider, A.; Schneider, P. | Conference Paper |
| 2005 | Studies on three-dimensional moulding, bonding and assembling of low-temperature-cofired ceramics for MEMS and MST applications
Khanna, P.K.; Hornbostel, B.; Burgard, M.; Schäfer, W.; Dorner, J. | Journal Article |
| 2005 | Von MEMS und Motes - Ein Blick in die (mögliche) Zukunft des Bauwerk-Monitorings mit Hilfe intelligenter Sensornetzwerke
Schubert, F.; Große, C.; Krüger, M.; Frankenstein, B.; Hentschel, D.; Uddin, F. | Conference Paper |
| 2004 | Accelerometer by means of a resonant micro actuator
Drabe, C.; Schenk, H.; Roscher, K.-U.; Kunze, D.; Lakner, H. | Conference Paper |
| 2004 | Bulk micro machined quasistatic torsional micro mirror
Kiessling, T.; Wolter, A.; Schenk, H.; Lakner, H. | Conference Paper |
| 2004 | Bulk micro machined quasistatic torsional micro mirror
Kiessling, T.; Wolter, A.; Schenk, H.; Lakner, H. | Conference Paper |
| 2004 | Determination of residual stress in glass frit bonded MEMS by finite element analysis
Ebert, M.; Bagdahn, J. | Conference Paper |
| 2004 | Development of a NIR micro spectrometer based on a MOEMS scanning grating
Zimmer, F.; Grüger, H.; Heberer, A.; Wolter, A.; Schenk, H. | Conference Paper |
| 2004 | Fabrication end-test of the micro scanning mirror
Wolter, A.; Gaumont, E.; Korth, H.; Schenk, H.; Lakner, H. | Conference Paper |
| 2004 | Low-cost projection device with a 2D resonant microscanning mirror
Roscher, K.-U.; Grätz, H.; Schenk, H.; Wolter, A.; Lakner, H. | Conference Paper |
| 2004 | MEMS and microsystems based on low-temperature cofired ceramics: A cost analysis
Khanna, P.K.; Hornbostel, B.; Jäger, T.; Schäfer, W. | Journal Article |
| 2004 | Mikro-Brennstoffzellen
Neupert, U. | Journal Article |
| 2004 | Miniature pressure sensor and micromachined actuator structure based on low-temperature-cofired ceramics and piezoelectric material
Khanna, P.K.; Hornbostel, B.; Grimme, R.; Schäfer, W.; Dorner, J. | Journal Article |
| 2004 | Nano-scratch testing on thin diamond-like carbon coatings for microactuators: Friction, wear and elastic-plastic deformation
Küster, R.; Schiffmann, K.I. | Journal Article |
| 2004 | Photonic microsystems: An enabling technology for light deflection and modulation
Schenk, H.; Wolter, A.; Dauderstädt, U.; Gehner, A.; Grüger, H.; Drabe, C.; Lakner, H. | Conference Paper |
| 2004 | Strength and reliability properties of glass frit bondet micro packages
Glien, K.; Graf, J.; Müller-Fiedler, R.; Höfer, H.; Ebert, M.; Bagdahn, J. | Conference Paper |
| 2004 | Torsional stress, fatigue and fracture strength in silicon hinges of a micro scanning mirror
Wolter, A.; Schenk, H.; Korth, H.; Lakner, H. | Conference Paper |
| 2003 | Driver ASIC for synchronized excitation of resonant micro-mirrors
Roscher, K.-U.; Fakesch, U.; Schenk, H.; Lakner, H.; Schlebusch, D. | Conference Paper |
| 2003 | Improved layout for a resonant 2D micro scanning mirror with low operation voltages
Wolter, A.; Schenk, H.; Gaumont, E.; Lakner, H. | Conference Paper |
| 2003 | Kohärente Layoutsynthese und Modellbildung von skalierbaren mikroelektromechanischen Strukturen
Voßkämper, L.M. | Dissertation |
| 2003 | Performance and applications of a spectrometer with micromachined scanning grating
Grüger, H.; Wolter, A.; Schuster, T.; Schenk, H.; Lakner, H. | Conference Paper |
| 2002 | Micro Materials Center Berlin: Reliability research for MEMS
Michel, B.; Winkler, T. | Conference Paper |
| 2002 | Micro/nanoDAC deformation measurement to analyze packaging components response to thermo-mechanical load
Vogel, D.; Gollhardt, A.; Michel, B. | Conference Paper |
| 2002 | A modular approach for simulation-based optimization of MEMS
Schneider, P.; Schneider, A.; Schwarz, P. | Journal Article |
| 2002 | MOSCITO - a program system for MEMS optimization
Schneider, P.; Schneider, A.; Bastian, J.; Reitz, S.; Schwarz, P. | Conference Paper |
| 2002 | Strength and long-term reliability testing of wafer-bonded MEMS
Petzold, M.; Katzer, D.; Wiemer, M.; Bagdahn, J. | Conference Paper |
| 2001 | Design optimization of an electrostatically driven Micro Scanning Mirror
Schenk, H.; Wolter, A.; Lakner, H. | Conference Paper |
| 2001 | A tool-box approach to the simulation of multi-physics systems
Schwarz, P. | Conference Paper |
| 2001 | Ultra precision manufacturing of self-assembled micro systems
Sharon, A.; Bilsing, A.; Lewis, G. | Conference Paper |
| 2001 | Untersuchungen zu einem hochauflösenden Flächenlichtmodulator mit einstellbarem Profil einer Flüssigkeitsoberfläche zur optischen Musterwiedergabe
Wolter, A. | Dissertation |
| 2000 | CO2-Verfahren zur Konditionierung nichtmetallischer Grenzflächen
Werner, D.; Zorn, C. | Conference Paper |
| 2000 | From Modular MEMS to a Modular Microfactory - the Hybrid Microfactory?
Großer, V.; Michel, B.; Schünemann, M.; Reichl, H. | Conference Paper |
| 2000 | Mechatronische Produkte und Komponenten
Wittenstein, M.; Schünemann, M. | Conference Paper |
| 2000 | MEMS Modular Packaging and Interfaces
Schünemann, M.; Jam, A.K.; Großer, V.; Leutenbauer, R.; Bauer, G.; Schäfer, W.; Reichl, H. | Conference Paper |
| 2000 | MicroScan: a DMD based optical surface profiler
Bitte, F.; Dussler, G.; Pfeifer, T.; Frankowski, G. | Conference Paper |
| 2000 | Modularized Microelectromechanical Systems
Bauer, G.; Schünemann, M.; Schäfer, W.; Großer, V.; Leutenbauer, R. | Conference Paper |
| 1999 | The Economic Potential of Miniaturization from the Industrial Viewpoint
Schünemann, M.; Hüntrup, V.; Bierhals, R. | Journal Article |
| 1999 | A highly flexible design and production framework for modularized microelectromechanical systems
Schünemann, M.; Grosser, V.; Leutenbauer, R.; Bauer, G.; Schäfer, W.; Reichl, H. | Journal Article |
| 1999 | Micromirror spatial light modulators
Dürr, P.; Gehner, A.; Dauderstädt, U.A. | Conference Paper |
| 1999 | Micromirrors for direct writing systems and scanners
Lakner, H.; Doleschal, W.; Dürr, P.; Gehner, A.; Schenk, H.; Wolter, A.; Zimmer, G. | Conference Paper |
| 1999 | Modulare Mikrosysteme für den Maschinen- und Anlagenbau
Schünemann, M.; Bauer, G.; Großer, V.; Dorner, J. | Journal Article |
| 1999 | Wirtschaftliche Potentiale der Miniaturisierung
Weule, H.; Hüntrup, V.; Thies, U.; Schünemann, M.; Bierhals, R. | Journal Article |
| 1998 | Baukastensystem Mikrosystemtechnik
Schünemann, M.; Bauer, G.; Schäfer, W.; Reichl, H.; Großer, V.; Leutenbauer, R. | Journal Article |
| 1998 | Cleaning with Carbon Dioxide Snow Inspection of a Cleaning Method
Westkämper, E.; Schüle, A.; Werner, D. | Conference Paper |
| 1998 | A highly flexible design and production framework for modularized microelectromechanical systems
Schünemann, M.; Grosser, V.; Leutenbauer, R.; Bauer, G.; Schäfer, W.; Reichl, H. | Conference Paper |
| 1998 | Local laser supported cleaning of microelectromechanical systems and components
Schwaab, G.; Grimme, R.; Schäfer, W. | Conference Paper |
| 1998 | Local laser supported cleaning of microelectromechanical systems and components
Schwaab, G.; Grimme, R.; Rockowicz, M.; Schäfer, W. | Conference Paper |
| 1998 | Modularization of Microsystems and Standardization of Interfaces
Schünemann, M.; Bauer, G.; Schäfer, W.; Leutenbauer, R.; Grosser, V.; Reichl, H. | Conference Paper |
| 1998 | Wafer bonding with an adhesive coating
Klink, G.; Hillerich, B. | Conference Paper |
| 1997 | Modular magazine for the suitable handling of microparts in industry
Grimme, R.; Schmutz, W.; Schlenker, D.; Schünemann, M.; Stock, A.; Schäfer, W. | Conference Paper |
| 1997 | Modularized Microelectromechanical Devices as Key Components for Advanced Intelligent Autonomous Sensors and Control Systems
Schünemann, M.; Grosser, V.; Leutenbauer, R.; Matuscheck, P.; Schäfer, W.; Reichl, H. | Conference Paper |
| 1996 | Adhesive Gripper - a New Tool for Microassembly
Bark, C.; Vögele, G.; Weisener, T. | Conference Paper |
| 1994 | Mikroelektronik, eine Schlüsseltechnologie im Umweltschutz
Angerer, G. | Book Article |
| 1990 | An electrodynamic injection pump - a novel actuator for microsystem technology
Plettner, A.; Richter, A.; Sandmaier, H. | Conference Paper |
| 1990 | Elektrohydrodynamische Mikropumpe für elektromechanische Systeme
Richter, A. | Conference Paper |