Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Characterization of edge effects in precision low-coherence interferometry using broadband light sources
Taudt, Christopher; Baselt, Tobias; Nelsen, Bryan L.; Aßmann, Heiko; Greiner, Andreas; Koch, Edmund; Hartmann, Peter
Conference Paper
2017High-resolution, high-speed inline optical topography measurement system for laser micro-machining process control
Folkersma, K.G.P.; Woldering, L.A.; Voss, K.H.J.; Pohl, R.; Resink, S.G.; Kunze, Rouwen; Schmitt, Robert; Klein, M.E.; Borreman, A.; de Hoon, C.J.A.
Conference Paper
2016Measurement of surface topographies in the nm-range for power chip technologies by a modified low-coherence interferometer
Taudt, Christopher; Baselt, Tobias; Nelsen, Bryan L.; Aßmann, Heiko; Greiner, Andreas; Koch, Edmund; Hartmann, Paul
Conference Paper
2016Two-dimensional low-coherence interferometry for the characterization of nanometer-wafer-topographies
Taudt, Christopher; Baselt, Tobias; Nelsen, Bryan; Aßmann, Heiko; Greiner, Andreas; Koch, Edmund; Hartmann, Peter
Conference Paper
2010Next-generation test equipment for micro-production
Zeitner, U.; Dannberg, P. et al.
Conference Paper
2009Highly accurate distance measurements with a fiber-optical interferometer
Depiereux, F.; König, N.; Lehmann, P.; Pfeifer, T.; Schmitt, R.
Book Article