Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 1989 | Status and progress of 3-D IC technology in Europe
Joly, J.P.; Maes, H.; Seegebrecht, P. | Conference Paper |
| 1988 | Effects of different recrystallization processes on the electrical characteristics of underlying MOS devices
Buchner, R.; Panish, P.; Haberger, K.; Seegebrecht, P. | Conference Paper |
| 1988 | Fast CO2 laser recrystallization for 3D integration
Haberger, K.; Panish, P.; Buchner, R.; Steinberger, H. | Conference Paper |
| 1988 | Laser recrystallization of polysilicon for improved device quality
Buchner, R.; Haberger, K.; Hu, B. | Conference Paper |
| 1988 | STACHMOS - a basic 3-dimensional CMOS process
Haberger, K.; Panish, P.; Buchner, R.; Seegebrecht, P. | Conference Paper |
| 1987 | High troughput CO2 laser recrystallization for 3D integrated devices
Haberger, K.; Panish, P.; Buchner, R.; Steinberger, H. | Conference Paper |