Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1994Ion-beam induced CoSi2 layers - formation and contact properties.
Dehm, C.; Kasko, I.; Ryssel, H.
Journal Article
1992Influence of low-dose ion-beam mixing on CoSi2 formation
Kasko, I.; Dehm, C.; Ryssel, H.
Conference Paper
1992Interaction between Co and SiO2 during ion-beam mixing and rapid thermal annealing
Dehm, C.; Kasko, I.; Burte, E.P.; Ryssel, H.
Conference Paper