Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1988Electrical characterization of buried layers in silicon.
Klausmann, E.; Fahrner, W.R.
Journal Article
1988Nondestructive topographic evaluation of ion implanted layers on GaAs substrates by optical absorption.
Jantz, W.; Wettling, W.; Windscheif, J.
Journal Article
1982Ion Implantation.
Ryssel, H.
Book Article