Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014Modellierung von Ermüdungsausfällen durch aktive Lastwechseltests
Hutzler, Aaron; Tokarski, Adam; Schletz, Andreas
Conference Paper
1984Basis device structures
Mader, H.
Book Article
1984E-beam metrology of chromium master masks and masks for x-ray lithography
Betz, H.; Heuberger, A.; Bruenger, W.H.; Mueller, K.P.
Journal Article
1984Etching processes
Mader, H.
Book Article
1984Lithographie
Mader, H.
Book Article
1984Soft-x-ray generation in a helium environment using laser-produced plasmas
Petzold, H.-C.; Kuehne, M.
Journal Article
1984Technologie fuer immer kleinere Strukturen
Heuberger, A.
Journal Article
1983E-beam two-coordinate measuring tool for high precision metrology in micro-lithographie
Betz, H.; Heuberger, A.; Somers, J.M.; Bruenger, W.H.
Conference Paper
1983A multigrid method for simulation of the diffusion equation in VLSI process modeling
Seidl, A.
Journal Article