Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Highspeed PVD-Schichtsysteme
Yildirim, Baycan
Journal Article
2007Anwendung superharter Beschichtungen in der Zerspantechnik
Keunecke, M.; König, J.; Richter, V.; Wiemann, E.
Journal Article
2007Tiefziehwerkzeuge mit gradierter Randschicht
Schober, R.
Journal Article
2000CVD diamond tools - fabrication methods and tool applications
Schäfer, L.; Gäbler, J.
Conference Paper
19973D simulation for sub-micron metallization
Bär, E.; Lorenz, J.; Ryssel, H.
Journal Article, Conference Paper
1997Heteroepitaxial growth of highly oriented diamond on cubic silicon carbide
Kawarada, H.; Wild, C.; Herres, N.; Locher, R.; Koidl, P.; Nagasawa, H.
Journal Article
1996Infrared Raman scattering as a sensitive probe for the thermal conductivity of chemical vapor deposited diamond films
Wörner, E.; Wagner, J.; Müller-Sebert, W.; Wild, C.; Koidl, P.
Journal Article
1995Incorporation of nitrogen in chemical vapor deposition diamond.
Samlenski, R.; Haug, C.; Brenn, R.; Wild, C.; Locher, R.; Koidl, P.
Journal Article
1994Nitrogen stabilized 100 texture in chemical vapor deposited diamond films
Locher, R.; Wild, C.; Herres, N.; Behr, D.; Koidl, P.
Journal Article
1994Preparation, characterization and wear behaviour of TiN(x)-coated cermets obtained by plasma-enhanced chemical vapour deposition
Endler, Ingolf; Wolf, E.; Leonhardt, A.; Beger, A.; Richter, Volkmar
Journal Article
1993Diamond membranes with controlled stress for submicron lithography
Bluhm, A.; Löchel, B.; Buchmann, L.-M.; Huber, H.-L.; Klages, C.-P.; Schäfer, L.
Journal Article, Conference Paper
1992Diamond membranes for X-ray masks
Löchel, B.; Schliwinski, H.-J.; Huber, H.-L.; Trube, J.; Klages, C.-P.; Lüthje, H.; Schäfer, L.
Conference Paper
1992Der idealen Oberfläche auf der Spur. Laser in der Oberflächentechnik
Herziger, G.; Kreutz, E.W.; Wissenbach, K.
Book Article
1992Silicon technologies for sensor fabrication
Mokwa, W.
Book Article
1992Verbundprojekt - Diamantbeschichtung komplexer Geometrien. Teilvorhaben - Hochskalierung des Heißdraht-CVD-Prozesses zur Diamantabscheidung
Bluhm, A.; Sattler, M.; Six, R.; Klages, C.-P.; Schäfer, L.
Conference Paper
1991Growth and properties of diamond films prepared by MPCVD using different oxygen-containing source gases
Schäfer, L.; Klages, C.-P.
Journal Article, Conference Paper
1988Recrystallized silicon thin film structures for solar cells
Reis, I.; Eyer, A.; Räuber, A.
Conference Paper