Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Influence of thermal load on 450mm Si-wafer IPD during lithographic patterning
Peschel, Thomas; Kalkowski, Gerhard; Eberhardt, Ramona
Conference Paper
2005Design and characterisation of 1-3 ultrasonic composites using ATILA and ultra fast laser measurements (20 MHz)
Rödig, T.; Schönecker, A.; Hladky, A.
Conference Paper