Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2015Characterization of Mo/Si mirror interface roughness for different Mo layer thickness using resonant diffuse EUV scattering
Haase, Anton; Soltwitsch, Victor; Scholze, Frank; Braun, Stefan
Conference Paper
2011Roughness characterization of large EUV mirror optics by laser light scattering
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Conference Paper
2010Fiber-amplifier pumped high average power few-cycle pulse non-collinear OPCPA
Tavella, F.; Willner, A.; Rothhardt, J.; Haedrich, S.; Seise, E.; Duesterer, S.; Tschentscher, T.; Schlarb, H.; Feldhaus, J.; Limpert, J.; Tünnermann, A.; Rossbach, J.
Journal Article
2008Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments
Hill, S.B.; Faradzhev, N.S.; Tarrio, C.; Lucatorto, T.B.; Madey, T.E.; Yakshinskiy, B.V.; Loginova, E.; Yulin, S.
Conference Paper
2007EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Journal Article
2004Frequency scaling in a hollow-cathode-triggered pinch plasma as radiation source in the extreme ultraviolet
Rosier, O.; Apetz, R.; Bergmann, K.; Jonkers, J.; Wester, R.; Neff, W.; Pankert, J.
Journal Article
2001A multi-kilohertz pinch plasma radiation source for extreme ultraviolet lithography
Bergmann, K.; Rosier, O.; Lebert, R.; Neff, W.; Poprawe, R.
Journal Article
1993Auto-calibrating EUV spectrometers -ACEs-
Schmidtke, G.
Conference Paper
1992Absolute, extreme-ultraviolet, solar spectral irradiance monitors
Parkinson, W.H.; Smith, P.L.; Schmidtke, G.
Conference Paper
1992Measurement of solar EUV/UV radiation of the steeply rising solar cycle 22 during the San Marco 5 mission and proposed instrumentation to achieve high radiometric accuracy
Schmidtke, G.; Doll, H.; Wita, C.
Journal Article
1992Observations of the solar EUV spectral irradiance
Schmidtke, G.
Conference Paper
1992Solar EUV irradiance form the San Marco ASSI - a reference spectrum
Schmidtke, G.
Journal Article