Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020New insight into organosilicon plasma‐enhanced chemical vapor deposition layers and their crosslinking behavior by calculating the degree of Si‐networking
Brenner, Thorben; Vissing, Klaus
Journal Article
2018XPS and ATR-FTIR study on chemical modifications of cold atmospheric plasma (CAP) operated in air on the amino acids L-proline and trans-4-Hydroxy-L-proline
Scheglov, A.; Helmke, A.; Loewenthal, L.; Ohms, G.; Viöl, W.
Journal Article
2009Investigations on the effect of dielectric barrier discharge (DBD) treatment as a preconditioning method for low temperature silicon wafer bonding
Michel, B.; Eichler, M.; Klages, C.-P.
Journal Article