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| 1997 | Metallization of polymers using plasma enhanced chemical vapor deposited titanium nitride as interlayer
Weber, A.; Dietz, A.; Pöckelmann, R.; Klages, C.-P. | Conference Paper |
| 1995 | Deposition of high quality TiN using tetra-iso-propoxide titanium in an electron cyclotron resonance plasma process
Weber, A.; Pöckelmann, R.; Klages, C.-P. | Journal Article |
| 1995 | Electroplating of fluoropolymers using ECR plasma deposited TiN as interlayer
Weber, A.; Dietz, A.; Pöckelmann, R.; Klages, C.-P. | Conference Paper |
| 1995 | Electroplating of poly(tetrafluoro-ethylene) using plasma enhanced chemical vapor deposited titanium nitride as interlayer
Weber, A.; Dietz, A.; Pöckelmann, R.; Klages, C.-P. | Journal Article |
| 1995 | Formation mechanism of TiN by reaction of tetrakis(dimethylamido)-titanium with plasma activated nitrogen
Weber, A.; Klages, C.-P.; Gross, M.E.; Charatan, R.M.; Brown, W.L. | Journal Article |
| 1993 | Deposition of TiN using tetrakis/dimethylamindo/-titanium in an electron-cyclotron-resonance plasma process
Weber, A.; Nikulkski, R.; Klages, C.-P. | Journal Article |
| 1993 | ECR plasma deposition of cubic nitride using n-trimethylborazine
Bringmann, U.; Nikulkski, R.; Klages, C.-P.; Weber, A. | Conference Paper |
| 1993 | Growth of cubic Boron Nitride and Boron-Carbon-Nitrogen coatings using N-Trimethylborazine in an ECR plasma process
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P. | Conference Paper |
| 1993 | Low temperature deposition of TiN in an ECR plasma enhanced process
Weber, A.; Bringmann, U.; Nikulkski, R.; Pöckelmann, R.; Klages, C.-P.; Gross, M.E.; Brown, W.L.; Charatan, R.M.; Dons, E.; Eaglesham, D.J. | Conference Paper |