Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1997Metallization of polymers using plasma enhanced chemical vapor deposited titanium nitride as interlayer
Weber, A.; Dietz, A.; Pöckelmann, R.; Klages, C.-P.
Conference Paper
1995Deposition of high quality TiN using tetra-iso-propoxide titanium in an electron cyclotron resonance plasma process
Weber, A.; Pöckelmann, R.; Klages, C.-P.
Journal Article
1995Electroplating of fluoropolymers using ECR plasma deposited TiN as interlayer
Weber, A.; Dietz, A.; Pöckelmann, R.; Klages, C.-P.
Conference Paper
1995Electroplating of poly(tetrafluoro-ethylene) using plasma enhanced chemical vapor deposited titanium nitride as interlayer
Weber, A.; Dietz, A.; Pöckelmann, R.; Klages, C.-P.
Journal Article
1995Formation mechanism of TiN by reaction of tetrakis(dimethylamido)-titanium with plasma activated nitrogen
Weber, A.; Klages, C.-P.; Gross, M.E.; Charatan, R.M.; Brown, W.L.
Journal Article
1993Deposition of TiN using tetrakis/dimethylamindo/-titanium in an electron-cyclotron-resonance plasma process
Weber, A.; Nikulkski, R.; Klages, C.-P.
Journal Article
1993ECR plasma deposition of cubic nitride using n-trimethylborazine
Bringmann, U.; Nikulkski, R.; Klages, C.-P.; Weber, A.
Conference Paper
1993Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P.
Journal Article, Conference Paper
1993Growth of cubic Boron Nitride and Boron-Carbon-Nitrogen coatings using N-Trimethylborazine in an ECR plasma process
Weber, A.; Bringmann, U.; Nikulkski, R.; Klages, C.-P.
Conference Paper
1993Low temperature deposition of TiN in an ECR plasma enhanced process
Weber, A.; Bringmann, U.; Nikulkski, R.; Pöckelmann, R.; Klages, C.-P.; Gross, M.E.; Brown, W.L.; Charatan, R.M.; Dons, E.; Eaglesham, D.J.
Conference Paper