Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009Advances in SLM development for microlithography
Dauderstädt, U.; Askebjer, P.; Björnängen, P.; Dürr, P.; Friedrichs, M.; List, M.; Rudloff, D.; Schmidt, J.-U.; Müller, M.; Wagner, M.
Conference Paper
2007Charging effects in spatial light modulators based on micromirrors
Dauderstädt, U.; Bakke, T.; Dürr, P.; Sinning, S.; Wullinger, I.; Wagner, M.; Lakner, H.
Conference Paper
2006Scattering analysis of optical components in the DUV
Schröder, S.; Gliech, S.; Duparre, A.
Conference Paper
2005Determination of scattering losses in ArF* excimer laser all-dielectric mirrors for 193 nm microlithography application
Rudisill, J.; Duparre, A.; Schröder, S.
Conference Paper
2005Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Gatto, A.; Yang, M.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2005Lanthanide tri-fluorides: A survey of the optical, mechanical and structural properties of thin films with emphasis of their use in the DUV - VUV - spectral range
Uhlig, H.; Thielsch, R.; Heber, J.; Kaiser, N.
Conference Paper
2005Mechanical stability of spatial light modulators in microlithography
Dauderstädt, U.; Dürr, P.; Ljungblad, U.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2005Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components
Schröder, S.; Uhlig, H.; Duparre, A.; Kaiser, N.
Conference Paper
2005Scatter analysis of optical components from 193 nm to 13.5 nm
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.
Conference Paper
2004Application of spatial light modulators for microlithography
Dauderstädt, U.; Dürr, P.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Characterization of spatial light modulators for microlithography
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Bakke, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Methology to evaluate light scatter mechanisms of VUV substrates and coatings
Duparre, A.; Gliech, S.; Hultaker, A.
Book Article
2003Operation of spatial light modulators in DUV light
Dauderstädt, U.; Dürr, P.; Krellmann, M.; Karlin, T.; Berzinsh, U.; Leonardsson, L.; Wendrock, H.
Conference Paper
2003VULSTAR: A laser based system for measuring light scattering, transmittance, and reflectance at 157 nm and 193 nm
Duparre, A.; Gliech, S.; Benkert, N.
Book Article
2002Reliability test and failure analysis of optical MEMS
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Lakner, H.
Conference Paper
2001Laser damage studies on MgF2 thin films
Protopapa, M.L.; Thomasi, F. de; Perrone, M.R.; Piegari, A.; Masetti, E.; Ristau, D.; Quesnel, E.; Duparre, A.
Journal Article
2001New architecture for laser pattern generators for 130 nanometers and beyond
Ljungblad, U.; Sandström, T.; Buhre, H.; Dürr, P.; Lakner, H.
Conference Paper
2001New laser pattern generator for DUV using a spatial light modulator
Ljungblad, U.; Dauderstädt, U.; Dürr, P.; Sandström, T.; Buhre, H.; Lakner, H.
Journal Article
1999Charakterisierung optischer Komponenten für DUV Spektralbereich
Mann, K.; Apel, O.; Ristau, D.; Duparre, A.; Gliech, S.
Journal Article
1995New system for fast maskless submicron lithography - challenge on fast flexible data handling
Kück, H.
Conference Paper
1995New system for fast submicron laser direct writing
Kück, Heinz; Bollerott, Michael; Doleschal, Wolfgang; Gehner, Andreas; Kunze, Detlef; Grundke, Wolfram; Melcher, Rolf; Paufler, Jörg; Seltmann, Rolf; Zimmer, Günter
Conference Paper