Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1991Cathodic arc deposition of TiN and Zr-C,N- at low substrate temperatures using a pulsed bias voltage
Ebberink, J.; Fessmann, J.; Kampschulte, G.; Olbrich, W.
Conference Paper
1991Improved control of TiN coating properties using cathodic arc evaporation with a pulsed bias.
Ebberink, J.; Fessmann, J.; Kampschulte, G.; Olbrich, W.
Journal Article, Conference Paper