Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Influence of thermal load on 450mm Si-wafer IPD during lithographic patterning
Peschel, Thomas; Kalkowski, Gerhard; Eberhardt, Ramona
Conference Paper
2012Investigations into an electrostatic chuck design for 450mm Si wafer
Kalkowski, Gerhard; Peschel, Thomas; Hassall, Geoffrey; Risse, Stefan
Conference Paper