Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Measurement of Young's modulus and residual stress of thin SiC layers for MEMS high temperature applications
Pabst, O.; Schiffer, M.; Obermeier, E.; Tekin, T.; Lang, K.-D.; Ngo, H.-D.
Conference Paper
1994Identification of the neutral V4+ impurity in cubic 3C-SiC by electron-spin resonance and optically detected magnetic resonance
Dombrowski, K.F.; Kaufmann, U.; Kunzer, M.; Maier, K.; Schneider, J.; Shields, V.B.; Spencer, M.G.
Journal Article