Fraunhofer-Gesellschaft

YearTitle/AuthorDocument Type
2019Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC
Weiße, J.; Hauck, M.; Krieger, M.; Bauer, A.J.; Erlbacher, T.
Journal Article
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2019Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects?
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.
Journal Article
Fulltext
2019Channeling in 4H-SiC from an Application Point of View
Pichler, Peter; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.; Erlbacher, Tobias
Conference Paper
2019Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Conference Paper
2019Determination of Compensation Ratios of Al-Implanted 4H-SiC by TCAD Modelling of TLM Measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zong Wei; Erlbacher, Tobias; Bauer, Anton J.
Conference Paper
2019Feasibility of 4H-SiC p-i-n diode for sensitive temperature measurements between 20.5 K and 802 K
Matthus, C.D.; Benedetto, L. di; Kocher, M.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Erlbacher, T.
Journal Article
2019Large-Area Layer Counting of Two-Dimensional Materials Evaluating the Wavelength Shift in Visible-Reflectance Spectroscopy
Hutzler, Andreas; Matthus, Christian D.; Dolle, Christian; Rommel, Mathias; Jank, Michael P.M.; Spiecker, Erdmann; Frey, Lothar
Journal Article
2019Methodology for the investigation of threading dislocations as a source of vertical leakage in AlGaN/GaN-HEMT heterostructures for power devices
Besendörfer, S.; Meissner, E.; Lesnik, A.; Friedrich, J.; Dadgar, A.; Erlbacher, T.
Journal Article
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2019Process and design optimization of SiC MOSFET for low on-state resistance: Presentation held at Europe-Korea Conference on Science and Technology, EKC 2019, July 15-18, 2019, Vienna, Austria
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton
Presentation
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2019Raman Spectroscopy Characterization of Ion Implanted 4H-SiC and its Annealing Effects
Xu, Zongwei; Song, Ying; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, Fengzhou
Conference Paper
2019SIC device manufacturing using ion implantation. Opportunities and challenges: Presentation held at KTH IEEE Seminar, Stockholm, Sweden, 23.05.2019
Erlbacher, Tobias
Presentation
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2019Surface-enhanced Raman scattering on nanodiamond-derived carbon onions
Song, Ying; Xu, Zongwei; Rosenkranz, Andreas; Rommel, Mathias; Shi, Changkun; Fang, Fengzhou
Journal Article
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2019Technological advances towards 4H-SiC JBS diodes for wind power applications
Buettner, Jonas; Erlbacher, Tobias; Bauer, Anton
Conference Paper
2019TSV-based passive networks for monolithic integration in smartpower ICS for automotive applications: Presentation held at 10. GMM Fachtagung "Automotive meets Electronics 2019", 12./13.03.2019, Dortmund, Germany
Erlbacher, Tobias; Rattmann, Gudrun
Presentation
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2019Wavelength-selective 4H-SiC UV-sensor array
Matthus, C.D.; Bauer, A.J.; Frey, L.; Erlbacher, T.
Journal Article
2018Analysis of compensation effects in aluminum-implanted 4H-SiC devices
Weisse, J.; Hauck, M.; Sledziewski, T.; Tschiesche, M.; Krieger, M.; Bauer, A.; Mitlehner, H.; Frey, L.; Erlbacher, T.
Conference Paper
2018Analytical model for the influence of the gate-voltage on the forward conduction properties of the body-diode in SiC-MOSFETs
Huerner, A.; Heckel, T.; Enduschat, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2018Attenuated PSM for EUV: Can they mitigate 3D mask effects?
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.
Conference Paper
2018Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation: Poster presented at 12th European Conference on Silicon Carbide & Related Materials, September 2nd - 6th, 2018, Birmingham, UK
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton
Poster
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2018Defect functional structures of 4H-SiC and diamond induced by ion implantation: MD simulation and spectral characterization: Presentation held at COSIRES 2018, The 2018 Computer Simulation of Radiation Effects in Solids, June 18-22, Shanghai, China
Xu, Zongwei; Zhao, Junlei; Djurabekova, Flyura; Rommel, Mathias; Nordlund, Kai
Presentation
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2018Defects and carrier lifetime in 4H-Silicon Carbide: Presentation held at E-MRS Fall meeting 2018, Warsaw
Kallinger, Birgit; Erlekampf, Jürgen; Rommel, Mathias; Berwian, Patrick; Friedrich, J.; Matthus, Christian D.
Presentation
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2018Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy
Stumpf, Florian; Abu Quba, A.A.; Singer, Philip; Rumler, Maximilian; Cherkashin, Nikolay; Schamm-Chardon, Sylvie; Cours, Robin; Rommel, Mathias
Journal Article
2018Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements: Poster presented at 12th European Conference on Silicon Carbide & Related Materials, September 2nd - 6th, 2018, Birmingham, UK
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zongwei; Erlbacher, Tobias; Bauer, Anton
Poster
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2018Dose dependent profile deviation of implanted aluminum in 4H-SiC during high temperature annealing: Poster presented at 22nd International Conference on Ion Implantation Technology, September 16th - 21st, 2018, Würzburg
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton
Poster
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2018Electrical properties of schottky-diodes based on B doped diamond
Erlbacher, T.; Huerner, A.; Zhu, Y.; Bach, L.; Schletz, A.; Zürbig, Verena; Pinti, Lucas; Kirste, Lutz; Giese, Christian; Nebel, Christoph E.; Bauer, A.J.; Frey, L.
Conference Paper
2018Elektronik
Bauer, Anton; Bär, Eberhard; Erlbacher, Tobias; Friedrich, Jochen; Lorenz, Jürgen; Rommel, Mathias; Schellenberger, Martin
Book Article
2018Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes
Matthus, C.D.; Huerner, A.; Erlbacher, T.; Bauer, A.; Frey, L.
Journal Article
2018Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Conference Paper
2018Future technology trends
Lorenz, Leo; Erlbacher, Tobias; Hilt, Oliver
Book Article
2018The GaN trench gate MOSFET with floating islands: High breakdown voltage and improved BFOM
Shen, L.; Müller, S.; Cheng, X.; Zhang, D.; Zheng, L.; Xu, D.; Yu, Y.; Meissner, E.; Erlbacher, T.
Journal Article
2018Heterogeneous integration of vertical GaN power transistor on Si capacitor for DC-DC converters: Presentation held at ESTC 2018, IEEE 7th Electronics System-Integration Technology Conference, September 18th-21st, 2018, Dresden, Germany
Yu, Zechun; Zeltner, Stefan; Boettcher, Norman; Rattmann, Gudrun; Leib, Jürgen; Bayer, Christoph Friedrich; Schletz, Andreas; Erlbacher, Tobias; Frey, Lothar
Presentation
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2018Human Sweat Analysis Using a Portable Device Based on a Screen‐printed Electrolyte Sensor
Zoerner, A.; Oertel, S.; Jank, M.P.M.; Frey, L.; Langenstein, B.; Bertsch, T.
Journal Article
2018Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Rosshirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Conference Paper
2018Influence of Al doping concentration and annealing parameters on TiAl based Ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton J.
Conference Paper
2018Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schoeck, J.; Schlichting, H.; Kallinger, B.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Conference Paper
2018Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC
He, Zhongdu; Xu, Zongwei; Rommel, Mathias; Yao, Boteng; Liu, Tao; Song, Ying; Fang, Fengzhou
Journal Article
2018Large-area layer counting of 2D materials via visible reflection spectroscopy: Poster presented at IMC19, 19th International Microscopy Congress, September 9 - 14, 2018, Sydney, Australia
Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, M.; Jank, M.P.M.; Spiecker, E.; Frey, L.
Poster
Fulltext
2018Laser Surface Microstructuring of a Bio-Resorbable Polymer to Anchor Stem Cells, Control Adipocyte Morphology, and Promote Osteogenesis
Ortiz, Rocio; Aurrekoetxea-Rodríguez, Iskander; Rommel, Mathias; Quintana, Iban; Vivanco, Maria; Toca-Herrera, Jose Luis
Journal Article
Fulltext
2018Lifetime testing method for ceramic capacitors for power electronics applications
Dresel, Fabian; Tham, Nils; Erlbacher, Tobias; Schletz, Andreas
Conference Paper
2018Nano- and micro-patterned S-, H- and X-PDMS for cell-based applications: Comparison of wettability, roughness and cell-derived parameters
Scharin-Mehlmann, Marina; Häring, Aaron; Rommel, Mathias; Dirnecker, Tobias; Friedrich, Oliver; Frey, Lothar; Gilbert, Daniel F.
Journal Article
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2018Normalized differential conductance to study current conduction mechanisms in MOS structures
Nouibat, T.H.; Messai, Z.; Chikouch, D.; Ouennoughi, Z.; Rouag, N.; Rommel, Mathias; Frey, Lothar
Journal Article
2018Novel approach based on continuous trench modelling to predict focused ion beam prepared freeform surfaces
Bilbao-Guillerna, A.; Eachambadi, R.T.; Cadot, G.B.J.; Axinte, D.A.; Billingham, J.; Stumpf, F.; Beuer, S.; Rommel, M.
Journal Article
2018On the limits of scalpel AFM for the 3D electrical characterization of nanomaterials
Chen, Shaochuan; Jiang, Lanlan; Buckwell, Mark; Jing, Xu; Ji, Yanfeng; Grustan-Gutierrez, Enric; Hui, Fei; Shi, Yuanyuan; Rommel, Mathias; Paskaleva, Albena; Benstetter, Günther; Ng, Wing. H.; Mehonic, Adnan; Kenyon, Anthony J.; Lanza, Mario
Journal Article
2018One-step nanoimprinted Bragg grating sensor based on hybrid polymers
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Stumpf, Florian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Journal Article
2018Principle of lifetime-engineering in 4H-SiC by ion implantation: Poster presented at ECSCRM 2018, 12th European Conference on Silicon Carbide & Related Materials, Birmingham, 2nd - 6th September 2018
Erlekampf, Jürgen; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen; Frey, Lothar; Erlbacher, Tobias
Poster
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2018Raman spectroscopy characterization of ion implanted 4H-SiC and its annealing effects: Poster presented at ECSCRM 2018, 12th European Conference on Silicon Carbide & Related Materials, September 2-6, 2018, Birmingham, UK
Xu, Zongwei; Song, Y.; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, F.Z.
Poster
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2018Strukturierungsverfahren
Fader, Robert; Lorenz, Jürgen; Rommel, Mathias; Baum, Mario; Danylyuk, Serhiy; Gillner, Arnold; Stollenwerk, Jochen; Bläsi, Benedikt
Book Article
2018Symmetry and structure of carbon-nitrogen complexes in gallium arsenide from infrared spectroscopy and first-principles calculations
Künneth, C.; Kölbl, S.; Wagner, H.E.; Häublein, V.; Kersch, A.; Alt, H.C.
Journal Article
2018TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing
Rosenberger, Manuel; Girschikofsky, Maiko; Förthner, Michael; Belle, Stefan; Rommel, Mathias; Frey, Lothar; Schmauß, Bernhard; Hellmann, Ralf
Journal Article
2018TLS-dicing for SiC - Latest assessment results
Lewke, D.; Cerezuela Barreto, M.; Dohnke, K.; Zühlke, H.-U.; Belgardt, C.; Schellenberger, M.
Conference Paper
2018Topic review: Application of raman spectroscopy characterization in micro/nano-machining
Xu, Zongwei; He, Zhongdu; Song, Ying; Fu, Xiu; Rommel, Mathias; Luo, Xichun; Hartmaier, Alexander; Zhang, Junjie; Fang, Fengzhou
Journal Article
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20174.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Conference Paper
2017Advanced 4H-SiC p-i-n Diode as Highly Sensitive High-Temperature Sensor Up To 460 degrees C
Matthus, C.D.; Erlbacher, T.; Hess, A.; Bauer, A.J.; Frey, L.
Journal Article
2017Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity
Engst, Christian R.; Rommel, Mathias; Bscheid, Christian; Eisele, Ignaz; Kutter, Christoph
Journal Article
2017Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques
Steinberg, Christian; Rumler, Maximilian; Runkel, Manuel; Papenheim, Marc; Wang, Si; Mayer, Andre; Becker, Marco; Rommel, Mathias; Scheer, Hella-Christin
Journal Article
2017Determination of the selectivity of printed wearable sweat sensors
Zörner, A.; Oertel, S.; Schmitz, B.; Lang, N.; Jank, M.P.M.; Frey, L.
Conference Paper
2017Enhanced contamination control methods in advanced wafer processing
Pfeffer, M.; Richter, H.; Altmann, R.; Leibold, A.; Bauer, A.
Conference Paper
2017Experimental verification of a self-triggered solid-state circuit breaker based on a SiC BIFET
Albrecht, M.; Hürner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides: Presentation held at Integrated Optics: Devices, Materials, and Technologies XXI, SPIE, Photonics West, 30 January - 1 February 2017, San Francisco, California
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Presentation
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2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Conference Paper
2017Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers
Hutzler, Andreas; Matthus, Christian D.; Rommel, Mathias; Frey, Lothar
Journal Article
2017Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration
Matthus, C.D.; Erlbacher, T.; Schöfer, B.; Bauer, A.J.; Frey, L.
Conference Paper
2017Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC: Poster presented at ICSCRM 2017, International Conference on Silicon Carbide and Related Materials, Washington, DC, September 17-22, 2017
Erlekampf, Jürgen; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Poster
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2017Influence of Al doping concentration and annealing parameters on TiAl based ohmic contacts on 4H-SiC: Poster presented at International Conference on Silicon Carbide and Related Materials, September 17th - 22th, 2017, Washington, D.C., USA
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
Fulltext
2017Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schöck, Johannes; Schlichting, Holger; Kallinger, Birgit; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Poster
Fulltext
2017Investigation of high-k dielectric stacks by C-AFM: Advantages, limitations, and possible applications
Rommel, Mathias; Paskaleva, Albena
Book Article
2017Large area manufacturing of plasmonic colour filters using substrate conformal imprint lithography
Rumler, Maximilian; Foerthner, M.; Baier, L.; Evanschitzky, P.; Becker, M.; Rommel, M.; Frey, L.
Journal Article
2017Monolithically integrated solid-state-circuit-breaker for high power applications
Huerner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2017Nanoimprinted surface relief Bragg gratings for sensor applications: Poster presented at Sensor Day 2017, Robinson College, Cambridge, Great Britain, October 20, 2017
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Poster
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2017Novel advanced analytical design tool for 4H-SiC VDMOSFET devices
Benedetto, L. di; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Conference Paper
2017One-step fabrication of hierarchical structures: Poster presented at International Workshop on Advanced 3D Patterning, ad3pa 2017, Dresden, Germany, October 5-6, 2017
Rumler, Maximilian; Förthner, Michael; Kollmuss, Manuel; Baier, Leander; Stumpf, Florian; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
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2017One-step fabrication of hierarchical structures by direct laser writing through PDMS molds: Presentation held at 4. Internationale Konferenz "Polymer Replication on Nanoscale", PRN 2017, Aachen, 8.5.2017 - 9.5.2017
Rumler, Maximilian; Förthner, Michael; Baier, Leander; Marhenke, Julius; Kollmuss, Manuel; Michel, Felix; Becker, Marco; Rommel, Mathias
Presentation
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2017Optimization of 4H-SiC photodiodes as selective UV sensors
Matthus, C.D.; Burenkov, A.; Erlbacher, T.
Conference Paper
2017Point contact current voltage measurements of 4H-SiC samples with different doping profiles
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Conference Paper
2017Polymerization related deformations in multilayer soft stamps for nanoimprint
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Scheer, Hella-Christin; Frey, Lothar
Journal Article
2017Raman micro-spectroscopy as a non-destructive key analysis tool in current power semiconductor manufacturing
Biasio, M. de; Kraft, M.; Geier, E.; Goller, B.; Bergmann, C.; Esteve, R.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.; Roesner, M.
Conference Paper
2017Resistless Ga+ beam lithography for flexible prototyping of nanostructures in different materials by reactive ion etching: Presentation held at FOR3NANO: Formation of 3D Nanostructures by Ion Beams, June 28 - June 30, Helsinki, Finland
Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Beuer, Susanne
Presentation
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2017Stress reduction in high voltage MIS capacitor fabrication
Banzhaf, S.; Kenntner, J.; Grieb, M.; Schwaiger, S.; Erlbacher, T.; Bauer, A.J.; Frey, L.; Frey, L.
Conference Paper
2017Switching SiC devices faster and more efficient using a DBC mounted terminal decoupling Si-RC element
Matlok, S.; Erlbacher, T.; Krach, F.; Eckardt, B.
Conference Paper
2017System integration of printed biosensors for sweat electrolytes with data acquisition via Bluetooth to App
Oertel, S.; Jank, M.; Zörner, A.; Schmitz, B.; Lang, N.
Conference Paper
2017Verfahren zur Überprüfung eines Trennschrittes bei der Zerteilung eines flachen Werkstückes in Teilstücke
Tobisch, Alexander; Schellenberger, Martin; Lewke, Dirk
Patent
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2017Waveguide bragg gratings in Ormocer®s for temperature sensing
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Journal Article
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20164.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density: Poster presented at 11th European Conference on Silicon Carbide & Related Materials, September 25th - 29th, 2016, Halkidiki, Greece
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
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2016Advanced detection method for polymer residues on semiconductor substrates: 3D/TSV/interposer. Through silicon via and packaging
Richter, H.; Pfitzner, L.; Pfeffer, M.; Bauer, A.; Siegert, J.; Bodner, T.
Conference Paper
2016Analytical Model and Design of 4H-SiC Planar and Trenched JBS Diodes
Di Benedetto, L.; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Bellone, S.
Journal Article
2016ATHENIS-3D: Automotive tested high-voltage and embedded non-volatile integrated SoC platform with 3D technology
Wachmann, Ewald; Saponara, Sergio; Zambelli, C.; Tisserand, Pierre; Charbonnier, Jean; Erlbacher, Tobias; Grünler, Saeideh; Hartler, C.; Siegert, J.; Chassard P.; Ton D.M.; Ferrari, L.; Fanucci, L.
Conference Paper
2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, M.; Baier, L.; Michel, F.; Förthner, M.; Becker, M.; Rommel, M.; Frey, L.
Conference Paper
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2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication: Poster presented at EMLC 2016, 32nd European Mask and Lithography Conference, Dresden, Germany, 21-22 June 2016
Rumler, Maximilian; Kollmuss, Manuel; Baier, Leander; Michel, Felix; Förthner, Michael; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
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2016Comparative spatially resolved characterization of a Czochralski-grown silicon crystal by different laser-based imaging techniques
Herms, Martin; Wagner, Matthias; Molchanov, Alexander; Rommel, Mathias; Zschorsch, Markus; Würzner, Sindy
Conference Paper
2016Conduction loss reduction for bipolar injection field-effect-transistors (BIFET)
Hürner, Andreas; Mitlehner, Heinz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Contamination control for wafer container used within 300 mm manufacturing for power microelectronics
Schneider, G.; Nguyen, T.Q.; Taubert, M.; Bounouar, J.; Le-Guet, C.; Leibold, A.; Richter, H.; Pfeffer, M.
Conference Paper
2016Correlation of film morphology and defect content with the charge-carrier transport in thin-film transistors based on ZnO nanoparticles
Polster, S.; Jank, M.P.M.; Frey, L.
Journal Article
2016Direct optical stress sensing in semiconductor manufacturing using raman micro-spectrometry
Biasio, M. de; Kraft, M.; Roesner, M.; Bergmann, C.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.
Conference Paper
2016Drill-down analysis with equipment health monitoring: Presentation held at 16th European Advanced Process Control and Manufacturing Conference, APCM 2016, April 11 - 13, 2016, Reutlingen, Germany
Krauel, Christopher; Weishäupl, Laura; Pfeffer, Markus
Presentation
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2016The efficiency of hydrogen-doping as a function of implantation temperature
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016Electrical properties of solution processed layers based on Ge-Si alloy nanoparticles
Meric, Z.; Mehringer, C.; Jank, M.P.M.; Peukert, W.; Frey, L.
Journal Article
2016Flexographic printing of nanoparticulate tin-doped indium oxide inks on PET foils and glass substrates
Wegener, M.; Spiehl, D.; Sauer, H.M.; Mikschl, F.; Liu, X.; Kölpin, N.; Schmidt, M.; Jank, M.P.M.; Dörsam, E.; Roosen, A.
Journal Article
2016Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings
Förthner, Michael; Rumler, Maximillian; Stumpf, Florian; Fader, Robert; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Journal Article
2016Ion implantation of polypropylene films for the manufacture of thin film capacitors
Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Djupmyr, M.
Conference Paper
2016Ion implanted 4H-SiC UV pin-diodes for solar radiation detection - simulation and characterization
Matthus, Christian D.; Erlbacher, Tobias; Burenkov, Alexander; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Materials integration for printed zinc oxide thin-film transistors: Engineering of a fully-printed semiconductor/contact scheme
Liu, X.; Wegener, M.; Polster, S.; Jank, M.P.M.; Roosen, A.; Frey, L.
Journal Article
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2016Metastable defects in proton implanted and annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Job, Reinhart; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016A model of electric field distribution in gate oxide and JFET-region of 4H-SiC DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Liguori, R.; Rubino, Alfredo
Journal Article
2016Modelling of effective minority carrier lifetime in 4H-SiC n-type epilayers
Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Conference Paper
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2016Monitoring of biomarkers in sweat with printed sensors combined with sport wearables
Oertel, S.; Jank, M.; Schmitz, B.; Lang, N.
Conference Paper
2016Monolithic 3D TSV-based high-voltage, high-temperature capacitors
Gruenler, S.; Rattmann, G.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Journal Article
2016Optimization of 4H-SiC UV photodiode performance using numerical process and device simulation
Burenkov, Alex; Matthus, Christian David; Erlbacher, Tobias
Journal Article
2016Optimized design for 4H-SiC power DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Rubino, Alfredo
Journal Article
2016Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Journal Article
2016Post-trench processing of silicon deep trench capacitors for power electronic applications
Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Potential of 4H-SiC CMOS for high temperature applications using advanced lateral p-MOSFETs
Albrecht, Matthäus; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Prospects and issues of nanomaterials use in microelectronics: Poster presented at Materials Research Society Spring Meeting 2016, Phoenix, Arizona, USA
Jank, Michael; Bauer, Anton; Frey, Lothar
Poster
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2016Quantification and reduction of deformations in multilayer soft-NIL stamps: Poster presented at NNT 2016, 15th International Conference on Nanoimprint and Nanoprint Technology, September 26-28, 2016, Braga, Portugal
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
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2016Quantification and reduction of deformations in multilayer soft-NIL stamps: Poster presented at MNE 2016, 42nd International Conference on Micro and Nano Engineering, 19-23 September 2016, Vienna, Austria
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
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2016Semiconductor equipment assessment - An enabler for production ready equipment
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Conference Paper
2016Silicon integrated RC snubbers for applications up to 900V with reduced mechanical stress and high manufacturability
Krach, Florian; Thielen, Nils; Heckel, Thomas; Bauer, Anton J.; Erlbacher, Tobias; Frey, Lothar
Conference Paper
2016Simulating wafer bow for integrated capacitors using a multiscale approach
Wright, Alan; Krach, Florian; Thielen, Nils; Grünler, Saeideh; Erlbacher, Tobias; Pichler, Peter
Conference Paper
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2016Stamps for nanoimprint lithography - R&D at Fraunhofer IISB: Presentation held at NIL Industrial Day 2016, Vienna, March 10th - 11th, 2016
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, R.; Schmidt, H.
Presentation
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2016Systematic characterization of doping profiles in 4H-SiC by point contact current voltage measurements: Poster presented at 11th European Conference on Silicon Carbide & Related Materials, September 25th - 29th, 2016, Halkidiki, Greece
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Poster
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2016TiO2 nanotubes: Nitrogen-ion implantation at low dose provides noble-metal-free photocatalytic H2-evolution activity
Zhou, X.; Häublein, V.; Liu, N.; Nguyen, N.T.; Zolnhofer, E.M.; Tsuchiya, H.; Killian, M.S.; Meyer, K.; Frey, L.; Schmuki, P.
Journal Article
2016A trade-off between nominal forward current density and surge current capability for 4.5kV SiC MPS diodes
Huang, Yaren; Erlbacher, Tobias; Buettner, Jonas; Wachutka, Gerhard
Conference Paper
2016Waveguide Bragg gratings in Ormocer hybrid polymers
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Journal Article
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2015Advanced contamination control methods for yield enhancement. YE: Yield Enhancement/Learning
Richter, H.; Leibold, A.; Altmann, R.; Doffek, B.; Koebl, J.; Pfeffer, M.; Bauer, A.; Schneider, G.; Cheung, D.
Conference Paper
2015Atomic scale characterization of SiO2/4H-SiC interfaces in MOSFETs devices
Beltran, A.M.; Duguay, S.; Strenger, C.; Bauer, A.J.; Cristiano, F.; Schamm-Chardon, S.
Journal Article
2015Bioactivation and functionalization of PDMS surfaces to control cellular adhesion behaviour by micro- or nanopatterning and plasma treatment: Poster presented at Workshop on µ-contact-printing and nanoimprint technology, Dresden, March 9th, 2015
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Gilbert, D.F.; Herrmann, M.; Frey, Lothar
Poster
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2015Characterization and application of nano- and microstructured PDMS surfaces for manipulation of cells: Presented at the 14th International Conference on Nanoimprint and Nanoprint Technology, NNT 2015. 22-24 October 2015, Napa, California
Scharin, Marina; Gilbert, D.; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Haering, A.; Friedrich, O.; Frey, Lothar
Presentation
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2015Characterization and application of nano- and microstructured silicon-polymer-based surfaces for manipulation of cells: Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, The Netherlands, 21-24 September 2015
Scharin, Marina; Haering, Aaron; Gilbert, D.; Dirnecker, Tobias; Stumpf, Florian; Rommel, Mathias; Friedrich, Oliver; Frey, Lothar
Poster
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2015Classification and key feature extraction for equipment health monitoring: Presentation held at 27th Advanced Process Control Conference, APC 2015, Austin, USA
Krauel, Christopher; Weishäupl, Laura; Petzold, Lisa; Pfeffer, Markus; Bauer, Anton
Presentation
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2015Comparison of silicon and 4H silicon carbide patterning using focused ion beams
Veerapandian, Savita Kaliya Perumal; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, Lex; Michler, Johannes; Frey, Lothar; Rommel, Mathias
Journal Article
2015Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers: Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, The Netherlands, 21-24 September 2015
Förthner, Michael; Rumler, Maximillian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
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2015Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers: Poster presented at the 14th International Conference on Nanoimprint & Nanoprint Technology, October 22-24, 2015, Napa, USA
Förthner, Michael; Rumler, Maximillian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
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2015Comprehensive study of the electron scattering mechanisms in 4H-SiC MOSFETs
Uhnevionak, Viktroyia; Burenkov, Alexander; Strenger, Christian; Ortiz, Guillermo; Bedel-Pereira, Elena; Mortet, Vincent; Cristiano, Fuccio; Bauer, Anton J.; Pichler, Peter
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2015Controlling cellular adhesion through micro- or nanopatterning of silicone-based surfaces to improve biomedical devices for in vitro based applications: Poster presented at Internationaler Kongress - Forum Life Science 2015, 11./12. März 2015, Technische Universität München-Garching
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Glibert, D.F.; Herrmann, M.; Frey, Lothar
Poster
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2015Current conduction mechanism of MIS devices using multidimensional minimization system program
Rouag, N.; Ouennoughi, Zahir; Rommel, Mathias; Murakami, Katsuhisa; Frey, Lothar
Journal Article
2015Defined area polymer working stamp manufacture for S&R UV-NIL by direct laser writing: Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, The Netherlands, 21-24 September 2015
Rumler, Maximilian; Michel, Felix; Becker, Marco; Baier, Leander; Förthner, Michael; Rommel, Matthias; Schleunitz, Arne; Klein, Jan Jasper
Poster
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2015Device optimization and application study of low cost printed temperature sensor for mobile and stationary battery based Energy Storage Systems
Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; März, M.; Frey, L.
Conference Paper
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2015A DLTS study of hydrogen doped czochralski-grown silicon
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, Stefan; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Journal Article
2015Experimental characterisation of FIB induced lateral damage on silicon carbide samples: Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, The Netherlands, 21-24 September 2015
Stumpf, Florian; Rumler, Maximilian; Abu Quba, Abd Alaziz; Singer, Philipp; Rommel, Mathias
Poster
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2015Functionalization of PDMS surfaces through micro- or nano-patterning to control the cellular adhesion: Presentation held at 2nd Conference on Polymer Replication on Nanoscale, PRN 2015, 18.05.-19.05.2015, Kgs. Lyngby, Denmark
Scharin, Marina; Häring, Aron; Dirnecker, Tobias; Rommel, Mathias; Marhenke, Julius; Friedrich, O.; Gilbert, D.F.; Herrmann, Martin; Frey, Lothar
Presentation
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2015High-voltage monolithic 3D capacitors based on through-silicon-via technology: Poster presented at IITC-MAM 2015, IEEE International Interconnect Technology Conference and IEEE Materials for Advanced Metallization Conference, 18-21 May 2015, Grenoble
Grünler, Saeideh; Rattmann, Gudrun; Erlbacher, Tobias; Bauer, Anton; Frey, Lothar
Poster
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2015Impact of acceptor concentration on electrical properties and density of interface states of 4H-SiC n-metal-oxide-semiconductor field effect transistors studied by Hall effect
Ortiz, Guillermo; Strenger, Christian; Uhnevionak, Viktoryia; Burenkov, Alexander; Bauer, Anton J.; Pichler, Peter; Cristiano, Fuccio; Bedel-Pereira, Elena; Mortet, Vincent
Journal Article
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2015Impact of post-trench processing on the electrical characteristics of 4H-SiC trench-MOS structures with thick top and bottom oxides
Banzhaf, C.T.; Grieb, M.; Rambach, M.; Bauer, A.J.; Frey, L.
Conference Paper
2015Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time
Paskaleva, A.; Weinreich, W.; Bauer, A.J.; Lemberger, M.; Frey, L.
Journal Article
2015Improvement of 4H-SiC material quality: Invited paper presented at the First International Symposium on SiC Spintronics, Vadstena, Sweden, June 15-17, 2015
Kallinger, Birgit; Kaminzky, Daniel; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen
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2015In situ formation of tantalum oxide - PMMA hybrid dielectric thin films for transparent electronic application
Valcu, E.E.; Musat, V.; Oertel, S.; Jank, M.P.M.; Leedham, T.
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2015Influence of annealing, oxidation and doping on conduction-band near interface traps in 4H-SiC characterized by low temperature conductance measurements
Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.; Frey, L.
Conference Paper
2015Isotopic study of mid-infrared vibrational modes in GaAs related to carbon and nitrogen impurities
Alt, H.C.; Wagner, H.E.; Glacki, A.; Frank-Rotsch, C.; Häublein, V.
Journal Article
2015Junction formation and current transport mechanisms in hybrid n-Si/PEDOT:PSS solar cells
Jäckle, Sara; Mattiza, Matthias; Liebhaber, Martin; Brönstrup, Gerald; Rommel, Mathias; Lips, Klaus; Christiansen, Silke
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2015Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL): Poster presented at Workshop on µ-contact-printing and nanoimprint technology, Dresden, March 9th, 2015
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, M.; Belle, S.; Hellmann, R.; Klein, Jan Jasper
Poster
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2015Metastable defects in proton implanted and annealed silicon: Poster presented at GADEST 2015, 16th Conference on Gettering and Defect Engineering in Semiconductor Technology, September 20th to 25th, 2015, Bad Staffelstein, Germany
Jelinek, Moriz; Laven, Johannes G.; Ganagona, N.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Poster
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2015Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors
Erlbacher, T.; Schwarzmann, H.; Bauer, A.J.; Döhler, G.H.; Schreivogel, M.; Lutz, T.; Guillén, F.H.; Graf, J.; Fix, R.; Frey, L.
Journal Article
2015Modeling of the electrochemical etch stop with high reverse bias across pn-junctions: Presentation held at ASMC 2015, 26th SEMI Advanced Semiconductor Manufacturing Conference, May 3-6, 2015, Saratoga Springs, New York
Szwarc, Robert; Frey, Lothar; Weber, Hans; Moder, Iris; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Presentation
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2015Modelling of effective minority carrier lifetimes in 4H-SiC n-type epilayers: Poster presented at International Conference on Silicon Carbide and Related Materials, ICSCRM 2015, Giardini Naxos, Italy, October, 4th - 9th, 2015
Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Poster
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2015Modelling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, R.; Frey, L.; Weber, H.; Moder, I.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Conference Paper
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2015Nachbearbeitung von teilgetrennten Bauelementen in der Halbleitertechnik
Lewke, Dirk; Schellenberger, Martin
Study
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2015Nano- and micrometer scale surface topography modification of Si (100) by Ga focused ion beam irradiation: Poster presented at BRAMAT 2015, 9th International Conference on Materials Science & Engineering, Brasov, Romania, 5-7 March 2015
Rai, Deepa; Stumpf, Florian; Frey, Lothar; Rommel, Mathias
Poster
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2015Nanoelectronics research gaps and recommendations. Editorial: A Report from the International Planning Working Group on Nanoelectronics (IPWGN)
Galatsis, K.; Gargini, P.; Hiramoto, T.; Beernaert, D.; DeKeersmaecker, R.; Pelka, J.; Pfitzner, L.
Journal Article
2015Optical bragg gratings in inorganic-organic hybrid polymers for highly sensitive temperature measurements
Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Förthner, Michael; Frey, Lothar; Rommel, Mathias; Fader, Robert
Conference Paper
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2015Particle free handling of substrates: CFM: Contamination Free Manufacturing
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Conference Paper
2015Robust double-ring junction termination extension design for high voltage power semiconductor devices based on 4H-SiC
Hürner, A.; Benedetto, L. di; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.
Conference Paper
2015Semiconductor equipment assessment - an enabler for production ready equipment: AEM - Advanced Equipment and Materials
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Conference Paper
2015Silicon nitride, a high potential dielectric for 600 V integrated RC-snubber applications
Krach, F.; Schwarzmann, H.; Bauer, A.J.; Erlbacher, T.; Frey, L.
Journal Article
2015Tailoring the electrical properties of HfO2 MOS-devices by aluminum doping
Paskaleva, Albena; Rommel, Mathias; Hutzler, Andreas; Spassov, Dencho; Bauer, Anton J.
Journal Article
2015Temperature dependent characterization of bipolar injection field-effect-transistors (BiFET) for determining the short-circuit-capability
Hürner, A.; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.
Conference Paper
2015Thermal laser separation - a novel dicing technology fulfilling the demands of volume manufacturing of 4H-SiC devices
Lewke, D.; Dohnke, K.O.; Zühlke, H.U.; Cerezuela Barret, M.; Schellenberger, M.; Bauer, A.; Ryssel, H.
Conference Paper
2015Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays: Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, Netherlands, 21-24 September 2015
Scharin, Marina; Newcomer, Kate; Al-Naimi, Abd; Dirnecker, Tobias; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
Poster
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2015Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays: Presented at the 14th International Conference on Nanoimprint and Nanoprint Technology, NNT 2015. 22-24 October 2015, Napa, California
Scharin, Marina; Newcomer, Kate; Dirnecker, Tobias; Al-Naimi, A.; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
Poster
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2015Tunable conduction type of solution-processed germanium nanoparticle based field effect transistors and their inverter integration
Meric, Z.; Mehringer, C.; Karpstein, N.; Jank, M.P.M.; Peukert, W.; Frey, L.
Journal Article
2015UV-NIL R&D at Fraunhofer IISB. Past examples and future challenges: Presentation held at NIL Industrial Day 2015, Berlin, March 19th - 20th, 2015
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, Robert; Schmitt, Holger
Presentation
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2015Vorrichtung und Verfahren zur Überbrückung eines elektrischen Energiespeichers
Erlbacher, Tobias; Lorentz, Vincent; Waller, Reinhold; Rattmann, Gudrun
Patent
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2014Approaches to calculate the dielectric function of ZnO around the band gap
Agocs, E.; Fodor, B.; Pollakowski, B.; Beckhoff, B.; Nutsch, A.; Jank, M.; Petrik, P.
Journal Article
2014Automated tool for measuring nanotopography of 300 mm wafers at early stages of wafer production
Tröger, B.; Mühlig, A.; Fries, T.; Bauer, S.; Wihr, H.; Riedel, F.; Lewke, D.; Schellenberger, M.
Conference Paper
2014Bioactivation of plane and patterned PDMS thin films by wettability engineering
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, Julius; Herrmann, Benjamin; Rumler, Maximilian; Fader, Robert; Frey, Lothar; Herrmann, Martin
Journal Article
2014Comparison of carrier lifetime measurements and mapping in 4H SiC using time resolved photoluminescence and μ-PCD
Kallinger, Birgit; Rommel, Mathias; Lilja, Louise; Hassan, Jawad ul; Booker, Ian; Janzen, Erik; Bergman, Peder
Conference Paper
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2014Comparison of patterning silicon and silicon carbide using focused ion beam: Poster presented at IBMM 2014, 19th International Conference on Ion Beam Modification Materials, Leuven, Belgium, September 14-19, 2014
Veerapandian, S.K.P.; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, L.; Michler, Johannes; Frey, Lothar; Rommel, Mathias
Poster
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2014Deep-level defects in high-dose proton implanted and high-temperature annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Rommel, Mathias; Schustereder, Werner; Schulze, Hans-Joachim; Frey, Lothar; Job, R.
Conference Paper
2014DLTS characterization of proton-implanted silicon under varying annealing conditions
Laven, J.G.; Jelinek, M.; Job, R.; Schustereder, W.; Schulze, H.-J.; Rommel, M.; Frey, L.
Journal Article
2014A DLTS study of hydrogen doped Czochralski-grown silicon: Poster presented at IBMM 2014, 19th International Conference on Ion Beam Modification Materials, Leuven, Belgium, September 14-19, 2014
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, S.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Poster
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2014Effect of shallow n-doping on field effect mobility in p-doped channels of 4H-SiC MOS field effect transistors
Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.J.; Frey, L.
Conference Paper
2014Enabling large area and high throughput roll-to-roll NIL by novel inkjetable and photo-curable NIL-resists
Thesen, Manuel; Rumler, Maximilian; Schlachter, Florian; Grützner, Susanne; Moormann, Christian; Rommel, Mathias; Nees, Dieter; Ruttloff, Stephan; Pfirrmann, Stefan; Vogler, Marko; Schleunitz, Arne; Grützner, Gabi
Conference Paper
2014Experimental analysis of bipolar SiC-devices for future energy distribution systems
Huerner, A.; Mitlehner, H.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2014The Factory Integration Roadmap in Semiconductor manufacturing
Moyne, J.; Schellenberger, M.; Pfitzner, L.
Conference Paper
2014Feasibility evaluation of virtual metrology for the example of a trench etch process
Roeder, G.; Winzer, S.; Schellenberger, M.; Jank, S.; Pfitzner, L.
Journal Article
2014Hall factor calculation for the characterization of transport properties in n-channel 4H-SiC MOSFETs
Uhnevionak, U.; Burenkov, A.; Strenger, C.; Mortet, V.; Bedel-Peireira, E.; Cristiano, F.; Bauer, A.J.; Pichler, Peter
Conference Paper
2014HCl assisted growth of thick 4H-SiC epilayers for bipolar devices
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Conference Paper
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2014High quality and high speed cutting of 4H-SiC JFET wafers including PCM structures by using thermal laser separation
Lewke, D.; Koitzsch, M.; Dohnke, K.O.; Schellenberger, M.; Zuehlke, H.-U.; Rupp, R.; Pfitzner, L.; Ryssel, H.
Conference Paper
2014High-mobility metal-oxide thin-film transistors by spray deposition of environmentally friendly precursors
Oertel, S.; Jank, M.P.M.; Teuber, E.; Bauer, A.J.; Frey, L.
Conference Paper
2014Impact of fabrication process on electrical properties and on interfacial density of states in 4H-SiC n-MOSFETs studied by hall effect
Ortiz, Guillermo; Mortet, Vincent; Strenger, Christian; Uhnevionak, Viktoryia; Burenkov, Alexander; Bauer, Anton J.; Pichler, Peter; Cristiano, Fuccio; Bedel-Pereira, Elena
Conference Paper
2014Influence of diverse post-trench processes on the electrical performance of 4H-SiC MOS structures
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Conference Paper
2014Inkjetable and photo-curable resists for large-area and high-throughput roll-to-roll nanoimprint lithography
Thesen, M.W.; Nees, D.; Ruttloff, S.; Rumler, Maximilian; Rommel, Mathias; Schlachter, F.; Grützner, S.; Vogler, M.; Schleunitz, A.; Grützner, G.
Journal Article
2014Investigation of trenched and high temperature annealed 4H-SiC
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Conference Paper
2014Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL): Poster presented at NNT 2014, 13th International Conference on Nanoimprint and Nanoprint Technology, Kyoto, Japan, October 22-24, 2014
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
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2014Large area fabrication of plasmonic color filters using UV-SCIL: Presentation held at MNE 2014, 40th International Conference on Micro and Nano Engineering, Lausanne, Switzerland, September 22-26, 2014
Rumler, Maximilian; Fader, R.; Förthner, M.; Haas, A.; Rommel, M.; Bauer, A.J.; Frey, L.
Presentation
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2014Large area fabrication of plasmonic color filters using UV-SCIL: Presentation held at NNT 2014, Kyoto, Japan
Rumler, Maximilian; Fader, Robert; Förthner, Michael; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Presentation
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2014Lateral Power Transistors in Integrated Circuits
Erlbacher, T.
Book
2014MeV-proton channeling in crystalline silicon
Jelinek, Moriz; Schustereder, Werner; Kirnstoetter, S.; Laven, Johannes G.; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2014Modification of polypropylene films for thin film capacitors by ion implantation
Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Grimm, W.
Conference Paper
2014Nanoscale characterization of high-k dielectrics by electrical SPM methods: Presentation held at Novel High k Application Workshop, March 24, 2014, Dresden
Rommel, Mathias
Presentation
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2014Nanoscale characterization of TiO2 films grown by atomic layer deposition on RuO2 electrodes
Murakami, Katsuhisa; Rommel, Mathias; Hudec, Boris; Rosová, Alica; Hušeková, Krístina; Dobročka, Edmund; Rammula, Raul; Kasikov, Arne; Han, Jeong Hwan; Lee, Woongkyu; Song, Seul Ji; Paskaleva, Albena; Bauer, Anton J.; Frey, Lothar; Fröhlich, Karol; Aarik, Jaan; Hwang, Cheol Seong
Journal Article
2014NanoSPV - SPM Technique for Measuring Minority Charge Carrier Diffusion Lengths with High Spatial Resolution: Presentation held at International Conference on Nanoscience and Technology, ICN+T 2014, 21.07. - 25.07.2014, Vail, Colorado
Stumpf, Florian; Rommel, M.; Bauer, A.J.; Frey, L.; Hitzel, F.; Stadelmann, A.
Presentation
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2014NanoSPV - SPM Technique for the Quantitative Measurement of Minority Charge Carrier Diffusion Lengths with High Spatial Resolution: Presentation held at European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2014, September, 22. - 26., 2014, Amsterdam, The Netherlands
Stumpf, Florian; Rommel, Mathias; Bauer, Anton; Frey, Lothar; Hitzel, Frank; Stadelmann, Anja; Bartel, Til
Presentation
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2014A new method to increase the doping efficiency of proton implantation in a high-dose regime
Jelinek, Moriz; Laven, Johannes G.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2014Optical characterization of patterned thin films
Rosu, D.; Petrik, P.; Rattmann, G.; Schellenberger, M.; Beck, U.; Hertwig, A.
Conference Paper
2014Optical polymers with tunable refractive index for nanoimprint technologies
Landwehr, Johannes; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann
Journal Article
2014Optical polymers with tunable refractive index for nanoimprint technologies: Poster presented at MNE 2014, 40th International Conference on Micro and Nano Engineering, Lausanne, Switzerland, September 22-26, 2014
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Förthner, Michael; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Winter, Benjamin; Spiecker, Erdmann
Poster
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2014Optical polymers with tunable refractive index for nanoimprint technologies: Poster presented at NNT 2014, 13th International Conference on Nanoimprint & Nanoprint Technology, Kyoto, Japan, October 22-24, 2014
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdman
Poster
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2014Out-diffusion of cesium and rubidium from amorphized silicon during solid-phase epitaxial regrowth
Maier, R.; Häublein, V.; Ryssel, H.
Conference Paper
2014Process development for nanoimprint at Fraunhofer IISB: Presentation held at SUSS Technology Forum Nanoimprint, June 24, 2014, Grenoble
Fader, Robert; Rumler, Maximilian; Scharin, Marina; Förthner, Michael; Rommel, Mathias
Presentation
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2014Pulsed direct flame deposition and thermal annealing of transparent amorphous indium zinc oxide films as active layers in field effect transistors
Kilian, D.; Polster, S.; Vogeler, I.; Jank, M.P.M.; Frey, L.; Peukert, W.
Journal Article
2014Reliability of monolithic RC-snubbers in MOS-based power modules
Erlbacher, T.; Schwarzmann, H.; Krach, F.; Bauer, A.J.; Berberich, S.E.; Kasko, I.; Frey, L.
Conference Paper
2014Silicon carbide in power electronics: Overcoming the obstacle of bipolar degradation: Presentation held at TMS Annual Meeting 2014 at San Diego, California, February 16-20, 2014; invited talk
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Friedrich, Jochen; Rommel, Mathias
Presentation
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2014Sol-gel preparation of ZrO2-PMMA for thin films transistors
Valcu, E.E.; Musat, V.; Jank, M.; Oertel, S.
Journal Article
2014Structure placement accuracy of wafer level stamps for substrate conformal imprint lithography: Poster presented at NNT 2014, 13th International Conference on Nanoimprint and Nanoprint Technology, Kyoto, Japan, October 22-24, 2014
Fader, Robert; Förthner, Michael; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Verschuuren, Marc; Butschke, Jörg; Irmscher, Mathias; Storace, Eleonora; Ji, Ran; Schömbs, Ulrike
Poster
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2014Systematic analysis of the high- and low-field channel mobility in lateral 4H-SiC MOSFETs
Strenger, C.; Uhnevionak, V.; Mortet, V.; Ortiz, G.; Erlbacher, T.; Burenkov, A.; Bauer, A.J.; Cristiano, F.; Bedel-Pereira, E.; Pichler, P.; Ryssel, H.; Frey, L.
Conference Paper
2014Temperature and electrical field dependence of the ambipolar mobility in n-doped 4H-SiC
Hürner, A.; Bonse, C.; Clemmer, G.; Kallinger, B.; Heckel, T.; Erlbacher, T.; Mitlehner, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2014Thickness mapping of high-k dielectrics at the nanoscale
Trapnauskas, Justinas; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
Journal Article
2013Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rommel, Mathias; Bauer, Anton J.; Rumler, Maximilian; Frey, Lothar; Verschuuren, Marcus Antonius; Laar, Robert van de; Ji, Ran; Schömbs, Ulrike
Journal Article
2013Accuracy of wafer level alignment with substrate conformal imprint lithography: Presentation held at 12th International Conference on Nanoimprint and Nanoprint Technology (NNT), October 21 - 23, 2013, Barcelona, Spain
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Verschuuren, M.A.; Laar, R. van de; Ji, R.; Schömbs, U.
Presentation
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2013Advanced Vacuum Wafer Drying for Thermal Laser Separation Dicing Assessment. Results from European collaborative SEAL project
Le Barillec, Olivier; Davenet, Magali; Bellet, B.; Koitzsch, Matthias; Lewke, Dirk; Schellenberger, Martin; Zühlke, Hans-Ulrich
Conference Paper
2013Alloying of ohmic contacts to n-type 4H-SiC via laser irradiation
Hürner, A.; Schlegl, T.; Adelmann, B.; Mitlehner, H.; Hellmann, R.; Bauer, A.J.; Frey, L.
Conference Paper
2013Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries
Iglesias, V.; Martin-Martinez, J.; Porti, M.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Bersuker, G.
Journal Article
2013Characterization of diverse gate oxides on 4H-SiC 3D trench-MOS structures
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Conference Paper
2013Characterization of thin ZnO films by vacuum ultra-violet reflectometry
Gumprecht, T.; Petrik, P.; Roeder, G.; Schellenberger, M.; Pfitzner, L.; Pollakowski, B.; Beckhoff, B.
Conference Paper
2013Characterization of ZnO structures by optical and X-ray methods
Petrik, P.; Pollakowski, B.; Zakel, S.; Gumprecht, T.; Beckhoff, B.; Lemberger, M.; Labadi, Z.; Baji, Z.; Jank, M.; Nutsch, A.
Journal Article
2013Comparative study of n-LIGBT and n-LDMOS structures on 4H-SiC
Häublein, V.; Temmel, G.; Mitlehner, H.; Rattmann, G.; Strenger, C.; Hürner, A.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2013Comparison of carrier lifetime measurements and mapping using time resolved photoluminescence and µ-PCD: Poster presented at ICSCRM 2013, International Conference on Silicon Carbide and Related Materials, September 29 - October 4, 2013, Miyazaki, Japan
Kallinger, Birgit; Rommel, Mathias; Lilja, L.; Hassan, J.; Booker, Ian; Janzen, Erik; Bergman, J.P.
Poster
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2013Conduction mechanisms in thermal nitride and dry gate oxides grown on 4H-SiC
Ouennoughi, Z.; Strenger, C.; Bourouba, F.; Haeublein, V.; Ryssel, H.; Frey, L.
Journal Article
2013Correlation of interface characteristics to electron mobility in channel-implanted 4H-SiC MOSFETs
Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Krieger, M.; Ryssel, H.
Conference Paper
2013Detailed leakage current analysis of metal-insulator-metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes
Weinreich, W.; Shariq, A.; Seidel, K.; Sundqvist, J.; Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Journal Article
2013Electrical impact of the aluminum p-implant annealing on lateral MOSFET transistors on 4H-SiC n-epi
Noll, S.; Scholten, D.; Grieb, M.; Bauer, A.J.; Frey, L.
Conference Paper
2013Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Journal Article
2013Evaluation of UV-SCIL resists for structure transfer using plasma etching: Presentation held at NNT 2013, 12th International Conference on Nanoimprint & Nanoprint Technology, Barcelona, Catalonia, October 21-23, 2013
Rumler, Maximilian; Rusch, O.; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Brehm, Markus; Kraft, Andreas
Poster
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2013Full wafer nanotopography analysis on rough surfaces using stitched white light interferometry images
Lewke, D.; Schellenberger, M.; Pfitzner, L.; Fries, T.; Tröger, B.; Muehlig, A.; Riedel, F.; Bauer, S.; Wihr, H.
Conference Paper
2013Functional epoxy polymer for direct nano-imprinting of micro-optical elements
Fader, R.; Landwehr, J.; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Völkel, R.; Brehm, M.; Kraft, A.
Journal Article
2013Hall effect characterization of 4H-SiC MOSFETs: Influence of nitrogen channel implantation
Mortet, V.; Bedel-Pereira, E.; Bobo, J.F.; Cristiano, F.; Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.
Conference Paper
2013HCl assisted growth of thick 4H-SiC epilayers for bipolar devices: Poster presented at ICSCRM 2013, International Conference on Silicon Carbide and Related Materials, September 29 - October 4, 2013, Miyazaki, Japan
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Poster
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2013Improving electric behavior and simplifying production of Si-based diodes by using thermal laser separation
Koitzsch, M.; Lewke, D.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Kolb, R.; Zühlke, H.-U.
Conference Paper
2013Influence of epilayer thickness and structural defects on the minority carrier lifetime in 4H-SiC
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Azizi, Maral; Rommel, Mathias; Hecht, Christian; Friedrichs, Peter
Conference Paper
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2013Influence of ion implantation in SiC on the channel mobility in lateral n-channel MOSFETs
Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Pichler, P.; Erlbacher, T.; Ryssel, H.; Frey, L.
Conference Paper
2013Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction
Rommel, Mathias; Jambreck, Joachim D.; Lemberger, Martin; Bauer, Anton J.; Frey, Lothar; Murakami, Katsuhisa; Richter, Christoph; Weinzierl, Philipp
Journal Article
2013Innovative balancing, heating and temperature sensing element for automotive batteries
Filimon, R.; Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; Wenger, M.; Giegerich, M.; März, M.; Frey, L.
Conference Paper
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2013Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts
Adelmann, B.; Hürner, A.; Schlegel, T.; Bauer, A.J.; Frey, L.; Hellmann, R.
Journal Article
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2013Laser melting of nanoparticulate transparent conductive oxide thin films
Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.
Journal Article
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2013Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL): Presentation held at 39th International Conference on Micro and Nano Engineering, 16.-19.09.2013, London
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.; Reboud, V.; Landis, S.
Presentation
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2013Melt depth and time variations during pulsed laser thermal annealing with one and more pulses
Hackenberg, Moritz; Rommel, Mathias; Rumler, M; Lorenz, Jürgen; Pichler, Peter; Huet, Karim; Negru, Razvan; Fisicaro, Giuseppe; Magna, Antonino la; Taleb, Nadjib; Quillec
Conference Paper
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2013Micromolding of micropatterned PDMS surfaces to define the adhesive behavior of human cells in vitro: Poster presented at Jahrestagung der Deutschen Gesellschaft für Biomaterialien, 26. - 28. September 2013, Erlangen
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, J.; Rumler, Maximilian; Herrmann, Benjamin; Fader, Robert; Frey, Lothar; Herrmann, Martin
Poster
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2013On the temperature dependence of the hall factor in n-channel 4H-SiC MOSFETs
Uhnevionak, V.; Burenkov, A.; Strenger, C.; Bauer, A.J.; Pichler, P.
Conference Paper
2013Patterning flat and tilted 4H-SiC by Ga+ resistless lithography and subsequent reactive ion etching: Poster presented at MNE 2013, 39th International Conference on Micro- and Nano-Engineering 2013, London, United Kingdom
Beuer, Susanne; Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Bauer, Anton J.; Frey, Lothar
Poster
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2013Practical aspects of virtual metrology and predictive maintenance model development and optimization
Schöpka, U.; Roeder, G.; Mattes, A.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Scheibelhofer, P.
Conference Paper
2013Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching
Rommel, M.; Rumler, M.; Haas, A.; Bauer, A.J.; Frey, L.
Journal Article
2013Simulation and design optimization of transparent heaters for spectroscopic micro cells
Völlm, H.; Herrmann, J.; Maier, R.; Feili, D.; Häublein, V.; Ryssel, H.; Seidel, H.
Conference Paper
2013Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping
Weinreich, W.; Wilde, L.; Müller, J.; Sundqvist, J.; Erben, E.; Heitmann, J.; Lemberger, M.; Bauer, A.J.
Journal Article
2013Surface modification of flexible plain and microstructured hard and soft PDMS-thin films by plasma treatment and layer deposition for improved usability for biomedical applications: Poster presented at 9th NanoBioEurope (NBE) International Congress & Exhibition - Toulouse 10-12 June 2013
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Rumler, Maximilian; Fader, Robert; Bauer, Anton J.; Frey, Lothar; Hermman, Martin
Poster
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2013Verfahren und Vorrichtung zum parallelen Trennen eines Werkstücks in mehrere Teilstücke
Lorenz, Jürgen; Koitzsch, Matthias; Schellenberger, Martin; Lewke, Dirk; Gumprecht, Thomas
Patent
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2013Verification of near-interface traps models by electrical measurements on 4H-SiC n-channel MOSFETs
Uhnevionak, V.; Strenger, C.; Burenkov, A.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Bauer, A.; Pichler, P.
Conference Paper
2013Virtual metrology for prediction of etch depth in a trench etch process
Roeder, G.; Schellenberger, M.; Pfitzner, L.; Winzer, S.; Jank, S.
Conference Paper
20124H-SiC MOSFETs with a stable protective coating for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2012Ablation Free Dicing of 4H-SiC Wafers with Feed Rates up to 200 mm/s by Using Thermal Laser Separation
Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke Hans-Ulrich
Conference Paper
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2012All electrochemical layer deposition for crystalline silicon solar cell manufacturing: Experiments and interpretation
Kröner, Friedrich; Kröner, Z.; Reichmann, Klaus; Rommel, Mathias
Journal Article
2012Amplitude modulated resonant push-pull driver for piezoelectric transformers in switching power applications
Schwarzmann, Holger; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Conference Paper
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2012Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM: Presentations held at 17th Workshop on Dielectrics in Microelectronics, June 25-27, Dresden, Germany
Rommel, Mathias; Jambreck, Joachim D.; Murakami, Katsuhisa; Lemberger, Martin; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
Presentation
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2012Assessment of a FOUP conditioning equipment for advanced semiconductor application
Otto, M.; Rioufrays, S.; Favre, A.; Leibold, A.; Altmann, R.; Gennaro, S.; Dell'Anna, R.; Canteri, R.; Pfitzner, L.
Conference Paper
2012Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
Rumler, Maximilian; Rommel, Mathias; Erlekampf, Jürgen; Azizi, Maral; Geiger, Tobias; Bauer, Anton J.; Meißner, Elke; Frey, Lothar
Journal Article
2012Comparative investigation on installation space requirements for input filters of DC-link- and matrix converters based on amplitude pseudo-spectra
Schramm, A.; Lanfer, H.; Petzoldt, J.; Rädel, U.; Schwarzmann, H.; Erlbacher, T.
Conference Paper
2012Comparative study of electrical and microstructural properties of 4H-SiC MOSFETs
Strenger, C.; Häublein, V.; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Beltran, A.M.; Schamm-Chardon, S.; Mortet, V.; Bedel-Pereira, E.; Lefebvre, M.; Cristiano, F.
Conference Paper
2012Effect of HfO2 polycrystallinity on distribution of the CAFM-induced TDDB in high-k gate stacks: Poster at 17th Workshop on Dielectrics in Microelectronics, June 25-27, 2012, Dresden
Iglesias, V.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Porti, M.; Martin-Martinez, J.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Bersuker, G.
Poster
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2012Efficient laser induced consolidation of nanoparticulate ZnO thin films with reduced thermal budget
Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.
Journal Article
2012Electrical characterization of nanostructured p-silicon electrodes for bioimpedance measurements on single cell level
Pliquett, Uwe; Westenthanner, Maximilian; Rommel, Mathias; Bauer, Anton J.; Beckmann, Dieter
Conference Paper
2012Eletrisches Überbrückungselement, insbesondere für Speicherzellen eines Energiespeichers
Dorp, Joachim vom; Erlbacher, Tobias; Frey, L.
Patent
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2012Enhancements in resizing single crystalline silicon wafers up to 450 mm by using thermal laser separation
Koitzsch, M.; Lewke, D.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Zühlke, H.U.
Conference Paper
2012Evaluation of resistless Ga+ beam lithography for UV-NIL stamp fabrication: Poster at 11th International Conference on Nanoimprint & Nanoprint Technology, October 24-26, 2012, Silverado Resort, Napa, California
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Matthias; Bauer, Anton J.; Frey, Lothar
Poster
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2012Fabrication and application of shielded probes for conductive AFM measurements: Poster at Seeing at the Nanoscale 2012, 10th annual scientific conference, July 09th - 11th 2012, Bristol, UK
Jambreck, Joachim D.; Rommel, Mathias; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
Poster
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2012Feasibility and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
Erlbacher, T.; Huerner, A.; Bauer, A.J.; Frey, L.
Journal Article
2012Feasiblity and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
Erlbacher, Tobias; Hürner A.; Bauer, Anton J.; Frey, Lothar
Journal Article
2012Framework for integration of virtual metrology and predictive maintenance
Roeder, G.; Mattes, A.; Pfeffer, M.; Schellenberger, M.; Pfitzner, L.; Knapp, A.; Mühlberger, H.; Kyek, A.; Lenz, B.; Frisch, M.; Bichlmeier, J.; Leditzky, G.; Lind, E.; Zoia, S.; Fazio, G.
Conference Paper
2012Functional epoxy polymer for direct nano-imprinting of micro optical elements: Poster at NNT 2012, 11th International Conference on Nanoimprint & Nanoprint Technology, Napa, California
Fader, Robert; Landwehr Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Völkel, Reinhard; Brehm, Markus; Kraft, Andreas
Poster
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2012A generic approach for comparing input filter efforts of voltage- and current source converters
Schramm, A.; Lanfer, H.; Petzoldt, J.; Rädel, U.; Schwarzmann, H.; Erlbacher, T.
Conference Paper
2012Hall effect characterizations of 4H-SiC MOSFETs: Influence of nitrogen channel implantation: Poster at European Conference on Silicon Carbide and Related Materials, ECSCRM 2012, September 2 - 6, 2012, Saint Petersburg
Mortet, V.; Bedel-Pereira, E.; Bobo, J.; Strenger, C.; Uhnevionak, V.; Burenkov, A.; Cristiano, F.; Bauer, A.
Poster
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2012IMPROVE - a joint European effort to boost efficiency in semiconductor manufacturing: Presentation held at APC Conference XXIV 2012, 10.09.2012 to 12.09.2012, Ann Arbor, Michigan
Schellenberger, Martin; Koitzsch, Matthias; Roeder, Georg; Pfeffer, Markus; Schöpka, Ulrich; Mattes, Andreas; Pfitzner, Lothar
Presentation
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2012Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Berberich, Sven E.; Dorp, Joachim vom; Frey, Lothar
Conference Paper
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2012Influence of epilayer thickness and structural defects on the minority carrier lifetime in 4H-SiC: Poster at European Conference on Silicon Carbide and Related Materials, ECSCRM 2012, September 2 - 6, 2012, Saint Petersburg
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Azizi, Maral; Rommel, Mathias; Hecht, Christian; Friedrichs, Peter
Poster
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2012Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Journal Article
2012Measurement strategy for dielectric ultra-thin film characterization by vacuum ultra-violet reflectometry
Gumprecht, T.; Roeder, G.; Schellenberger, M.; Pfitzner, L.
Conference Paper
2012Nano-analytical and electrical characterization of 4H-SiC MOSFETs
Beltran, A.M.; Schamm-Chardon, S.; Mortet, V.; Lefebvre, M.; Bedel-Pereira, E.; Cristiano, F.; Strenger, C.; Häublein, V.; Bauer, A.J.
Conference Paper
2012Nanoscale characterization of TiO2 films grown by atomic layer deposition: Poster at 17th Workshop on Dielectrics in Microelectronics, June 25-27, 2012, Dresden
Murakami, Katsuhisa; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Hudec, Boris; Rosova, A.; Hueková, K.; Fröhlich, Karol; Kasikov, A.; Ramula, R.; Aarik, J.; Han, J.H.; Han, S.; Lee, W.; Song, S.J.; Hwang, C.S.
Poster
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2012Novel cost-efficient contactless distributed monitoring concept for smart battery cells
Lorentz, V.R.H.; Wenger, M.M.; Grosch, J.L.; Giegerich, M.; Jank, M.P.M.; März, M.; Frey, L.
Conference Paper
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2012Novel organic polymer for UV-enhanced substrate conformal imprint lithography
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.
Journal Article
2012Ohmic and rectifying contacts on bulk AlN for radiation detector applications
Erlbacher, Tobias; Bickermann, Matthias; Kallinger, Birgit; Meissner, Elke; Bauer, Anton J.; Frey, Lothar
Journal Article
2012Plasma-assisted atomic layer deposition of alumina at room temperature: Poster at 17th Workshop on Dielectrics in Microelectronics (WoDiM 2012), June 25-27, 2012, Dresden
Lemberger, Martin; Fromm, Timo; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
Poster
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2012Predictive sampling approach to dynamically optimize defect density control operations
Pfeffer, M.; Oechsner, R.; Pfitzner, L.; Eckert, S.; Hartmann, A.; Gold, H.; Biebl, G.; Kaspar, J.
Conference Paper
2012Purity of ion beams: Analysis and simulation of mass spectra and mass interferences in ion implantation
Häublein, V.; Ryssel, H.; Frey, L.
Journal Article
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2012Reference samples for ultra trace analysis of organic compounds on substrate surfaces
Nutsch, A.; Beckhoff, B.; Borionetti, G.; Codegoni, D.; Grasso, S.; Hoenicke, P.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.-L.
Conference Paper
2012Reliability characterization of dielectrics in 200V trench capacitors: Poster at Workshop on Dielectrics in Microelectronics, WoDiM 2012, Dresden
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Dorp, Joachim vom; Frey, Lothar
Poster
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2012Resistive circuit, circuit layout and driver
Berberich, Sven E.; Wintrich, Arendt; Erlbacher, Tobias
Patent
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2012Significant on-resistance reduction of LDMOS devices by intermitted trench gates integration
Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Journal Article
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2012Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article
2012Simulationsgestützte Untersuchung von logistischen Optimierungsstrategien bei Halbleiterfertigungsprozessen
Pfeffer, M.
Dissertation
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2012Solid-phase epitaxy of silicon amorphized by implantation of the alkali elements rubidium and cesium
Maier, R.; Häublein, V.; Ryssel, H.; Völlm, H.; Feili, D.; Seidel, H.; Frey, L.
Conference Paper
2012Stationsanordnung zur Bearbeitung und/oder Vermessen von Halbleiterscheiben sowie Bearbeitungsverfahren
Schellenberger, Martin; Lewke, Dirk
Patent
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2012Structural and reliability analysis of ohmic contacts to SiC with a stable protective coating for harsh environment applications
Daves, W.; Kraus, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Journal Article
2012Thermal laser separation and its applications
Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke, Hans-Ulrich
Journal Article
2012TiO2-based metal-insulator-metal structures for future DRAM storage capacitors
Fröhlich, K.; Hudec, B.; Tapajna, M.; Hueková, K.; Rosova, A.; Eliá, P.; Aarik, J.; Rammula, R.; Kasikov, A.; Arroval, T.; Aarik, L.; Murakami, Katsuhisa; Rommel, Mathias; Bauer, Anton J.
Conference Paper
2012Verification of near-interface traps by electrical measurements on 4H-SiC n-channel MOSFETs: Presentation held at the European Conference on Silicon Carbide and Related Materials, ECSCRM 2012, September 2 - 6, 2012, Saint Petersburg
Uhnevionak, V.; Strenger, C.; Burenkov, A.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Bauer, A.; Pichler, P.
Presentation
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2012Virtual Equipment for benchmarking Predictive Maintenance algorithms
Mattes, A.; Schöpka, U.; Schellenberger, M.; Scheibelhofer, P.; Leditzky, G.
Conference Paper
2012Der "Zauberspiegel" als Messprinzip
Tobisch, Alexander; Schellenberger, Martin; Pfitzner, Lothar
Journal Article
20114H-SiC n-MOSFET logic circuits for high temperature operation
Le-Huu, M.; Grieb, M.; Schrey, F.F.; Schmitt, H.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2011Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications
Daves, W.; Krauss, A.; Behnel, N.; Häublein, V.; Bauer, A.; Frey, L.
Journal Article
2011Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy
Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article
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2011Comparative study on metallization and passivation materials for high temperature sensor applications
Daves, W.; Krauss, A.; Le-Huu, M.; Kronmüller, S.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2011Conduction mechanisms and environmental sensitivity of solution-processed silicon nanoparticle layers for thin-film transistors
Weis, S.; Körmer, R.; Jank, M.P.M.; Lemberger, M.; Otto, M.; Ryssel, H.; Peukert, W.; Frey, L.
Journal Article
2011Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy: Poster at International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, May 23-26, 2011, Grenoble, France
Murakami, K.; Rommel, M.; Yanev, V.; Bauer, A.J.; Frey, L.
Poster
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2011Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Murakami, Katsuhisa; Rommel, Mathias; Yanev, Vasil; Bauer, Anton J.; Frey, Lothar
Conference Paper
2011Determination of the dill parameters of thick positive resist for use in modeling applications
Roeder, G.; Liu, S.; Aygun, G.; Evanschitzky, P.; Erdmann, A.; Schellenberger, M.; Pfitzner, L.
Conference Paper
2011Developing a framework for virtual metrology and predictive maintenance
Schellenberger, Martin; Roeder, Georg; Mattes, Andreas; Pfeffer, Markus; Pfitzner, Lothar; Knapp, Alexander; Mühlberger, Heribert; Bichlmeier, Josef; Valeanu, Christian; Kyek, Andreas; Lenz, Benjamin; Frisch, Markus; Leditzky, Günther
Journal Article
2011Dielectric layers suitable for high voltage integrated trench capacitors
Dorp, J. vom; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Frey, L.
Journal Article
Fulltext
2011Dopant profiles in silicon created by MeV hydrogen implantation: Influence of annealing parameters
Laven, J.G.; Schulze, H.-J.; Häublein, V.; Niedernostheide, F.-J.; Schulze, H.; Ryssel, H.; Frey, L.
Journal Article
2011Dünnfilmtransistor
Jank, Michael; Teuber, Erik; Lemberger, M.; Huang, J.
Patent
Fulltext
2011Effect of increased oxide hole trap density due to nitrogen incorporation at the SiO2/SiC interface on F-N current degradation
Strenger, C.; Bauer, A.J.; Ryssel, H.
Conference Paper
2011Effects of oxygen and forming gas annealing on ZnO TFTs
Huang, J.; Radhakrishna, U.; Lemberger, M.; Jank, M.P.M.; Polster, S.; Ryssel, H.; Frey, L.
Conference Paper
2011Electrical characterization of lateral 4H-SiC MOSFETs in the temperature range of 25 to 600 °C for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2011Enhancement of the stability of Ti and Ni ohmic contacts to 4H-SiC with a stable protective coating for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Journal Article
2011EPR investigations of non-oxidized silicon nanoparticles from thermal pyrolysis of silane
Körmer, R.; Otto, M.; Wu, J.; Jank, M.P.M.; Frey, L.; Peukert, W.
Journal Article
2011Experiments and simulation of the diffusion and activation of the n-Type dopants P, As, and Sb implanted into germanium
Koffel, S.; Kaiser, R.J.; Bauer, A.J.; Amon, B.; Pichler, P.; Lorenz, J.; Frey, L.; Scheiblin, P.; Mazzocchi, V.; Barnes, J.-P.; Claverie, A.
Journal Article
2011Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Journal Article
2011Gate oxide reliability at the nano-scale evaluated by combining cAFM and CVS
Erlbacher, T.; Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article
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2011Germanium substrate loss during thermal processing
Kaiser, R.J.; Koffel, S.; Pichler, P.; Bauer, A.J.; Amon, B.; Frey, L.; Ryssel, H.
Journal Article
2011High pressure oxidation of 4H-SiC in nitric acid vapor
Kalai Selvi, K.; Sreenidhi, T.; Dasgupta, N.; Ryssel, H.; Bauer, A.
Journal Article
2011A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers
Murakami, M.; Rommel, M.; Yanev, V.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Journal Article
2011Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1-xAlxO2/TiN metal-insulator-metal structures
Paskaleva, A.; Lemberger, M.; Bauer, A.J.; Frey, L.
Journal Article
2011Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC
Schmitt, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2011Investigation of the reliability of 4H-SiC MOS devices for high temperature applications
Le-Huu, M.; Schmitt, H.; Noll, S.; Grieb, M.; Schrey, F.F.; Bauer, A.J.; Frey, L.; Ryssel, H.
Journal Article
2011Jet printing of colloidal solutions - numerical modeling and experimental verification of the influence of ink and surface parameters on droplet spreading
Schneider, O.; Epple, P.; Teuber, E.; Meyer, B.; Jank, M.P.M.; Rauh, C.; Delgado, A.
Journal Article
2011Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography: Poster at MNE 2011, 37th International Conference on Micro&Nano Engineering 2011, 19.09.-23.09.2011, Berlin, Germany
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Poster
Fulltext
2011Light confinement by structured metal tips for antenna-based scanning near-field optical microscopy
Jambreck, J.D.; Böhmler, M.; Rommel, M.; Hartschuh, A.; Bauer, A.J.; Frey, L.
Conference Paper
2011Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article
2011Modulares Steuerungskonzept für integrierte Messtechnik in der Halbleiterfertigung am Beispiel einer Mehrkammerprozessanlage
Schellenberger, Martin; Ryssel, H.; Frey, L.
Dissertation
2011Monolithic RC-snubber for power electronic applications
Dorp, Joachim vom; Berberich, Sven E.; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Conference Paper
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2011Novel polymers for UV-enhanced substrate conformal imprint lithography: Poster at MNE 2011, 37th International Conference on Micro&Nano Engineering 2011, 19.09.-23.09.2011, Berlin, Germany
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.
Poster
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2011A novel PWM control for a bi-directional full-bridge DC-DC converter with smooth conversion mode transitions
Lorentz, V.R.H.; Schwarzmann, H.; März, M.; Bauer, A.J.; Ryssel, H.; Frey, L.; Poure, P.; Braun, F.
Journal Article
2011Properties of SiO2 and Si3N4 as gate dielectrics for printed ZnO transistors
Walther, S.; Polster, S.; Meyer, B.; Jank, M.; Ryssel, H.; Frey, L.
Journal Article
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2011Reliability of nitrided gate oxides for N- and P-type 4H-SiC(0001) metal-oxide-semiconductor devices
Noborio, M.; Grieb, M.; Bauer, A.J.; Peters, D.; Friedrichs, P.; Suda, J.; Kimoto, T.
Journal Article
2011Simple and efficient method to fabricate nano-cone arrays by FIB milling demonstrated on planar substrates and on protruded structures: Poster at MNE 2011, 37th International Conference on Micro&Nano Engineering 2011, 19.09.-23.09.2011, Berlin, Germany
Rommel, M.; Bauer, A.J.; Frey, L.
Poster
Fulltext
2011Thermal Laser Separation (TLS) for separating multi-crystalline silicon wafers: A comparison with state-of-the-art methods: Poster at 26th European Photovoltaic Solar Energy Conference 2011, Hamburg, Germany
Koitzsch, Matthias; Schellenberger, Martin
Poster
Fulltext
2011Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacks
Paskaleva, A.; Lemberger, M.; Atanassova, E.; Bauer, A.J.
Journal Article
2011Tuning of charge carrier density of ZnO nanoparticle films by oxygen plasma treatment
Walther, S.; Polster, S.; Jank, M.P.M.; Thiem, H.; Ryssel, H.; Frey, L.
Journal Article
2011UV-enhanced substrate conformal imprint lithography using an epoxy based polymer: Poster at NNT 2011, 10th International Conference on Nanoimprint and Nanoprint Technology, 19.10.-21.10.2011, The Shilla Jeju, Korea
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Kraft, A.
Poster
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2011Verfahren zur Herstellung eines Siliziumschicht
Jank, M.; Lukas, S.
Patent
Fulltext
2011A virtual equipment as a test bench for evaluating virtual metrology algorithms
Mattes, Andreas; Koitzsch, Matthias; Lewke, Dirk; Müller-Zell, Michael; Schellenberger, Martin
Conference Paper
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2011Virtual equipment. A test bench for virtual metrology algorithms: Presentation held at ERIC Conference 2011, Leixlip, October 12th 2011
Mattes, Andreas; Lewke, Dirk; Schellenberger, Martin
Presentation
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2010Advanced process control - lessons learned from semiconductor manufacturing
Schellenberger, M.; Roeder, G.; Öchsner, R.; Schöpka, U.; Kasko, I.
Journal Article
2010Aerosol synthesis of silicon nanoparticles with narrow size distribution. Pt.1: Experimental investigations
Körmer, R.; Jank, M.P.M.; Ryssel, H.; Schmid, H.-J.; Peukert, W.
Journal Article
2010Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
Hinz, J.; Bauer, A.J.; Frey, L.
Journal Article
2010Characterization of thickness variations of thin dielectric layers at a nanoscale using Scanning Capacitance Microscopy: Poster at WoDiM 2010, 16th Workshop on Dielectric Materials 2010, 28.06.-30.06.2010, Bratislava, Slovak Republic
Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
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2010Comparison of the threshold-voltage stability of SiC MOSFETs with thermally grown and deposited gate oxides
Grieb, M.; Noborio, M.; Peters, D.; Bauer, A.J.; Friedrichs, P.; Kimoto, T.; Ryssel, H.
Conference Paper
2010Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques
Rommel, M.; Spoldi, G.; Yanev, V.; Beuer, S.; Amon, B.; Jambreck, J.; Petersen, S.; Bauer, A.J.; Frey, L.
Journal Article
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2010Deep doping profiles in silicon created by MeV hydrogen implantation: Influence of implantation parameters
Laven, J.G.; Schulze, H.-J.; Häublein, V.; Niedernostheide, F.-J.; Schulze, H.; Ryssel, H.; Frey, L.
Conference Paper
2010Detection and electrical characterization of defects at the SiO2/4H-SiC interface
Krieger, M.; Beljakow, S.; Zippelius, B.; Afanas´ev, V.V.; Bauer, A.J.; Nanen, Y.; Kimoto, T.; Pensl, G.
Conference Paper
2010Direct imprinting, post processing, and characterization of functional UV-curing materials: Poster at NNT 2010, 9th International Conference on Nanoimprint and Nanoprint Technology, Copenhagen, Denmark
Schmitt, H.; Kett, F.; Fader, R.; Rommel, M.; Bauer, A.J.; Hornung, M.; Frey, L.
Poster
Fulltext
2010Effective work function tuning in high-kappa dielectric metal-oxide-semiconductor stacks by fluorine and lanthanide doping
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Journal Article
2010Effects of oxygen and forming gas annealing on ZnO-TFTs: Poster at MRS Fall Meeting 2010, Boston
Huang, J.; Krishna, U.R.; Lemberger, M.; Jank, M.P.M.; Polster, S.; Ryssel, H.; Frey, L.
Poster
Fulltext
2010Electrical and topographical characterization of aluminum implanted layers in 4H silicon carbide
Rambach, M.; Bauer, A.J.; Ryssel, H.
Book Article
2010Electrical characterization and reliability of nitrided-gate insulators for N- and P-type 4H-SiC MIS devices
Noborio, M.; Grieb, M.; Bauer, A.J.; Peters, D.; Friedrichs, P.; Suda, J.; Kimoto, T.
Conference Paper
2010Electrical scanning probe microscopy techniques for the detailed characterization of high-k dielectric layers
Rommel, M.; Yanev, V.; Paskaleva, A.; Erlbacher, T.; Lemberger, M.; Bauer, A.J.; Frey, L.
Conference Paper
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2010Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
Hinz, J.; Bauer, A.J.; Thiede, T.; Fischer, R.A.; Frey, L.
Journal Article
2010Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article
2010Fabrication of silicon carbide micropillar arrays from polycarbosilanes
Jang, Y.-S.; Zollfrank, C.; Jank, M.; Greil, P.
Journal Article
2010Full wafer microlens replication by UV imprint lithography
Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Bich, A.; Eisner, M.; Völkel, R.; Hornung, M.
Conference Paper
Fulltext
2010Guided phase separation of polymer blend thin films on ion beam-induced pre-patterned substrates
Karade, Y.; Madani-Grasset, F.; Berger, R.; Csiba, V.; Rommel, M.; Dietzel, A.
Journal Article
2010Highly sensitive wavefront sensor for visual inspection of bare and patterned silicon wafers
Lazareva, I.; Nutsch, A.; Schellenberger, M.; Pfitzner, L.; Frey, L.
Conference Paper
2010Honeycomb voids due to ion implantation in germanium
Kaiser, R.J.; Koffel, S.; Pichler, P.; Bauer, A.J.; Amon, B.; Claverie, A.; Benassayag, G.; Scheiblin, P.; Frey, L.; Ryssel, H.
Journal Article
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2010Impact of forming gas annealing on ZnO-TFTs
Huang, J.; Krishna, U.R.; Lemberger, M.; Jank, M.P.M.; Ryssel, H.; Frey, L.
Conference Paper
Fulltext
2010The impact of helium co-implantation on hydrogen induced donor profiles in float zone silicon
Laven, J.G.; Job, R.; Schulze, H.-J.; Niedernostheide, F.-J.; Häublein, V.; Schulze, H.; Schustereder, W.; Ryssel, H.; Frey, L.
Conference Paper
2010The impact of helium co-implantation on hydrogen induced donor profiles in float zone silicon
Schulze, H.-J.; Niedernostheide, F.-J.; Häublein, V.; Schulze, H.; Schustereder, W.; Ryssel, H.; Frey, L.; Job, R.; Laven, J.G.
Journal Article
2010Impact of temperature increments on tunneling barrier height and effective electron mass for plasma nitrided thin SiO2 layer on a large wafer area
Aygun, G.; Roeder, G.; Erlbacher, T.; Wolf, M.; Schellenberger, M.; Pfitzner, L.
Journal Article
2010Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminum implanted 4H SiC: Poster at ECSCRM 2010, 8th European Conference on Silicon Carbide and Related Materials, 29.08.-02.09.2010, Oslo, Norway
Schmitt, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Poster
Fulltext
2010Influence of annealing temperature and measurement ambient on TFTs based on gas phase synthesized ZnO nanoparticles
Walther, S.; Schäfer, S.; Jank, M.P.M.; Thiem, H.; Peukert, W.; Ryssel, H.; Frey, L.
Journal Article
2010Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations
Rommel, M.; Jambreck, J.D.; Ebm, C.; Platzgummer, E.; Bauer, A.J.; Frey, L.
Journal Article
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2010Integrierbare Bauelemente zur Erhöhung der Betriebssicherheit elektronischer Systemkomponenten im Automobil
Dorp, J. vom; Erlbacher, T.; Lorentz, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2010Lanthanoid implantation for effective work function control in NMOS high-k/metal gate stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2010Lossless average inductor current sensor for CMOS integrated DC-DC converters operating at high frequencies
Lorentz, V.R.H.; Berberich, S.E.; März, M.; Bauer, A.J.; Ryssel, H.; Poure, P.; Braun, F.
Journal Article
2010Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Poster at MNE 2010, 36th International Conference on Micro and Nano Engineering, Genoa, Italy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
Fulltext
2010Modeling of the effective work function instability in metal/high-kappa dielectric stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Journal Article
2010Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application: Poster at 14th European FIB Users Group Meeting (EFUG 2010), Gaeta, Italy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
Fulltext
2010NMOS logic circuits using 4H-SiC MOSFETs for high temperature applications
Le-Huu, M.; Schrey, F.F.; Grieb, M.; Schmitt, H.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2010Optical inspection of flat reflective surfaces by a wave front sensor
Lazareva, I.; Nutsch, A.; Pfitzner, L.; Frey, L.
Conference Paper
2010Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Clarysse, T.; Moussa, A.; Parmentier, B.; Bogdanowicz, J.; Vandervorst, W.; Bender, H.; Pfeffer, M.; Schellenberger, M.; Nielsen, P.F.; Thorsteinsson, S.; Lin, R.; Petersen, D.
Journal Article
2010Power semiconductor joining through sintering of Ag-nanoparticles: Analysis of suitability of different powders using DSC and TGA measurements
Knörr, M.; Schletz, A.; Oertel, S.; Jank, M.
Conference Paper
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2010Reduced on resistance in LDMOS devices by integrating trench gates into planar technology
Erlbacher, T.; Bauer, A.J.; Frey, L.
Journal Article
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2010SiC ceramic micropatterns from polycarbosilanes
Jang, Y.-S.; Jank, M.; Maier, V.; Durst, K.; Travitzky, N.; Zollfrank, C.
Journal Article
2010Simulation of focused ion beam etching by coupling a topography simulator and a Monte-Carlo sputtering yield simulator
Kunder, D.; Baer, E.; Sekowski, M.; Pichler, P.; Rommel, M.
Journal Article
2010Trench gate integration into planar technology for reduced on-resistance in LDMOS devices: Poster presented at Symposium on Power Semiconductor Devices & ICs 2010, Hiroshima, Japan
Erlbacher, T.; Rattmann, G.; Bauer, A.J.; Frey, L.
Poster
Fulltext
2010Trench gate integration into planar technology for reduced on-resistance in LDMOS devices
Erlbacher, T.; Rattmann, G.; Bauer, A.J.; Frey, L.
Conference Paper
2010Virtual equipment engineering: A continuous simulation chain leveraging development of new semiconductor manufacturing equipment
Mattes, A.; Koitzsch, M.; Schellenberger, M.; Pfitzner, L.
Conference Paper
2010Virtual equipment engineering: A novel approach for the integrated development of semiconductor manufacturing equipment
Koitzsch, M.; Mattes, A.; Schellenberger, M.; Pfitzner, L.; Frey, L.
Conference Paper
2010Yield model for estimation of yield impact of semiconductor manufacturing equipment
Nutsch, A.; Oechsner, R.; Schoepka, U.; Pfitzner, L.
Conference Paper
2009Analysis of the DC-arc behavior of a novel 3D-active fuse
Dorp, J. vom; Berberich, S.E.; Bauer, A.J.; Ryssel, H.
Conference Paper
2009Characterization of organic contamination in semiconductor manufacturing processes
Nutsch, A.; Beckhoff, B.; Bedana, G.; Borionetti, G.; Codegoni, D.; Grasso, S.; Guerinoni, G.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.; Simone, D. de; Frey, L.
Conference Paper
2009Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale
Yanev, V.; Erlbacher, T.; Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article
2009Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale: Poster at 16th biannual conference of Insulating Films on Semiconductors (INFOS 2009), 29.06.-01.07.2009, Cambridge University, UK
Yanev, V.; Erlbacher, T.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
Fulltext
2009Comparison of silicon surface preparation methods for measurement of minority carrier lifetime using the microwave photoconductive decay (µ-PCD) coupled with continuous corona charge (Charge-PCD)
Pavelka, T.; Pap, A.; Kenesei, P.; Varga, M.; Novinics, F.; Tallián, M.; Borionetti, G.; Guaglio, G.; Pfeffer, M.; Don, E.
Conference Paper
2009Complementary metrology within a European joint laboratory
Nutsch, A.; Beckhoff, B.; Altmann, R.; Berg, J.A. van den; Giubertoni, D.; Hoenicke, P.; Bersani, M.; Leibold, A.; Meirer, F.; Müller, M.; Pepponi, G.; Otto, M.; Petrik, P.; Reading, M.; Pfitzner, L.; Ryssel, H.
Conference Paper
2009Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSixO2-x thin films using tunneling atomic force microscopy
Weinreich, W.; Wilde, L.; Kücher, P.; Lemberger, M.; Yanev, V.; Rommel, M.; Bauer, A.J.; Erben, E.; Heitmann, J.; Schröder, U.; Oberbeck, L.
Conference Paper
2009Deposition of niobium nitride thin films from Tert-Butylamido-Tris-(Diethylamido)-Niobium by a modified industrial MOCVD reactor
Thiede, T.B.; Parala, H.; Reuter, K.; Passing, G.; Kirchmeyer, S.; Hinz, J.; Lemberger, M.; Bauer, A.J.; Barreca, D.; Gasparotto, A.; Fischer, R.A.
Journal Article
2009Effective work function engineering by lanthanide ion implantation of metal-oxide semiconductor gate stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.
Conference Paper
2009Electrical characterization of MOS structures with deposited oxides annealed in N2O or NO
Grieb, M.; Noborio, M.; Peters, D.; Bauer, A.J.; Friedrichs, P.; Kimoto, T.; Ryssel, H.
Conference Paper
2009Experimental observation of FIB induced lateral damage on silicon samples
Spoldi, G.; Beuer, S.; Rommel, M.; Yanev, V.; Bauer, A.J.; Ryssel, H.
Conference Paper
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2009Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing: Poster at the MNE 2009, 35th International Conference on Micro and Nano Engineering, Ghent, Belgium
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
Fulltext
2009Full wafer microlens replication by UV imprint lithography: Poster at the MNE 2009, 35th International Conference on Micro and Nano Engineering, Ghent, Belgium
Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Bich, A.; Eisner, M.; Voelkel, R.; Hornung, M.
Poster
Fulltext
2009Highly sensitive wavefront sensor for characterization of micro- to nanometer-scale surface flatness deviations
Lazareva, I.; Nutsch, A.; Pfitzner, L.; Frey, L.
Conference Paper
2009Impact of interface variations on J-V and C-V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1-x)AlxO2 films
Weinreich, W.; Reiche, R.; Lemberger, M.; Jegert, G.; Müller, J.; Wilde, L.; Teichert, S.; Heitmann, J.; Erben, E.; Oberbeck, L.; Schröder, U.; Bauer, A.J.; Ryssel, H.
Conference Paper
2009Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations
Rommel, M.; Jambreck, J.; Ebm, C.; Platzgummer, E.; Bauer, A.; Frey, L.
Poster
Fulltext
2009Influence of N2 and NH3 annealing on the nitrogen incorporation and k-value of thin ZrO2 layers
Weinreich, W.; Ignatova, V.A.; Wilde, L.; Teichert, S.; Lemberger, M.; Bauer, A.J.; Reiche, R.; Erben, E.; Heitmann, J.; Oberbeck, L.; Schröder, U.
Journal Article
2009Influence of the amorphous/crystalline phase of Zr1-xAlxO2 high-k layers on the capacitance performance of metal insulator metal stacks
Pakaleva, A.; Lemberger, M.; Bauer, A.J.; Weinreich, W.; Heitmann, J.; Erben, E.; Schröder, U.; Oberbeck, L.
Journal Article
2009Influence of the oxidation temperature and atmosphere on the reliability of thick gate oxides on the 4H-SiC C(000-1) face
Grieb, M.; Peters, D.; Bauer, A.J.; Friedrichs, P.; Ryssel, H.
Conference Paper
2009Lanthanum implantation for threshold voltage control in metal/high-k devices
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2009Light-load efficiency increase in high-frequency integrated DC–DC converters by parallel dynamic width controlling
Lorentz, V.; Berberich, S.; März, M.; Bauer, A.; Ryssel, H.; Poure, P.; Braun, F.
Journal Article
2009Monitoring system for airborne molecular contamination (AMC) in semiconductor manufacturing areas and micro-environments
Otto, M.; Leibold, A.; Wulf, L.; Hurlebaus, M.; Pfitzner, L.
Conference Paper
2009Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulation
Pfeffer, M.; Pfitzner, L.; Ocker, B.; Öchsner, R.; Ryssel, H.; Verdonck, P.
Conference Paper
2009Properties of TaN thin films produced using PVD linear dynamic deposition technique
Kozlowska, M.; Oechsner, R.; Pfeffer, M.; Bauer, A.J.; Meissner, E.; Pfitzner, L.; Ryssel, H.; Maass, W.; Langer, J.; Ocker, B.; Schmidbauer, S.; Gonchond, J.-P.
Journal Article
2009Search for future high-k dielectrics, boundary conditions and examples
Bauer, A.J.; Lemberger, M.; Erlbacher, T.; Weinreich, W.
Conference Paper
2009Silicon based trench hole power capacitor
Berberich, S.E.; Dorp, J. vom; Bauer, A.J.; Ryssel, H.
Journal Article
2009Suppression of parasitic electron injection in SONOS-type memory cells using high-k capping layers
Erlbacher, T.; Graf, T.; DasGupta, N.; Bauer, A.J.; Ryssel, H.
Conference Paper
Fulltext
2009UV nanoimprint lithography process optimization for electron device manufacturing on nanosized scale
Schmitt, H.; Amon, B.; Beuer, S.; Petersen, S.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Conference Paper
Fulltext
2009Vorrichtung und Verfahren zum Beschichten eines Substrates
Schöpka, U.; Öchsner, R.; Pfeffer, M.; Maass, W.; Langer, J.; Ocker, B.
Patent
Fulltext
2009Wave front sensor for highly accurate characterization of flatness on wafer surfaces
Nutsch, A.; Bucourt, S.; Grandin, T.; Lazareva, I.; Pfitzner, L.
Conference Paper
2008Characterization of Ru and RuO2 thin films prepared by pulsed metal organic chemical vapor deposition
Roeder, G.; Manke, C.; Baumann, P.K.; Petersen, S.; Yanev, V.; Gschwandtner, A.; Ruhl, G.; Petrik, P.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.
Conference Paper
2008Custom-specific UV nanoimprint templates and life-time of antisticking layers
Schmitt, H.; Zeidler, M.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Conference Paper
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2008DC-arc behavior of a novel active fuse
Dorp, J. vom; Berberich, S.E.; Bauer, A.J.; Ryssel, H.
Conference Paper
2008Degradation of the minority carrier lifetime caused by Mn-correlated defects in Ga-implanted Si:P
Beljakowa, S.; Pensl, G.; Rommel, M.
Conference Paper
2008Detailed carrier lifetime analysis of iron-contaminated boron-doped silicon by comparison of simulation and measurement
Rommel, M.; Bauer, A.J.; Ryssel, H.
Journal Article
2008Determination of flatness on patterned wafer surfaces using wavefront sensing methods
Nutsch, A.; Pfitzner, L.; Grandin, T.; Levecq, X.; Bucourt, S.
Conference Paper
2008Electrical AFM techniques for the advanced characterization of materials in semiconductor technology: Poster at NanoScale VI, Berlin, Germany, July 9-11, 2008
Yanev, V.; Rommel, M.; Spoldi, G.; Beuer, S.; Amon, B.; Petersen, S.; Lugstein, A.; Steiger, A.; Bauer, A.J.; Ryssel, H.
Poster
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2008Electrical and topographical characterization of aluminum implanted layers in 4H silicon carbide
Rambach, M.; Bauer, A.J.; Ryssel, H.
Journal Article
2008Evaluation of MOCVD grown niobium nitride films as gate electrode for advanced CMOS technology
Thiede, T.; Parala, H.; Reuter, K.; Passing, G.; Kirchmeyer, S.; Hinz, J.; Lemberger, M.; Bauer, A.J.; Fischer, R.A.
Conference Paper
2008Experimental observation of FIB induced lateral damage on silicon samples: Poster at 34th International Conference on Micro&Nano Engineering, MNE 2008, Athens
Spoldi, G.; Beuer, S.; Rommel, M.; Yanev, V.; Bauer, A.J.; Ryssel, H.
Poster
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2008HfSiO/SiO2- and SiO2/HfSiO/SiO2-gate stacks for non-volatile memories
Erlbacher, T.; Jank, M.P.M.; Lemberger, M.; Bauer, A.J.; Ryssel, H.
Journal Article
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2008High-k: Latest developments and perspectives
Bauer, A.J.; Lemberger, M.; Erlbacher, T.; Weinreich, W.
Book Article
2008Hightech-Materialien für die Elektronik von morgen
Jank, M.P.; Bauer, A.J.; Fischer, B.; Slama, A.; Potinecke, T.
Book Article
2008Improved insight in charge trapping of high-k ZrO2/SiO2 stacks by use of tunneling atomic force microscopy
Paskaleva, A.; Yanev, V.; Rommel, M.; Lemberger, M.; Bauer, A.J.
Journal Article
2008Ion implantation into nanoparticulate functional layers
Walther, S.; Jank, M.P.M.; Ebbers, A.; Ryssel, H.
Conference Paper
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2008Junction photovoltage metrology and high resolution mapping of ion implants electrically isolated from the wafer surface
Korsós, F.; Kis-Szabo, K.; Don, E.; Pap, A.; Pavelka, T.; Laviron, C.; Pfeffer, M.
Conference Paper
2008Recent improvements in the integration of field emitters into scanning probe microscopy sensors
Beuer, S.; Rommel, M.; Petersen, S.; Amon, B.; Sulzbach, T.; Engl, W.; Bauer, A.J.; Ryssel, H.
Conference Paper
2008Schichten hoher Dielektrizitätskonstante für den Einsatz in ladungsbasierten nichtflüchtigen Speicherzellen
Erlbacher, T.
Dissertation
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2008Self-aligned growth of organometallic layers for nonvolatile memories: Comparison of liquid-phase and vapor-phase deposition
Erlbacher, T.; Jank, M.P.M.; Ryssel, H.; Frey, L.; Engl, R.; Walter, A.; Sezi, R.; Dehm, C.
Journal Article
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2008Simulation of mass interferences considering charge exchange events and dissociation of molecular ions during extraction
Häublein, V.; Frey, L.; Ryssel, H.
Conference Paper
2008SSRM characterisation of FIB induced damage in silicon
Beuer, S.; Yanev, V.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Conference Paper
2008Threshold voltage engineering by lanthanide doping of the MOS gate stack
Fet, A.; Häublein, V.; Ryssel, H.
Conference Paper
2008Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics
Yanev, V.; Rommel, M.; Lemberger, M.; Petersen, S.; Amon, B.; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Paskalev, A.; Weinreich, W.; Fachmann, C.; Heitmann, J.; Schroeder, U.
Journal Article
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2008UV nanoimprint lithography process optimization for electron device manufacturing on nanosized scale: Poster at MNE 2008, 34th International Conference on Micro and Nano Engineering, Athens, Greece
Schmitt, H.; Amon, B.; Petersen, S.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Poster
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2007Accurate parameter extraction for the simulation of direct structuring by ion beams
Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H.
Conference Paper
Fulltext
2007Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites
Oechsner, R.; Pfeffer, M.; Frickinger, J.; Schellenberger, M.; Roeder, G.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.; Kaushik, V.; Renaud, D.; Danel, A.; Claeys, C.; Bearda, T.; Lering, M.; Graef, M.; Murphy, B.; Walther, H.; Hury, S.
Journal Article
2007Chemical mechanical planarization (CMP) metrology for 45/32 nm technology generations
Nutsch, A.; Pfitzner, L.
Conference Paper
2007Chemical vapor deposition of tantalum nitride films for metal gate application using TBTDET and novel single-source MOCVD precursors
Lemberger, M.; Baunemann, A.; Bauer, A.J.
Journal Article
2007Control of flatness for chemical mechanical planarization
Nutsch, A.; Pfitzner, L.
Conference Paper
2007Custom-specific UV nanoimprint templates and life-time of antisticking layers: Poster at MNE 2007, 33rd International Conference on Micro and Nano-Engineering, Copenhagen, Denmark
Schmitt, H.; Zeidler, M.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Poster
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2007Degradation of the minority carrier lifetime caused by Mn-correlated defects in Ga-implanted Si:P: Poster at 17th International Photovoltaic Science and Engineering Conference (PVSEC-17), 03.-07.12.2007, Fukuoka, Japan
Beljakowa, S.; Pensl, G.; Rommel, M.
Poster
Fulltext
2007Detailed photocurrent analysis of iron contaminated boron doped silicon by comparison of simulation and measurement
Rommel, M.; Bauer, A.J.; Ryssel, H.
Conference Paper
2007Detection and review of crystal originated surface and sub surface defects on bare silicon
Nutsch, A.; Funakoshi, T.; Pfitzner, L.; Steffen, R.; Supplieth, F.; Ryssel, H.
Conference Paper
2007Electrical characterization of low dose focused ion beam induced damage in silicon by scanning spreading resistance microscopy: Poster at ICN+T 2007, International Conference on Nano Science and Technology 2007, Stockholm, Sweden
Beuer, S.; Yanev, V.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Poster
Fulltext
2007Entwicklung und Charakterisierung eines CMOS-Prozesses mit minimierter Anzahl an Lithographieebenen
Jank, M.
Dissertation
2007Hafnium silicate as control oxide in non-volatile memories
Erlbacher, T.; Bauer, A.J.; Ryssel, H.
Conference Paper
Fulltext
2007High temperature implantation of aluminum in 4H silicon carbide
Rambach, M.; Bauer, A.J.; Ryssel, H.
Conference Paper
2007High throughput manufacturing process of probes for sub-50nm scanning thermal microscopy: Poster at ICN+T 2007, International Conference on Nano Science and Technology 2007, 02.-06.07.2007, Stockholm, Sweden
Richter, C.; Engl, W.; Weinzierl, P.; Sulzbach, T.; Beuer, S.; Petersen, S.; Stockmeyer, J.; Rommel, M.
Poster
Fulltext
2007High voltage 3D-capacitor
Berberich, S.E.; Bauer, A.J.; Ryssel, H.
Conference Paper
2007Influence of the cantilever holder on the vibrations of AFM cantilevers
Rabe, U.; Hirsekorn, S.; Reinstädtler, M.; Sulzbach, T.; Lehrer, C.; Arnold, W.
Journal Article
2007Integrated monitoring of ULK dielectrics out-gassing and measurement of pore sealing efficiency by residual gas analysis technique
Delsol, R.; Chapelon, L.; Chaabouni, H.; Broussous, L.; Schellenberger, M.; Ostrovski, A.; Normandon, P.
Conference Paper
2007Metrology, analysis and characterization in micro- and nanotechnologies: A European Challenge
Pfitzner, L.; Nutsch, A.; Öchsner, R.; Pfeffer, M.; Don, E.; Wyon, C.; Hurlebaus, M.
Conference Paper
2007MOCVD of hafnium silicate films obtained from a single-source precursor on silicon and germanium for gate-dielectric applications
Lemberger, M.; Schön, F.; Dirnecker, T.; Jank, M.P.M.; Frey, L.; Ryssel, H.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.
Journal Article
2007MOCVD of TaN Using the All-Nitrogen-Coordinated Precursors [Ta(NEtMe)3(N-tBu)], [Ta(NEtMe)(N-tBu){C(N-iPr)2(NEtMe)}2] and [Ta(NMeEt)2(N-tBu){Me2N-N(SiMe3)}]
Baunemann, A.; Lemberger, M.; Bauer, A.J.; Parala, H.; Fischer, R.A.
Journal Article
2007MOCVD of tantalum nitride thin films from TBTEMT single source precursor as metal electrodes in CMOS applications
Lemberger, M.; Thiemann, S.; Baunemann, A.; Parala, H.; Fischer, R.A.; Hinz, J.; Bauer, A.J.; Ryssel, H.
Conference Paper
2007Photostrom-Spektroskopie von Silicium im Volumen und an der Grenzfläche zu Siliciumdioxid
Rommel, M.
Dissertation
2007Polarity asymmetry of stress and charge trapping behavior of thin Hf- and Zr-silicate layers
Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Journal Article
2007Process optimization by means of integrated monitoring tools in the semiconductor industry
Pfitzner, L.H.; Nutsch, A.; Roeder, G.; Schellenberger, M.
Conference Paper
2007Quantitative oxide charge determination by photocurrent analysis
Rommel, M.; Bauer, A.J.; Ryssel, H.
Journal Article
Fulltext
2007Recent improvements in the integration of field emitters into scanning probe microscopy sensors: Poster at MNE 2007, 33rd International Conference on Micro- and Nano-Engineering 2007, Copenhagen, Denmark
Beuer, S.; Rommel, M.; Petersen, S.; Amon, B.; Sulzbach, T.; Engl, W.; Bauer, A.J.; Ryssel, H.
Poster
Fulltext
2007Stress induced leakage current mechanism in thin Hf-silicate layers
Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Journal Article
2007Thermal stability of thin ALD ZrO2 layers as dielectrics in deep trench DRAM devices annealed in N2 and NH3: Poster at E-MRS Fall Meeting, September 17-21 2007, Warsaw
Weinreich, W.; Lemberger, M.; Erben, E.; Heitmann, J.; Wilde, L.; Ignatova, V.A.; Teichert, S.; Schröder, U.; Oberbeck, L.; Bauer, A.J.; Ryssel, H.; Kücher, P.
Poster
Fulltext
2007UV nanoimprint materials: Surface energies, residual layers, and imprint quality
Schmitt, H.; Frey, L.; Ryssel, H.; Rommel, M.; Lehrer, C.
Journal Article
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2007Verification of grain boundaries in annealed thin ZrO2 films by electrical AFM technique: Poster at E-MRS Fall Meeting, September 17-21 2007, Warsaw
Yanev, V.; Paskaleva, A.; Weinreich, W.; Lemberger, M.; Petersen, S.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Poster
Fulltext
2006Accurate parameter extraction for the simulation of direct structuring by ion beams: Poster at MNE 2006, 32nd International Conference on Micro- and Nano- Engineering 2006, Barcelona, Spain
Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H.
Poster
Fulltext
2006Active Fuse
Berberich, S.E.; März, M.; Bauer, A.J.; Beuer, S.; Ryssel, H.
Conference Paper
2006Approach for a standardized methodology for mulit-site processing of 300 mm wafers at R&D-sites
Öchsner, R.; Frickinger, J.; Pfeffer, M.; Schellenberger, M.; Roeder, G.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.; Kaushik, V.; Renaud, D.; Danel, A.; Claeys, C.; Bearda, T.; Lering, M.; Graef, M.; Murphy, B.; Walther, H.; Hury, S.
Conference Paper
2006Correlation between defects, leakage currents and conduction mechanisms in thin high-k dielectric layers
Paskaleva, A.; Atanassova, E.; Lemberger, M.; Bauer, A.J.
Conference Paper
2006Creation of e-learning content for microelectronics manufacturing
Öchsner, R.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Beer, K.; Boldin, M.; Mey, B. de; Engelhard, M.; O'Murchu, C.; Ditmar, J.; Colson, P.; Madore, M.; Krahn, L.; Kempe, W.; Luisman, E.
Conference Paper
2006Creation of e-learning content for microelectronics manufacturing
Öchsner, R.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Beer, K.; Boldin, M.; Mey, B. de; Engelhard, M.; O'Murchu, C.; Ditmar, J.; Colson, P.; Madore, M.; Krahn, L.; Kempe, W.; Luisman, E.
Conference Paper
2006Extracting activation and compensation ratio from aluminum implanted 4H-SiC by modeling of resistivity measurements
Rambach, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Conference Paper
2006Flying Wafer - A standardised methodology for multi-site processing of 300 mm wafers at R&D-sites
Frickinger, J.; Oechsner, R.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Claeys, C.; Claes, M.; Bearda, T.; Renaud, D.; Danel, A.; Lering, M.; Graef, M.; Kaushik, V.; Murphy, B.; Fritzsche, M.; Walther, H.; Hury, S.
Conference Paper
2006Flying wafer - A standardised methodology for multi-site processing Of 300 Mm wafers at research and development-sites
Frickinger, J.; Öchsner, R.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Claes, M.; Bearda, T.; Renaud, D.; Danel, A.; Lering, M.; Graef, M.; Kaushik, V.; Murphy, B.; Fritzsche, M.; Walther, H.; Hury, S.
Conference Paper
2006Geraet zur schnellen Messung winkelabhaengiger Beugungseffekte an feinstrukturierten Oberflaechen
Benesch, N.; Schneider, C.; Pfitzner, L.
Patent
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2006High temperature implantation of aluminum in 4H silicon carbide
Rambach, M.; Bauer, A.J.; Ryssel, H.
Conference Paper
2006The impact of mass resolution on molybdenum contamination for B, P, BF, and as implantations
Häublein, V.; Frey, L.; Ryssel, H.
Conference Paper
2006Ion implantation and annealing for an efficient N-doping of TiO2 nanotubes
Ghicov, A.; Macak, J.M.; Tsuchiya, H.; Kunze, J.; Haeublein, V.; Frey, L.; Schmuki, P.
Journal Article
2006Kontaminationsprozesse in der Ionenimplantation
Häublein, V.
Dissertation
2006Metrology and high resolution mapping of shallow junctions formed by low energy implant processes
Don, E.; Pap, A.; Tutto, P.; Pavelka, T.; Wyon, C.; Laviron, C.; Sotta, D.; Oechsner, R.; Pfeffer, M.
Conference Paper
2006Optical and X-ray characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films
Fried, M.; Petrik, P.; Horvath, Z.E.; Lohner, T.; Schmidt, C.; Schneider, C.; Ryssel, H.
Conference Paper
2006Prospects for the realization of APC in a distributed 300 mm R&D-line
Roeder, G.; Schellenberger, M.; Öchsner, R.; Pfeffer, M.; Frickinger, J.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.
Conference Paper
2006Simulation of ion beam direct structuring for 3D nanoimprint template fabrication
Platzgummer, E.; Biedermann, A.; Langfischer, H.; Eder-Kapl, S.; Kuemmel, M.; Cernusca, S.; Loeschner, H.; Lehrer, C.; Frey, L.; Lugstein, A.; Bertagnolli, E.
Conference Paper
2006Standardization of integrated ellipsometry for semiconductor manufacturing
Roeder, G.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Richter, U.; Stehle, J.L.; Piel, J.-P.
Conference Paper
2006Stress induced leakage currents and charge trapping in thin Zr- and Hf-silicate layers
Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Conference Paper
2006TiO2 nanotube layers: Dose effects during nitrogen doping by ion implantation
Ghicov, A.; Macak, J.M.; Tsuchiya, H.; Kunze, J.; Haeublein, V.; Kleber, S.; Schmuki, P.
Journal Article
2006Trends in European R&D - Advanced process control down to atomic scale for micro- and nanotcchnologies
Pfitzner, L.; Schellenberger, M.; Oechsner, R.; Roeder, G.; Pfeffer, M.
Conference Paper
2006VORRICHTUNG ZUR SCHNELLEN, QUANTITATIVEN, KONTAKTLOSEN TOPOGRAFISCHEN UNTERSUCHUNG VON HALBLEITERSCHEIBEN ODER SPIEGELAEHNLICHEN OBERFLAECHEN
Lukacs, E.; Makai, J.; Riesz, F.; Szentpali, B.; Pfitzner, L.
Patent
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2006Well design in a bulk CMOS technology with low mask count
Jank, M.P.M.; Kandziora, C.; Frey, L.; Ryssel, H.
Conference Paper
2005Additional peaks in mass spectra due to charge exchange events and dissociation of molecular ions during extraction
Häublein, V.; Frey, L.; Ryssel, H.
Conference Paper
2005Annealing of aluminum implanted 4H-SiC: Comparison of furnace and lamp annealing
Rambach, M.; Bauer, A.J.; Frey, L.; Friedrichs, P.; Ryssel, H.
Conference Paper
2005An asymmetry of conduction mechanisms and charge trapping in thin high-k Hf(x)Ti(y)Si(z)O films
Paskaleva, A.; Bauer, A.J.; Lemberger, M.
Journal Article
2005Characterization of interface state densities by photocurrent analysis. Comparison of results for different insulator layers: Poster at INFOS05 - 14th Biennial Conference on Insulating Films on Semiconductors, Leuven, Belgium
Rommel, M.; Groß, M.; Ettinger, A.; Bauer, A.J.; Frey, L.; Ryssel, H.
Poster
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2005Characterization of interface state densities by photocurrent analysis: Comparison of results for different insulator layers
Rommel, M.; Groß, M.; Ettinger, A.; Lemberger, M.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper
2005Chemische Dampfphasenabscheidung von neuen Materialien für Sub-50-nm-Transistoren
Frey, L.; Bauer, A.; Ryssel, H.
Journal Article
2005Chemistry of mixed ligand all nitrogen coordinated Ta, Hf, and W precursors for metal nitride MOCVD: Poster at Fifteenth European Conference on Chemical Vapor Deposition (EUROCVD-15), September 4-9 2005, Bochum
Baunemann, A.; Rische, D.; Kim, Y.; Parala, H.; Bauer, A.J.; Lemberger, M.; Fischer, R.A.
Poster
Fulltext
2005Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf(x)Ti(y)Si(z)O films
Paskaleva, A.; Bauer, A.; Lemberger, M.
Journal Article
2005Effekte bei der Nanostrukturierung mittels fokussierter Ionenstrahlen
Lehrer, C.
Dissertation
2005Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor
Lemberger, M.; Paskaleva, A.; Zurcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Journal Article
2005High-k hafnium silicate films on silicon and germanium wafers by MOCVD using a single-source precursor
Lemberger, M.; Schön, F.; Dirnecker, T.; Jank, M.P.M.; Paskaleva, A.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper
2005Implantation and annealing of aluminum in 4H silicon carbide
Rambach, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Conference Paper
2005Investigations into the wear of a WL10 ion source
Häublein, V.; Sadrawetz, S.; Frey, L.; Martinz, H.-P.; Ryssel, H.
Conference Paper
2005MOCVD of conductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine
Kim, Y.; Parala, H.; Bauer, A.J.; Lemberger, M.; Baunemann, A.; Fischer, R.A.
Conference Paper
2005MOCVD of cunductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine
Kim, Y.; Parala, H.; Bauer, A.J.; Lemberger, M.; Baunemann, A.; Fischer, R.A.
Conference Paper
2005Reliable matching of 300 mm defect inspection tools @ sub 60 nm defect size
Nutsch, A.; Supplieth, F.; Pfitzner, L.; Ryssel, H.
Conference Paper
2005SEA-Net - Semiconductor equipment assessment (SEA) migrates to nano electronic technology (NET)
Bruchez, J.; Pfitzner, L.
Book Article
2005Thin Hf(x)Ti(y)Si(z)O films with varying Hf to Ti contents as candidates for high-k dielectrics
Bauer, A.J.; Paskaleva, A.; Lemberger, M.; Frey, L.; Ryssel, H.
Conference Paper
2005Triple trench gate IGBTs
Berberich, S.E.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper
2005Unit process aspects for APC-software implementation
Roeder, G.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Spitzlsperger, G.
Conference Paper
2005Wafer scale characterization of interface state densities without test structures by photocurrent analysis
Rommel, M.; Groß, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Conference Paper
2004Different current conduction mechanisms through thin high-k Hf(x)Ti(y)Si(z)O films due to the varying Hf to Ti ratio
Paskaleva, A.; Bauer, A.J.; Lemberger, M.; Zurcher, S.
Journal Article
2004E-Learning for microelectronics manufacturing
Oechsner, R.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Beer, K.; Boldin, M.
Conference Paper
2004Effective-medium model for fast evaluation of scatterometric measurements on gratings
Weidner, A.; Slodowski, M.; Halm, C.; Schneider, C.; Pfitzner, L.
Conference Paper
2004Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
Lemberger, M.; Paskaleva, A.; Zurcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper
2004Electrical properties and conduction mechanisms in Hf(x)Ti(y)Si(z)O films obtained from novel MOCVD precursors
Paskaleva, A.; Lemberger, M.; Zürcher, S.; Bauer, A.J.
Conference Paper
2004Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams
Lehrer, C.; Frey, L.; Petersen, S.; Ryssel, H.; Schäfer, M.; Sulzbach, T.
Journal Article
2004Investigation of rapid thermal annealed pn-junctions in SiC
Rambach, M.; Weiss, R.; Frey, L.; Bauer, A.J.; Ryssel, H.
Conference Paper
2004Measurement data evaluation for in situ single-wavelength ellipsometry during reactive ion etching: Presentation held at the 5th European AEC/APC Conference. Dresden, Germany, April 14-16, 2004
Roeder, G.; Schneider, C.; Pfitzner, L.; Ryssel, H.
Presentation
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2004Optical characterization of ferroelectric Strontium-Bismuth-Tantalate (SBT) thin films
Schmidt, C.; Petrik, P.; Schneider, C.; Fried, M.; Lohner, T.; Barsony, I.; Gyulai, J.; Ryssel, H.
Conference Paper
2004Polierverfahren in der Halbleiterfertigung
Pfitzner, L.; Bär, E.; Frickinger, J.; Nguyen, H.; Nutsch, A.
Conference Paper
2004Qualitaetsueberwachung bei einer Fertigung mit breitem Produktspektrum
Oechsner, R.; Tschaftary, T.; Strzyzewski, P.; Pfitzner, L.; Schneider, C.; Hennig, P.
Patent
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2004Verfahren zur Bestimmung von Strukturparametern einer Oberflaeche
Weidner, A.; Erdmann, A.; Schneider, C.
Patent
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2003Anordnung zur Bestimmung der Konzentration kontaminierender Teilchen in einem Be- und Entladebereich eines Geraetes zur Verarbeitung wenigstens eines scheibenfoermigen Objektes
Trunk, R.; Schneider, C.; Pfitzner, L.; Storbeck, O.
Patent
Fulltext
2003Defect inspection method for quality control in a reclaim line
Nutsch, A.; Fritsche, M.; Dudenhausen, H.-M.; Pfitzner, L.; Ryssel, H.
Conference Paper
2003Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors
Lemberger, M.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper
2003ENCOTION - A new simulation tool for energetic contamination analysis
Häublein, V.; Frey, L.; Ryssel, H.
Conference Paper
2003Hafnium titanium silicate high-k dielectric films deposited by MOCVD using novel single source precursors
Zürcher, S.; Morstein, M.; Lemberger, M.; Bauer, A.J.
Conference Paper
2003IMA-Workshop Grenoble, France
Roeder, G.; Öchsner, R.; Schneider, C.
Journal Article
2003Influence of antenna shape and resist patterns on charging damage during ion implantation
Dirnecker, T.; Bauer, A.J.; Beyer, A.; Frey, L.; Henke, D.; Ruf, A.; Ryssel, H.
Conference Paper
2003Investigation of implantation-induced defects in thin gate oxides using low field tunnel currents
Jank, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Conference Paper
2003Investigation of lanthanum contamination from a lanthanated tungsten ion source
Häublein, V.; Walser, H.; Frey, L.; Ryssel, H.
Conference Paper
2003Materialbearbeitung mittels fokussierter Ionenstrahlen zur TEM-Probenpräparation und Nanostrukturierung
Frey, L.; Lehrer, C.
Journal Article
2003Materials processing by focused ion-beams for TEM sample preparation and nanostructuring
Frey, L.; Lehrer, C.
Journal Article
2003Nanoscale effects in focused ion beam processing
Frey, L.; Lehrer, C.; Ryssel, H.
Journal Article
2003Partikelmessgeraetanordnung sowie Geraet zur Prozessierung von Halbleiterscheiben mit einer solchen Anordnung
Trunk, R.; Schmid, H.; Schneider, C.; Pfitzner, L.
Patent
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2003ROENTGENSTRAHLQUELLE MIT EINER KLEINEN BRENNFLECKGROESSE
Frey, L.; Lehrer, C.; Hanke, R.; Schmitt, P.
Patent
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2003Surface properties and electrical characteristics of rapid thermal annealed 4H-SiC
Bauer, A.J.; Rambach, M.; Frey, L.; Weiss, R.; Rupp, R.; Friedrichs, P.; Schörner, R.; Peters, D.
Conference Paper
2003Trench sidewall doping for lateral power devices
Berberich, S.E.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper
2003VORRICHTUNG ZUR UEBERWACHUNG VON ABSICHTLICHEN ODER UNVERMEIDBAREN SCHICHTABSCHEIDUNGEN UND VERFAHREN
Ziegler, J.; Waller, R.; Pfitzner, L.; Schneider, C.; Ryssel, H.; Tegeder, V.
Patent
Fulltext
2003Wafer reclaim in semiconductor manufacturing
Frickinger, J.; Nutsch, A.; Pfitzner, L.; Ryssel, H.; Zielonka, G.
Book Article
Fulltext
2003Zirconium silicate films obtained from novel MOCVD precursors
Lemberger, M.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Conference Paper
2002Characterisation of BaxSr1-xTiO3 films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction
Petrik, P.; Khanh, N.Q.; Horvath, Z.E.; Zolnai, Z.; Barsony, I.; Lohner, T.; Fried, M.; Gyulai, J.; Schmidt, C.; Schneider, C.; Ryssel, H.
Journal Article
2002Effect of barium contamination on gate oxide integrity in high-k DRAM
Boubekeur, H.; Mikolajick, T.; Nagel, N.; Bauer, A.; Frey, L.; Ryssel, H.
Journal Article
2002EuSIC: An information network for innovation and standardization in APC and factory integration
Schneider, C.
Journal Article
2002EuSIC: The information network grows. Pt.2
Roeder, G.; Schellenberger, M.; Schneider, C.
Journal Article
2002From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)
Oechsner, R.; Pfeffer, M.; Pfitzner, L.; Binder, H.; Müller, E.; Vonderstrass, T.
Conference Paper
2002HandMon-ISPM: Handling monitoring in a loading stations of a furnaces
Trunk, R.; Schmid, H.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Bernhardt, H.; Marx, E.
Conference Paper
2002Influence of photoresist pattern on charging damage during high current ion implantation
Dirnecker, T.; Ruf, A.; Frey, L.; Beyer, A.; Bauer, A.J.; Henke, D.; Ryssel, H.
Conference Paper
2002MOCVD of titanium dioxide on the basis of new precursors
Leistner, T.; Lehmbacher, K.; Härter, P.; Schmidt, C.; Bauer, A.J.; Frey, L.; Ryssel, H.
Journal Article
2002New single-source precursors for the MOCVD of high-kappa dielectric zirconium silicates to replace SiO2 in semiconducting devices
Zürcher, S.; Morstein, M.; Spencer, N.D.; Lemberger, M.; Bauer, A.
Journal Article
2002Non-destructive characterization of strontium bismuth tantalate films
Petrik, P.; Khanh, N.Q.; Horvath, Z.E.; Zoknai, P.Z.; Barsony, I.; Lohner, T.; Freid, M.; Guylai, J.; Schmidt, C.; Schneider, C.; Ryssel, H.
Journal Article
2002Phi-scatterometry for integrated linewidth and process control in DRAM manufacturing
Hettwer, A.; Benesch, N.; Schneider, C.; Pfitzner, L.; Ryssel, H.
Journal Article
2002Recombination lifetimes of iron-contaminated silicon wafers: Characterization using a single set of capture cross-sections
Rommel, M.; Zoth, G.; Ullrich, M.; Ryssel, H.
Journal Article
2002A roadmap towards cost efficient 300mm equipment
Pfitzner, L.; Küchner, P.
Journal Article
2001Barium, strontium and bismuth contamination in CMOS processes
Boubekeur, H.; Mikolajick, T.; Höpfner, J.; Dehm, C.; Pamler, W.; Steiner, J.; Kilian, G.; Kolbesen, B.O.; Bauer, A.; Frey, L.; Ryssel, H.
Conference Paper
2001Control of organic contamination in CMOS manufacturing
Bügler, J.; Frickinger, J.; Zielonka, G.; Pfitzner, L.; Ryssel, H.; Schottler, M.
Conference Paper
2001Cost reduction strategies for wafer expenditure
Pfitzner, L.; Benesch, N.; Öchsner, R.; Schmidt, C.; Schneider, C.; Tschaftary, T.; Trunk, R.; Dudenhausen, H.-M.
Journal Article
2001Development of sensors for the measurement of chamber wall depositions
Schneider, C.; Pfitzner, L.; Ryssel, H.; Marx, E.; Schneider, T.
Conference Paper
2001Effect of copper on the breakthrough voltage of Poly-Si - Poly-Si capacitors
Boehringer, M.; Pillion, J.E.; Erdmann, V.; Rygula, M.; Winz, K.; Brauchle, P.; Aquino, D.; Zhang, H.; Zahka, J.; Zielonka, G.; Hauber, J.
Conference Paper
2001Electrical reliability aspects of through the gate implanted MOS-structures with thin oxides
Jank, M.; Lemberger, M.; Bauer, A.J.; Frey, L.; Ryssel, H.
Journal Article
2001Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused Ion beam nano machining
Lehrer, C.; Frey, L.; Petersen, S.; Sulzbach, T.; Ohlsson, O.; Dziomba, T.; Danzebrink, H.U.; Ryssel, H.
Journal Article
2001High-resolution constant-height imaging with apertured silicon cantilever probes
Dziomba, T.; Danzebrink, H.U.; Lehrer, C.; Frey, L.; Sulzbach, T.; Ohlsson, O.
Journal Article
2001Impact of platinum contamination on ferroelectric memories
Boubekeur, H.; Mikolajick, T.; Nagel, N.; Dehm, C.; Pamler, W.; Bauer, A.; Frey, L.; Ryssel, H.
Journal Article
2001In Situ Particle Measurement System in Loading Stations of Furnaces
Trunk, R.; Schmid, H.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Bernhardt, H.; Marx, E.
Conference Paper
2001In-situ measurement of the crystallization of amorphous- silicon in a vertical furnace using spectroscopic ellipsometry
Petrik, P.; Lehnert, W.; Schneider, C.; Lohner, T.; Fried, M.; Gyulai, J.; Ryssel, H.
Journal Article
2001In-situ particle measurement in loading stations of furnaces
Trunk, R.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Storbeck, O.
Conference Paper
2001In-situ spectroscopic ellipsometry in vertical furnace - monitoring and control of high-temperature processes
Petrik, P.; Schneider, C.
Journal Article
2001Integrated metrology. An enabler for advanced process control (APC)
Schneider, C.; Pfitzner, L.; Ryssel, H.
Conference Paper
2001Kammer zur Oberflaechenpruefung von Siliciumscheiben
Kluge, A.; Zielonka, G.
Patent
Fulltext
2001Limitations of focused ion beam nanomachining
Lehrer, C.; Frey, L.; Petersen, S.; Ryssel, H.
Journal Article
2001New materials in future memories: High temperature behaviour of Sr, Bi and Ir on silicon surfaces monitored by TXRF and ELYMAT
Kilian, G.; Kolbesen, B.O.; Rommel, M.; Pamler, W.; Unger, E.; Höpfner, A.
Conference Paper
2001New precursors for MOCVD of high-k metal silicates as alternative to SiO2 in semiconducting devices: Poster at Workshop on Nanoscience, October 16-19 2001, Twannberg
Zürcher, S.; Morstein, M.; Bauer, A.J.; Lemberger, M.
Poster
Fulltext
2001Potential and limitations of nucleon transfer experiments with radioactive beams at REX-ISOLDE
Gund, C.; Bauer, H.; Cub, J.; Dietrich, A.; Härtlein, T.; Lenske, H.; Pansegrau, D.; Richter, A.; Scheit, H.; Schreider, G.; Schwalm, D.
Journal Article
2001Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low-pressure in different gas atmospheres
Beichele, M.; Bauer, A.J.; Herden, M.; Ryssel, H.
Journal Article
2001Reliability of ultrathin nitrided oxides grown in low- pressure N2O ambient
Beichele, M.; Bauer, A.J.; Ryssel, H.
Journal Article
2001Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode
Herden, M.; Bauer, A.J.; Beichele, M.; Ryssel, H.
Journal Article
2001Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode in PMOS devices
Strobel, S.; Bauer, A.J.; Beichele, M.; Ryssel, H.
Journal Article
2001Trace analysis for 300 mm wafers and processes with total- reflection x-ray-fluorescence
Nutsch, A.; Erdmann, V.; Zielonka, G.; Pfitzner, L.; Ryssel, H.
Journal Article
2000Defects and gallium - contamination during focused ion beam micro machining
Lehrer, C.; Frey, L.; Petersen, S.; Mizutani, M.; Takai, M.; Ryssel, H.
Conference Paper
2000Ellipsometric study of polycrystalline silicon films prepared by low-pressure chemical vapor deposition
Petrik, P.; Lohner, T.; Fried, M.; Biro, L.P.; Khanh, N.Q.; Gyulai, J.; Lehnert, W.; Schneider, C.; Ryssel, H.
Journal Article
2000Feed-forward control for a lithography/etch sequence
Öchsner, R.; Tschaftary, T.; Sommer, S.; Pfitzner, L.; Ryssel, H.; Gerath, H.; Baier, C.; Hafner, M.
Conference Paper
2000Field emitter array fabricated using focused ion and electron beam induced reaction
Yavas, O.; Ochiai, C.; Takai, M.; Park, Y.K.; Lehrer, C.; Lipp, S.; Frey, L.; Ryssel, H.; Hosono, A.; Okuda, S.
Journal Article
2000Gate oxide damage due to through the gate implantation in MOS-structures with ultrathin and standard oxides
Jank, M.P.M.; Lemberger, M.; Frey, L.; Ryssel, H.
Conference Paper
2000In situ spectroscopic ellipsometry for the characterization of polysilicon formation inside a vertical furnace
Petrik, P.; Lehnert, W.; Schneider, C.; Fried, M.; Lohner, T.; Gyulai, J.; Ryssel, H.
Journal Article
2000In-production monitoring and control of in situ-chamber clean processes
Roeder, G.; Andrian-Werburg, M. von; Tschaftary, T.; Schneider, C.; Pfitzner, L.; Ryssel, H.; John, P.; Tegeder, V.
Conference Paper
2000Phi-scatterometry for on-line process control
Benesch, N.; Hettwer, A.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Broermann, O.; Marx, E.; Tegeder, V.
Conference Paper
2000Reducing airborne molecular contamination by efficient purging of FOUPs for 300-mm wafers. The influence of material properties
Frickinger, J.; Bügler, J.; Zielonka, G.; Pfitzner, L.; Ryssel, H.; Hollemann, S.; Schneider, H.
Journal Article
2000Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low pressure and in different gas atmospheres
Beichele, M.; Bauer, A.J.; Ryssel, H.
Journal Article
2000Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode of PMOS devices
Herden, M.; Bauer, A.J.; Ryssel, H.
Journal Article
2000Verfahren und Vorrichtung zur optischen Kontrolle von Fertigungsprozessen feinstrukturierter Oberflaechen in der Halbleiterfertigung
Benesch, N.; Schneider, C.; Pfitzner, L.
Patent
Fulltext
2000Verfahren und Vorrichtung zur Ueberfuehrung eines Fluessigkeitsstromes in einen Gasstrom
Strzyzewski, P.; Roeder, G.; Pfitzner, L.; Ryssel, H.
Patent
Fulltext
2000Vorrichtung zum Greifen von Scheiben und Verwendung der Vorrichtung
Kluge, A.; Zielonka, G.; Fink, J.
Patent
Fulltext
2000Wafer conserving full range construction analysis for IC fabrication and process development based on FIB/dual beam inline application
Boit, C.; Dawes, N.; Dziesiaty, A.; Demm, E.; Ebersberger, B.; Frey, L.; Geyer, S.; Hirsch, A.; Lehrer, C.; Meis, P.; Kamolz, M.; Lezec, H.; Rettenmaier, H.; Tittes, W.; Treichler, R.; Weiland, R.; Zimmermann, H.
Conference Paper
1999AFM and STM investigation of carbon nanotubes produced by high energy ion irradiation of graphite
Biro, L.P.; Mark, G.I.; Gyulai, J.; Havancszak, K.; Lipp, S.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1999Application and cost analysis of scatterometry for integrated metrology
Benesch, N.; Schneider, C.; Pfitzner, L.; Ryssel, H.
Conference Paper
1999Characterization of oxide etching and wafer cleaning using vapor phase anhydrous hydrofluoric acid and ozone
Bauer, A.J.; Froeschle, B.; Beichele, M.; Ryssel, H.
Conference Paper
1999Comparison of beam-induced deposition using ion microprobe
Park, Y.S.; Nagai, T.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1999Comparison of FIB-induced physical and chemical etching
Park, Y.K.; Paszti, F.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Conference Paper
1999Equipment and wafer modeling of batch furnaces by neural networks
Benesch, N.; Schneider, C.; Lehnert, W.; Pfitzner, L.; Ryssel, H.
Conference Paper
1999Forming nitrided gate oxides by nitrogen implantation into the substrate before gate oxidation by RTO
Bauer, A.J.; Mayer, P.; Frey, L.; Häublein, V.; Ryssel, H.
Conference Paper
1999Impact of nitrogen implantation into polysilicon to reduce boron penetration through the gate oxide
Bauer, A.J.; Mayer, P.; Frey, L.; Häublein, V.; Ryssel, H.
Conference Paper
1999Impurity incorporation during beam assisted processing analyzed using nuclear microprobe
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1999The influence of the measurement environment on the accuracy of the extraction of the physical parameters of solar cells
Gottschalg, R.; Rommel, M.; Infield, D.G.; Kearney, M.J.
Journal Article
1999Investigation of Cu films by focused ion beam induced deposition using nuclear microprobe
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1999Ion beam-treated silicon probes operated in transmission and cross-polarized reflection mode near- infrared scanning near-field optical microscopy (NIR-SNOM)
Dziomba, T.; Sulzbach, T.; Ohlsson, O.; Lehrer, C.; Frey, L.; Danzebrink, H.U.
Journal Article
1999Nano-slit probes for near-field optical microscopy fabricated by focused ion beams
Danzebrink, H.U.; Dziomba, T.; Sulzbach, T.; Ohlsson, T.; Lehrer, C.; Frey, L.
Journal Article
1999Novel process control strategies for 300 mm semiconductor production
Pfitzner, L.; Oechsner, R.; Schneider, C.; Ryssel, H.; Riemer, M.; Podewils, M. von
Journal Article
1999Reliability of ultra-thin gate oxides grown in low-pressure N20 ambient or on nitrogen-implanted silicon
Bauer, A.J.; Beichele; Herden, M.; Ryssel, H.
Conference Paper
19984 nm gate dielectrics prepared by RTP low pressure oxidation in O2 and N2O atmosphere
Bauer, A.J.; Burte, E.P.; Ryssel, H.
Journal Article
1998Applicability of parametric models for amorphous silicon modules and cells
Gottschalg, R.; Rommel, M.; Infield, D.G.; Kearney, M.J.
Conference Paper
1998Comparative study of polysilicon-on-oxide using spectroscopy ellipsometry, atomic force microscopy and transformation electron microscopy
Petrik, P.; Fried, M.; Lohner, T.; Berger, R.; Biro, L.P.; Schneider, C.; Ryssel, H.; Gyulai, J.
Conference Paper
1998Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy
Petrik, P.; Biro, L.P.; Fried, M.; Lohner, T.; Berger, R.; Schneider, C.; Gyulai, J.; Ryssel, H.
Journal Article
1998Fabrication of field emitter array using focused ion and electron beam induced reaction
Takai, M.; Kishimoto, T.; Morimoto, H.; Park, Y.K.; Lipp, S.; Lehrer, C.; Frey, L.; Ryssel, H.; Hosono, A.; Kawabuchi, S.
Conference Paper
1998In situ layer characterization by spectroscopic ellipsometry at high temperatures
Lehnert, W.; Petrik, P.; Schneider, C.; Pfitzner, L.; Ryssel, H.
Conference Paper
1998In situ spectroscopic ellipsometry for advanced process control in vertical furnaces
Lehnert, W.; Berger, R.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Stehle, J.L.; Piel, J.-P.; Neumann, W.
Conference Paper
1998Microanalysis of masklessly fabricated microstructures using nuclear microprobe
Park, Y.K.; Takai, M.; Nagai, T.; Kishimoto, T.; Seidl, A.; Lehrer, C.; Frey, L.; Ryssel, H.
Conference Paper
1998Microprobe analysis of Pt films deposited by beam induced reaction
Park, Y.K.; Takai, M.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1998Neuronale Modellbildung und Temperaturregelung eines Vertikalofens für die Halbleiterfertigung
Benesch, N.; Hofmann, U.; Schneider, C.; Ryssel, H.
Conference Paper
1998Oxide layer thickness measurement
Schneider, C.
Journal Article
1998Productronica 97. Proceedings HLF. Semiconductor equipment and materials contamination control and defect reduction
Ryssel, H.; Pfitzner, L.; Trunk, R.
Book
1998R and D in Europe's equipment industry. The role of research institutes
Ryssel, H.; Schneider, C.
Journal Article
1998Schnelle thermische Niederdruckoxidation
Bauer, A.J.
Conference Paper
1997Characterization of oxide etching and wafer cleaning using vapor-phase anhydrous HF and ozone
Froeschle, B.; Deutschmann, L.; Bauer, A.J.; Burte, E.P.
Conference Paper
1997Characterization of ultrathin on stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride
Bauer, A.J.; Burte, E.P.; Ryssel, H.
Journal Article
1997Cleaning process optimization in a gate oxide cluster tool using an in-line XPS module
Froeschle, B.; Glowacki, F.; Bauer, A.J.; Kasko, I.; Öchsner, R.; Schneider, C.
Conference Paper
1997Comparison of different methods for the parameter determination of the solar cell's double exponential equation
Gottschalg, R.; Rommel, M.; Infield, D.G.; Ryssel, H.
Conference Paper
1997Degradation of polymide by implantation with Ar+ ions
Svorcik, V.; Rybka, V.; Hnatowicz, V.; Mieek, I.; Jankovkij, O.; Öchsner, R.; Ryssel, H.
Journal Article
1997The effect of random dopant fluctuations on the minimum channel length of short-channel MOS transistors
Mikolajick, T.; Häublein, V.; Ryssel, H.
Journal Article
1997Integrated process control for cluster tools using an in-line analytical module
Kasko, I.; Oechsner, R.; Froeschle, B.; Schneider, C.; Pfitzner, L.; Ryssel, H.
Conference Paper
1997Integrated vapor-phase cleaning and pure NO nitridation for gate stack formation
Glowacki, F.; Froeschle, B.; Deutschmann, L.; Sagnes, I.; Laviale, D.; Bensahel, D.; Galimaoui, A.; Martin, F.; Bauer, A.J.
Conference Paper
1997Metrology and analytics for the optimization of CMP processing
Huber, A.; Erdmann, V.; Zielonka, G.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Rohde, A.
Conference Paper
1997Modular metrology tools for productivity enhancement in wafer fabs
Schneider, C.; Pfitzner, L.; Ryssel, H.
Conference Paper
1997Monitoring strategies for yield enhancement
Pfitzner, L.; Oechsner, R.; Scheider, C.; Ryssel, H.; Riemer, M.; Treiber, T.; Podewils, M. von
Conference Paper
1997New developments of the ELYMAT technique
Eichinger, P.; Rommel, M.
Conference Paper
1997A novel XPS system for integration into advanced semiconductor equipment for in-line process control
Kasko, I.; Oechsner, R.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Trubitsyn, A.A.; Kratenko, V.I.
Conference Paper
1997Variation of solar cell equivalent circuit parameters under different operating conditions
Gottschalg, R.; Rommel, M.; Infield, D.G.
Conference Paper
1996Advanced process control system for vertical furnaces
Berger, R.; Schneider, C.; Lehnert, W.; Pfitzner, L.; Ryssel, H.
Book Article
1996The challenge of multi-component, multi-vendor clustertools
Pfitzner, L.; Schneider, C.; Ryssel, H.
Conference Paper
1996Characterization of ultrathin on stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride
Bauer, A.J.; Burte, E.P.; Ryssel, H.
Journal Article
1996A comparison of focused ion beam and electron beam induced deposition processes
Lipp, S.; Frey, L.; Lehrer, C.; Demm, C.; Pauthner, S.; Ryssel, H.
Conference Paper
1996Fortschrittliche Prozeßmodelle für 0,25 µm CMOS Technologien
Lorenz, J.; Bauer, H.; Burenkov, A.; List, S.; Pichler, P.
Book Article
1996High quality 4 nm gate dielectrics prepared at low pressure in oxygen oxide atmospheres
Bauer, A.J.; Burte, E.P.
Conference Paper
1996Integriertes Mehrkammerprozeßsystem IVPS
Schneider, C.
Book Article
1996Optimierung von Silicium-Material und dessen Charakterisierung mittels hochauflösender Analytik und elektrischer Meßtechnik
Zielonka, G.; Keller, U.
Book Article
1996Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiO(x)) deposition
Lipp, S.; Frey, L.; Lehrer, C.; Frank, B.; Demm, E.; Pauthner, S.; Ryssel, H.
Journal Article
19954 nm gate dielectrics prepared by RTP low pressure oxidation in O2 and N2O atmosphere
Bauer, A.J.; Burte, E.P.; Ryssel, H.
Conference Paper
1995Entwicklung von Prozessen zur Herstellung chemischer Flüssigkeitssensoren mit dem sensitiven Bereich auf der Scheibenrückseite
Häublein, V.
Thesis
1995Modeling dynamic clustering of arsenic including non-neglible concentration of arsenic-point defect pairs
Bauer, H.; Pichler, P.; Ryssel, H.
Journal Article
1995Schnelle thermische Prozessierung und Charakterisierung dünner nitridierter Oxide
Bauer, A.J.
Dissertation
1995Structural and electrical properties of thin SiO2 layers grown by RTP in a mixture of N2O and O2
Bauer, A.J.; Burte, E.P.
Journal Article
1994Applications of single-beam photothermal analysis: Beilage zu: Journal de physique (1994), Nr.3
Schork, R.; Krügel, S.; Schneider, C.; Pfitzner, L.; Ryssel, H.
Journal Article
1994Dynamic behavior of arsenic clusters in silicon
Bauer, H.; Pichler, P.; Ryssel, H.
Conference Paper
1992Ellipsometer zur in-situ-Schichtdickenmessung
Berger, R.; Ryssel, H.; Schneider, C.; Aderhold, W.
Patent
Fulltext
1990Meßtechnik und Analytik für Halbleiterfertigungsgeräte
Eichinger, P.; Pfitzner, L.; Ryssel, H.; Schneider, C.
Conference Paper
1990Sicherheit bei Halbleiterfertigungsgeräten
Streckfuß, N.; Pfitzner, L.; Ryssel, H.; Ryzlewicz, C.; Fraunhofer-Arbeitsgruppe für Integrierte Schaltungen -AIS-, Abteilung für Bauelementetechnologie, Erlangen
Conference Proceedings
1990Untersuchungen über Regelparameter in einer Lithographiezelle
Pfitzner, L.; Ryssel, H.; Temmel, G.; Zielonka, G.
Conference Paper
1989Entwicklung von Prozessmodulen und in-situ-Meßmethoden für ein Flexibles Fotolithografisches Prozeßzentrum
Temmel, G.; Zielonka, G.; Olbrich, H.; Mann, R.; Pfitzner, L.; Ryssel, H.
Conference Paper
1989Internal process control and automation for semiconductor manufacturing equipment
Pfitzner, L.; Ryssel, H.; Schneider, C.
Conference Paper
1989International process control and automation for semiconductor manufacturing equipment
Pfitzner, L.; Ryssel, H.; Schneider, C.
Conference Paper
1987Prozeßüberwachung bei Halbleiterfertigungsgeräten
Ryssel, H.; Pfitzner, L.
Conference Paper
1987Studie über den Stand der Technik und zukünftige Anforderungen an Fertigungseinrichtungen zur Herstellung von Halbleiterbauelementen unter Berücksichtigung verschiedener Herstellungsverfahren
Aderhold, W.; Frühauf, W.; Herz, R.; Kahlden, T. von; Pfitzner, L.; Ryssel, H.; Sauter, K.-D.; Schmutz, W.; Schraft, R.D.; Fraunhofer-Arbeitsgruppe für Integrierte Schaltungen, Abteilung für Bauelementtechnologie -AIS-B-, Erlangen; Fraunhofer-Institut für Produktionstechnik und Automatisierung -IPA-, Stuttgart
Study
1986Anforderungen an den Reinraum aus der Sicht der Halbleitertechnologie
Ryssel, H.; Pfitzner, L.
Conference Paper