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Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
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Title
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Titel Supplements
Monday 13 December 2004, Sydney
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2005
Serie
Proceedings of SPIE
Konferenz
International Symposium on Smart Materials, Nano-, and Micro-Smart Systems 2004