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Micromachining and microfabrication process technology XV
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Title
Micromachining and microfabrication process technology XV
Titel Supplements
26 January 2010, San Francisco, California, United States
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2010
Serie
Proceedings of SPIE
Konferenz
Conference "Micromachining and Microfabrication Process Technology" 2010
Photonics West Conference 2010