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Miniaturized systems with micro-optics and micromechanics II
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Title
Miniaturized systems with micro-optics and micromechanics II
Institut
United States, Defense Advanced Research Projects Agency
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
1997
Serie
Proceedings of SPIE
Konferenz
Conference on Miniaturized Systems with Micro-Optics and Micromechanics 1997