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Reliability, packaging, testing, and characterization of MEMS/MOEMS VII
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Title
Reliability, packaging, testing, and characterization of MEMS/MOEMS VII
Titel Supplements
21 - 22 January, 2008, San Jose, California, USA
Hrsg
Hartzell, A.L.
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2008
Serie
Proceedings of SPIE
Konferenz
Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS 2008
Photonics West 2008
MOEMS-MEMS Micro-Nano Fabrication Symposium 2008