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Microsystems engineering: Metrology and inspection
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Title
Microsystems engineering: Metrology and inspection
Titel Supplements
20 - 21 June 2001, Munich, Germany
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2001
Serie
Proceedings of SPIE
Konferenz
Technical Conference "Microsystems Engineering: Metrology and Inspection" 2001