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Micromachining Technology for Micro-Optics
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Title
Micromachining Technology for Micro-Optics
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2000
Serie
Proceedings of SPIE
Konferenz
Conference "Micromachining Technology for Micro-Optics" 2000